Laser-Based Nano Fabrication and Nano Lithography: Second Edition

Dear Colleagues,

The improvement of fabrication resolutions is a constant challenge for miniaturizing and enhancing the integration degrees of certain devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, high fabrication resolution, and environment friendliness. The fabrication resolution of laser processing is, however, limited by the diffraction limit. Recently, many efforts have been made to overcome this diffraction limit, particularly in the field of nano fabrication. Specifically, combinations of multiphoton absorption via ultrafast lasers and the threshold effect associated with a Gaussian beam profile provide fabrication resolutions far beyond the diffraction limit. The use of the optical near-field or simulated emission depletion (STED) lithography achieves nano fabrication with feature sizes below 100 nm. Multiple pulse irradiation from the ultrafast laser produces periodic surface nanostructures with a spatial period that is much smaller than the wavelength. Unlimited diffraction resolutions can also be achieved via the tailoring of the laser beams. Furthermore, lasers are also widely used for the synthesis of nano materials, including nano particles and 2D materials. In view of the rapid advancement of this field in recent years, this Special Issue aims to introduce state-of-the-art nano fabrication and nano lithography, based on laser technologies, by informing and uniting researchers within the field.

• Laser materials processing;
• Ultrafast laser processing;
• Nano material synthesis;
• Nano fabrication;
• High-efficiency nanofabrication;
• Nano ablation;
• Nano lithography and 3D nanoprinting;
• Optical near field;
• Surface nanostructuring;
• Tailored beam processing;
• Applications of laser-fabricated nanostructures and nanomaterials;
• Simulation and theoretical approach in nanoscale.

Prof. Dr. Koji Sugioka
Prof. Dr. Ya Cheng
Guest Editors

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• laser processing
• nano fabrication
• nano lithography
• 3D processing
• surface nanostructuring
• nanomaterials

• Laser-Based Nano Fabrication and Nano Lithography in Nanomaterials (12 articles)