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Journal: CoatingsVolume: 11Number: 1251
Article: Formation of Aligned α-Si3N4 Microfibers by Plasma Nitridation of Si (110) Substrate Coated with SiO2
- Authors:
- Chang-Hua Yu 1,*,
- Kun-An Chiu 1 and
- Wei-Chun Chen 2
- et al.
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