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Nanomaterials
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Laser-Based Nano Fabrication and Nano Lithography: Second Edition
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Laser-Based Nano Fabrication and Nano Lithography: Second Edition

A special issue of Nanomaterials (ISSN 2079-4991). This special issue belongs to the section "Nanofabrication and Nanomanufacturing".

Deadline for manuscript submissions: closed (20 April 2025) | Viewed by 8824

Special Issue Editors

Prof. Dr. Koji Sugioka

E-Mail Website
Guest Editor
RIKEN Center for Advanced Photonics, Hirosawa 2-1, Wako, Saitama 351-0198, Japan
Interests: laser processing; micro/nanofabrication; 3D fabrication; micro and nanofluidics; tailored beam processing
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Ya Cheng

E-Mail Website
Guest Editor
1. State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
2. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
Interests: ultrafast nonlinear optics and spectroscopy; nonlinear optics at nanometer scale; super-resolution nanofabrication based on non-perturbative nonlinear optics processes
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The improvement of fabrication resolutions is a constant challenge for miniaturizing and enhancing the integration degrees of certain devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, high fabrication resolution, and environment friendliness. The fabrication resolution of laser processing is, however, limited by the diffraction limit. Recently, many efforts have been made to overcome this diffraction limit, particularly in the field of nano fabrication. Specifically, combinations of multiphoton absorption via ultrafast lasers and the threshold effect associated with a Gaussian beam profile provide fabrication resolutions far beyond the diffraction limit. The use of the optical near-field or simulated emission depletion (STED) lithography achieves nano fabrication with feature sizes below 100 nm. Multiple pulse irradiation from the ultrafast laser produces periodic surface nanostructures with a spatial period that is much smaller than the wavelength. Unlimited diffraction resolutions can also be achieved via the tailoring of the laser beams. Furthermore, lasers are also widely used for the synthesis of nano materials, including nano particles and 2D materials. In view of the rapid advancement of this field in recent years, this Special Issue aims to introduce state-of-the-art nano fabrication and nano lithography, based on laser technologies, by informing and uniting researchers within the field.

  • Laser materials processing;
  • Ultrafast laser processing;
  • Nano material synthesis;
  • Nano fabrication;
  • High-efficiency nanofabrication;
  • Nano ablation;
  • Nano lithography and 3D nanoprinting;
  • Optical near field;
  • Surface nanostructuring;
  • Tailored beam processing;
  • Applications of laser-fabricated nanostructures and nanomaterials;
  • Simulation and theoretical approach in nanoscale.

Prof. Dr. Koji Sugioka
Prof. Dr. Ya Cheng
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Nanomaterials is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • laser processing
  • nano fabrication
  • nano lithography
  • 3D processing
  • surface nanostructuring
  • nanomaterials

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Related Special Issue

Published Papers (5 papers)

