Electrostatic driving and capacitive detection is widely used in micro hemispheric shell resonators (HSR). The capacitor gap distance is a dominant factor for the initial capacitance, and affects the driving voltage and sensitivity. In order to decre...
The geometric accuracy of a hemispherical shell resonator (HSR) affects the assembly accuracy and final performance of a hemispherical resonant gyroscope in many ways. During the precision grinding of a resonator, the tool-setting error and wear erro...
The performance of a hemispherical resonant gyroscope (HRG) is directly affected by the sphericity error of the thin-walled spherical shell of the hemispherical shell resonator (HSR). In the production process of the HSRs, high-speed, high-accuracy,...
Many researchers have studied the miniaturization of the hemisphere resonator gyroscope for decades. The hemisphere resonator (HSR), as the core component, has a size that has been reduced to the submillimeter level. We developed a method of batch pr...
In this study, a planar ultrasonic motor platform is presented that uses three half-side excited piezoelectric hemispherical shell resonators. To understand the working principle and the harmonic vibration behavior of the piezoelectric resonator, the...
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, an...
A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical f...
The hemispherical resonator gyroscope is a gyroscope based on the principle of Coriolis vibration, widely used in inertial measurement systems of spacecraft. This article decomposes the gyroscope into two parts: the resonator shell and the gyroscope...
As an inertial sensor with excellent performance, the hemispherical resonator gyro is widely used in aerospace, weapon navigation and other fields due to its advantages of high precision, high reliability, and long life. Due to the uneven distributio...
The profile and concentricity of hemispherical shells affect the frequency split and quality factor of hemispherical resonators. To compensate for machining errors caused by tool wear and tool setting, an on-machine measurement (OMM) method for the p...
The properties of small size, low noise, high performance and no wear-out have made the hemispherical resonator gyroscope a good choice for high-value space missions. To enhance the precision of the hemispherical resonator gyroscope for use in tasks...
As the core component of the all-metal micro resonant gyroscope, the structural parameters and form and position errors of the resonator significantly influence its vibration characteristics, and consequently, the accuracy of the gyroscope. By establ...
The Hemispherical Resonator Gyro (HRG) is a solid-state and widely used vibrating gyroscope, especially in the field of deep space exploration. The flat-electrode HRG is a new promising type of gyroscope with simpler structure that is easier to be fa...
The influence mechanism and identification of mass defects in hemispherical resonators are currently highly challenging and significant research directions. This paper first establishes a shell–rod coupling vibration model under the influence o...
Bell-shaped vibratory angular rate gyro (abbreviated as BVG) is a new type Coriolis vibratory gyro that was inspired by Chinese traditional clocks. The resonator fuses based on a variable thickness axisymmetric multicurved surface shell. Its characte...
A Hemispherical Resonator Gyro (HRG) is the Coriolis Vibratory Gyro (CVG) that measures rotation angle or angular velocity using Coriolis force acting the vibrating mass. A HRG can be used as a rate gyro or integrating gyro without structural modific...
Due to complicated processing technology, the mass distribution of a hemispherical resonator made of fused silica is not uniform, which can affect the azimuth of the standing wave of a resonator under the linear vibration excitation. Therefore, the a...