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Plasma Assisted Techniques for Micro/Nano Fabrication

This special issue belongs to the section “D:Materials and Processing“.

Special Issue Information

Dear Colleagues,

Plasma technologies offer unique advantages for manipulating materials at the atomic and molecular levels, enabling high-precision fabrication, functionalization, and surface engineering. From thin-film deposition and nanomaterial growth to surface etching and doping, plasma-assisted methods are transforming how materials are designed and optimized for electronics, energy systems, biomedical devices, and more. As both thermal and non-thermal plasmas continue to evolve, new opportunities arise for cost-effective, energy-efficient, and environmentally sustainable processing solutions for micro- and nanofabrication. We invite submissions for original research, reviews, short communications, and technical notes for an upcoming Special Issue dedicated to plasma-assisted material synthesis and processing. This Special Issue aims to showcase theoretical insights, experimental findings, and applications of plasma-assisted methods for synthesizing novel materials, processing, surface modification, and device fabrication. Topics of interest include, but are not limited to, the following:

  • Advances in plasma-based micro/nano-fabrication;
  • Plasma-based additive manufacturing;
  • Plasma-assisted nanomaterial synthesis (e.g., CNTs, graphene, quantum dots);
  • Plasma etching and surface modification techniques;
  • In situ diagnostics and plasma–material interaction studies;
  • Applications in semiconductors, energy storage, catalysis, and biomedicine;
  • Novel plasma sources and reactor designs.

Dr. Mubarak Mujawar
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 250 words) can be sent to the Editorial Office for assessment.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS and microfabrication
  • plasma-assisted material synthesis and processing
  • plasma sources and plasma diagnostics
  • plasma surface interaction
  • plasma chemistry

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Micromachines - ISSN 2072-666X