Current and Emerging Semiconductor Materials for Applications in MEMS and Flexible Intelligent Sensors

Dear Colleagues,

We invite you to contribute your research on advanced materials and devices for micro-electro-mechanical systems (MEMSs) to this Special Issue. Micro-electro-mechanical systems (MEMSs) integrate micro-sensors, micro-actuators, micro-mechanical structures, micro-power supplies, and high-performance electronic devices, typically measuring just a few millimeters or smaller. They have revolutionized modern technology, serving as the foundational building blocks for a vast array of applications, from inertial navigation and biomedical sensors to optical communication and environmental monitoring. The performance, reliability, and commercial viability of MEMS devices are intrinsically linked to the materials from which they are fabricated and the innovative design of the devices themselves. While silicon has been the workhorse of the MEMS industry, the relentless pursuit of materials with higher performance, multi-functionality, and the capability to operate in harsh environments is driving the exploration of novel materials and groundbreaking device architectures. The integration and fabrication of advanced materials—including wide-bandgap semiconductors, piezoelectric thin films, 2D materials, metamaterials, and functional polymers—is revealing unprecedented capabilities and opening new developments for MEMS technology.

This Special Issue aims to capture cutting-edge research and development at the intersection of materials science and MEMS technology and provide an international platform for scientists and engineers to disseminate their latest findings on the design, fabrication, characterization, and application of advanced materials in MEMS devices. This issue will foster interdisciplinary dialogue and accelerate innovation by highlighting breakthroughs that push the boundaries of what is possible in micro- and nano-scale electromechanical systems. With this in mind, we invite you to share your research, advancements, and discoveries in this Special Issue entitled “Advanced Materials and Devices for micro-electro-mechanical systems (MEMSs)”. We look forward to receiving your contributions and addressing areas related to innovative materials and devices.

Dr. Chen Wu
Dr. Xudong Fang
Guest Editors

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