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Controlled Sputtering Pressure on High-Quality Sb2Se3 Thin Film for Substrate Configurated Solar Cells

1
Shenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
2
School of Material and Metallurgical Engineering, Guizhou Institute of Technology, Guiyang 550003, China
3
ISCR (Institut des Sciences Chimiques de Rennes) UMR 6226, CNRS, Univ. Rennes, 35042 Rennes, France
*
Author to whom correspondence should be addressed.
Nanomaterials 2020, 10(3), 574; https://doi.org/10.3390/nano10030574
Received: 22 February 2020 / Revised: 13 March 2020 / Accepted: 20 March 2020 / Published: 22 March 2020
Magnetron sputtering has become an effective method in Sb2Se3 thin film photovoltaic. Research found that post-selenization treatments are essential to produce stoichiometric thin films with desired crystallinity and orientation for the sputtered Sb2Se3. However, the influence of the sputtering process on Sb2Se3 device performance has rarely been explored. In this work, the working pressure effect was thoroughly studied for the sputtered Sb2Se3 thin film solar cells. High-quality Sb2Se3 thin film was obtained when a bilayer structure was applied by sputtering the film at a high (1.5 Pa) and a low working pressure (1.0 Pa) subsequently. Such bilayer structure was found to be beneficial for both crystallization and preferred orientation of the Sb2Se3 thin film. Lastly, an interesting power conversion efficiency (PCE) of 5.5% was obtained for the champion device. View Full-Text
Keywords: thin film solar cell; Sb2Se3; magnetron sputtering; working pressure; post-selenization; substrate configuration thin film solar cell; Sb2Se3; magnetron sputtering; working pressure; post-selenization; substrate configuration
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MDPI and ACS Style

Tang, R.; Chen, X.; Luo, Y.; Chen, Z.; Liu, Y.; Li, Y.; Su, Z.; Zhang, X.; Fan, P.; Liang, G. Controlled Sputtering Pressure on High-Quality Sb2Se3 Thin Film for Substrate Configurated Solar Cells. Nanomaterials 2020, 10, 574.

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