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Research

11 pages, 5067 KiB  
Article
Formation of Homogeneous Nanostructure via Interference of Square Flattop Femtosecond Laser Pulses
by Takemasa Sumimoto and Godai Miyaji
Nanomaterials 2025, 15(5), 355; https://doi.org/10.3390/nano15050355 - 25 Feb 2025
Viewed by 678
Abstract
We report on the formation of homogeneous nanostructures using a two-step ablation process with square flattop beams of femtosecond (fs) laser pulses. The Gaussian beam output from a ytterbium fs laser system was converted to a square flattop beam by a refractive beam [...] Read more.
We report on the formation of homogeneous nanostructures using a two-step ablation process with square flattop beams of femtosecond (fs) laser pulses. The Gaussian beam output from a ytterbium fs laser system was converted to a square flattop beam by a refractive beam shaper and a square mask. This beam was split into two with a diffraction optical element, and then the downsized beams were spatially and temporally superimposed on a titanium surface. In the first step, the interference fringes of these two beams formed grooves with a period of 1.9 µm through ablation. Next, the surface was irradiated at normal incidence by a single beam to form a homogeneous line-like nanostructure with a period of 490 nm in a 53 μm square area. This nanostructure had a constant period and was formed over 95% of the laser-processed area, indicating that the ratio between the nanostructure and modification area was over six times larger than that for a Gaussian beam. Full article
(This article belongs to the Special Issue Laser-Based Nano Fabrication and Nano Lithography: Second Edition)
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12 pages, 4877 KiB  
Article
Bubble Printing of Liquid Metal Colloidal Particles for Conductive Patterns
by Masaru Mukai, Tatsuya Kobayashi, Mitsuki Sato, Juri Asada, Kazuhide Ueno, Taichi Furukawa and Shoji Maruo
Nanomaterials 2024, 14(20), 1665; https://doi.org/10.3390/nano14201665 - 17 Oct 2024
Viewed by 3402
Abstract
Bubble printing is a patterning method in which particles are accumulated by the convection of bubbles generated by laser focusing. It is attracting attention as a method that enables the high-speed, high-precision patterning of various micro/nanoparticles. Although the bubble printing method is used [...] Read more.
Bubble printing is a patterning method in which particles are accumulated by the convection of bubbles generated by laser focusing. It is attracting attention as a method that enables the high-speed, high-precision patterning of various micro/nanoparticles. Although the bubble printing method is used for metallic particles and organic particles, most reports have focused on the patterning of solid particles and not on the patterning of liquid particles. In this study, liquid metal wiring patterns were fabricated using a bubble printing method in which eutectic gallium‒indium alloy (EGaIn) colloidal particles (≈diameter 0.7 µm) were fixed on a glass substrate by generating microbubbles through heat generation by focusing a femtosecond laser beam on the EGaIn colloidal particles. The wiring was then made conductive by replacing gallium oxide, which served as a resistance layer on the surface of the EGaIn colloidal particles, with silver via galvanic replacement. Fine continuous lines of liquid metal colloids with a line width of 3.4 µm were drawn by reducing the laser power. Liquid metal wiring with a conductivity of ≈1.5 × 105 S/m was formed on a glass substrate. It was confirmed that the conductivity remained consistent even when the glass substrate was bent to a curvature of 0.02 m−1. Full article
(This article belongs to the Special Issue Laser-Based Nano Fabrication and Nano Lithography: Second Edition)
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13 pages, 3754 KiB  
Article
Size Effects of Copper(I) Oxide Nanospheres on Their Morphology on Copper Thin Films under Near-Infrared Femtosecond Laser Irradiation
by Mizue Mizoshiri, Thuan Duc Tran and Kien Vu Trung Nguyen
Nanomaterials 2024, 14(19), 1584; https://doi.org/10.3390/nano14191584 - 30 Sep 2024
Viewed by 1322
Abstract
The femtosecond laser direct writing of metals has gained significant attention for micro/nanostructuring. Copper (I) oxide nanospheres (NSs), a promising material for multi-photon metallization, can be reduced to copper (Cu) and sintered through near-infrared femtosecond laser pulse irradiation. In this study, we investigated [...] Read more.
The femtosecond laser direct writing of metals has gained significant attention for micro/nanostructuring. Copper (I) oxide nanospheres (NSs), a promising material for multi-photon metallization, can be reduced to copper (Cu) and sintered through near-infrared femtosecond laser pulse irradiation. In this study, we investigated the size effect of copper (I) oxide nanospheres on their morphology when coated on Cu thin films and irradiated by near-infrared femtosecond laser pulses. Three Cu2O NS inks were prepared, consisting of small (φ100 nm), large (φ200 nm), and a mixture of φ100 nm and φ200 nm NSs. A unique phenomenon was observed at low laser pulse energy: both sizes of NSs bonded as single layers when the mixed NSs were used. At higher pulse energies, the small NSs melted readily compared to the large NSs. In comparisons between the large and mixed NSs, some large NSs remained intact, suggesting that the morphology of the NSs can be controlled by varying the concentration of different-sized NSs. Considering the simulation results indicating that the electromagnetic fields between large and small NSs are nearly identical, this differential morphology is likely attributed to the differences in the heat capacity of the NSs. Full article
(This article belongs to the Special Issue Laser-Based Nano Fabrication and Nano Lithography: Second Edition)
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10 pages, 3059 KiB  
Article
High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)
by Jian Liu, Youting Liang, Lang Gao, Chao Sun, Jianglin Guan, Zhe Wang, Zhaoxiang Liu, Zhiwei Fang, Min Wang, Haisu Zhang and Ya Cheng
Nanomaterials 2024, 14(17), 1466; https://doi.org/10.3390/nano14171466 - 9 Sep 2024
Viewed by 1431
Abstract
We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the [...] Read more.
We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta2O5 waveguides have shown the quality factors to be above 105 near 1550 nm. The demonstrated Ta2O5 waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching. Full article
(This article belongs to the Special Issue Laser-Based Nano Fabrication and Nano Lithography: Second Edition)
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14 pages, 5519 KiB  
Article
Optimized Ammonia-Sensing Electrode with CeO2/rGO Nano-Composite Coating Synthesized by Focused Laser Ablation in Liquid
by Mengqi Shi and Hiroyuki Wada
Nanomaterials 2024, 14(15), 1238; https://doi.org/10.3390/nano14151238 - 23 Jul 2024
Viewed by 1136
Abstract
This study investigated the synthesis of cerium oxide (CeO2) nanoparticles (NPs) and composites with reduced graphene oxide (rGO) for the enhanced electrochemical sensing of ammonia. CeO2 NPs were prepared by the focused laser ablation in liquid (LAL) method, which enabled [...] Read more.
This study investigated the synthesis of cerium oxide (CeO2) nanoparticles (NPs) and composites with reduced graphene oxide (rGO) for the enhanced electrochemical sensing of ammonia. CeO2 NPs were prepared by the focused laser ablation in liquid (LAL) method, which enabled the production of high-purity, spherical nanoparticles with a uniform dispersion and sizes under 50 nm in a short time. The effects of varying irradiation fluence and time on the nanoparticle size, production yield, and dispersion were systematically studied. The synthesized CeO2 NPs were doped with rGO to form CeO2/rGO composites, which were drop casted to modify the glassy carbon electrodes (GCE). The CeO2/rGO-GCE electrodes exhibited superior electrochemical properties compared with single-component electrodes, which demonstrated the significant potential for ammonia detection, especially at a 4 J/cm2 fluence. The CeO2/rGO composites showed uniformly dispersed CeO2 NPs between the rGO sheets, which enhanced the conductivity, as confirmed by SEM, EDS mapping, and XRD analysis. Cyclic voltammetry data demonstrated superior electrochemical activity of the CeO2/rGO composite electrodes, with the 2rGO/1CeO2 ratio showing the highest current response and sensitivity. The CV response to varying ammonia concentrations exhibited a linear relationship, indicating the electrode’s capability for accurate quantification. These findings highlight the effectiveness of focused laser ablation in enhancing nanoparticle synthesis and the promising synergistic effects of CeO2 and rGO in developing high-performance electrochemical sensors. Full article
(This article belongs to the Special Issue Laser-Based Nano Fabrication and Nano Lithography: Second Edition)
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