Plasma Assisted Techniques for Micro/Nano Fabrication
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".
Deadline for manuscript submissions: 30 April 2026 | Viewed by 46
Special Issue Editor
Special Issue Information
Dear Colleagues,
Plasma technologies offer unique advantages for manipulating materials at the atomic and molecular levels, enabling high-precision fabrication, functionalization, and surface engineering. From thin-film deposition and nanomaterial growth to surface etching and doping, plasma-assisted methods are transforming how materials are designed and optimized for electronics, energy systems, biomedical devices, and more. As both thermal and non-thermal plasmas continue to evolve, new opportunities arise for cost-effective, energy-efficient, and environmentally sustainable processing solutions for micro- and nanofabrication. We invite submissions for original research, reviews, short communications, and technical notes for an upcoming Special Issue dedicated to plasma-assisted material synthesis and processing. This Special Issue aims to showcase theoretical insights, experimental findings, and applications of plasma-assisted methods for synthesizing novel materials, processing, surface modification, and device fabrication. Topics of interest include, but are not limited to, the following:
- Advances in plasma-based micro/nano-fabrication;
- Plasma-based additive manufacturing;
- Plasma-assisted nanomaterial synthesis (e.g., CNTs, graphene, quantum dots);
- Plasma etching and surface modification techniques;
- In situ diagnostics and plasma–material interaction studies;
- Applications in semiconductors, energy storage, catalysis, and biomedicine;
- Novel plasma sources and reactor designs.
Dr. Mubarak Mujawar
Guest Editor
Manuscript Submission Information
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Keywords
- MEMS and microfabrication
- plasma-assisted material synthesis and processing
- plasma sources and plasma diagnostics
- plasma surface interaction
- plasma chemistry
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