Design and Applications of Smart Piezoelectric Sensors and Actuators
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: 20 February 2026 | Viewed by 11
Special Issue Editors
Interests: microelectromechanical system (MEMS) devices; sensors; actuators; magnetic field sensors
Special Issues, Collections and Topics in MDPI journals
Interests: energy harvesting; nanogenerators; human–computer interaction
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Pioneered by groundbreaking research in shock-resistant MEMS, this Special Issue of Micromachines delves into intelligent sensing technologies at the crossroads of piezoelectric materials and microelectromechanical systems (MEMSs) for extreme environments. Despite energy-autonomous sensors being capable of withstanding harsh conditions—such as high-intensity mechanical shocks, thermal fluctuations, and corrosive media—key challenges remain in maintaining signal stability, structural durability, and seamless system integration.
This Special Issue highlights cutting-edge advancements in piezoelectric MEMS, spanning novel material synthesis (e.g., lead zirconate titanate (PZT) thin films and zinc oxide (ZnO) nanowires), resonant device optimization (e.g., cantilever-based frequency tuners and thin-film bulk acoustic wave (FBAR) sensors), and reliable integration/packaging solutions for harsh environments. It also explores emerging applications in aerospace diagnostics, industrial condition monitoring, and biomedical implantables, addressing the critical need for self-powered, high-reliability sensing solutions in sectors where traditional sensors fail.
Prof. Dr. Jianhua Li
Prof. Dr. Jian He
Guest Editors
Manuscript Submission Information
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Keywords
- piezoelectric
- MEMS
- energy harvesting
- sensors, actuators, and resonators
- magnetic sensors
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