- Feature Paper
- Article
Assembly and Bilayer Liftoff of Periodic Nanostructures with Sub-20 nm Resolution Using Thermal Scanning Probe Lithography
- Paloma E. S. Pellegrini,
- Silvia V. G. Nista and
- Stanislav Moshkalev
11 September 2024
The demands for high resolution fabrication processes are ever-increasing, with new and optimized methodologies being highly relevant across several scientific fields. We systematically investigated thermal scanning probe lithography process and deta...

