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Journal: Coatings, 2021
Volume: 11
Number: 1251
Article:
Formation of Aligned α-Si3N4 Microfibers by Plasma Nitridation of Si (110) Substrate Coated with SiO2
Authors:
by
Chang-Hua Yu, Kun-An Chiu, Thi-Hien Do, Li Chang and Wei-Chun Chen
Link:
https://www.mdpi.com/2079-6412/11/10/1251
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