Design and Applications of Smart Piezoelectric Sensors and Actuators

Dear Colleagues,

Pioneered by groundbreaking research in shock-resistant MEMS, this Special Issue of Micromachines delves into intelligent sensing technologies at the crossroads of piezoelectric materials and microelectromechanical systems (MEMSs) for extreme environments. Despite energy-autonomous sensors being capable of withstanding harsh conditions—such as high-intensity mechanical shocks, thermal fluctuations, and corrosive media—key challenges remain in maintaining signal stability, structural durability, and seamless system integration.

This Special Issue highlights cutting-edge advancements in piezoelectric MEMS, spanning novel material synthesis (e.g., lead zirconate titanate (PZT) thin films and zinc oxide (ZnO) nanowires), resonant device optimization (e.g., cantilever-based frequency tuners and thin-film bulk acoustic wave (FBAR) sensors), and reliable integration/packaging solutions for harsh environments. It also explores emerging applications in aerospace diagnostics, industrial condition monitoring, and biomedical implantables, addressing the critical need for self-powered, high-reliability sensing solutions in sectors where traditional sensors fail.

Prof. Dr. Jianhua Li
Prof. Dr. Jian He
Guest Editors

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