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Open AccessArticle

Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation

1
Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM), ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, Spain
2
Department of Photonics and Bioengineering, ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, Spain
*
Author to whom correspondence should be addressed.
Academic Editor: Andreas Richter
Micromachines 2016, 7(4), 66; https://doi.org/10.3390/mi7040066
Received: 21 February 2016 / Revised: 30 March 2016 / Accepted: 8 April 2016 / Published: 13 April 2016
(This article belongs to the Special Issue Polymeric Microsystems)
We show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a two-dimensional (2D) array of micro-lenses/reservoirs conformally covered by an Al 2D nanohole array (NHA) film on a PC CD substrate. It is also shown that such a curvilinear Al NHA layer can be easily transferred onto a flexible polymeric support. The presented technique provides a new tool for creating lab-on-CD architectures and developing multifunctional (flexible) non-planar nanostructured films and surfaces. View Full-Text
Keywords: micro/nanopatterning; electron-beam lithography; polycarbonate; compact disk; micro-optics; microfluidics; lab-on-CD micro/nanopatterning; electron-beam lithography; polycarbonate; compact disk; micro-optics; microfluidics; lab-on-CD
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MDPI and ACS Style

Barrios, C.A.; Canalejas-Tejero, V. Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation. Micromachines 2016, 7, 66.

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