MEMS/NEMS Sensors and Actuators, 3rd Edition

Dear Colleagues,

Since the rise of MEMS/NEMS devices in the 1970s, the field of MEMS/NEMS sensors and actuators has grown immensely. From the 21st century onwards, MEMS/NEMS sensors and actuators have been industrialized and applied to consumer markets (such as mobile phones and games), as well as intelligent manufacturing, robots, aerospace, and other fields. Compared with traditional machinery, MEMS/NEMS technology can be miniaturized and is intelligent, multifunctional, highly integrated, and suitable for mass manufacturing processes.

Accordingly, this Special Issue seeks to showcase research papers, communications, and review articles that focus on: (1) the novel structural design of MEMS/NEMS sensors and actuators; (2) improved fabrication, packaging processes, and circuit designs based on all kinds of MEMS/NEMS products; (3) new sensitive materials committed to a wider range of applications, such as polysilicon, graphene, carbon nanotubes, etc.; and (4) the new development of applying MEMS/NEMS sensors and actuators, including (but not limited to) MEMS/NEMS pressure sensors, accelerometers, gyroscopes, and microphones with capacitive, resonant, piezoelectric, and piezoresistive mechanism.

We look forward to receiving your contributions.

Prof. Dr. Yulong Zhao
Dr. Qi Zhang
Guest Editors

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