Next Article in Journal
Investigation of Machining Characteristics and Parameter Optimization for Laser-Assisted Milling of CF/PEEK Composites
Next Article in Special Issue
Numerical Design and Optimization of High Performance Langasite and Hetero-Acoustic Layer-Based Surface Acoustic Wave Device
Previous Article in Journal
Micro-Abrasive Air Jet Machining Technology for Fabrication of Helical Grooves on Bovine Bone
Previous Article in Special Issue
Driving Rotational Circulation in a Microfluidic Chamber Using Dual Focused Surface-Acoustic-Wave Beams
 
 
Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
Journals
Micromachines
Volume 16
Issue 2
10.3390/mi16020150
micromachines-logo
Submit to this Journal Review for this Journal Propose a Special Issue
► Article Menu

Article Menu

share Share announcement Help format_quote Cite question_answer Discuss in SciProfiles
first_page
settings
Order Article Reprints
Font Type:
Arial Georgia Verdana
Font Size:
Aa Aa Aa
Line Spacing:
Column Width:
Background:
Article

High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications

by
Dan Vasilache
,
Claudia Nastase
*,
George Boldeiu
,
Monica Nedelcu
*,
Catalin Parvulescu
,
Adrian Dinescu
and
Alexandru Muller
National Institute for Research and Development in Microtechnologies, 077190 Bucharest, Romania
*
Authors to whom correspondence should be addressed.
Micromachines 2025, 16(2), 150; https://doi.org/10.3390/mi16020150
Submission received: 29 November 2024 / Revised: 24 January 2025 / Accepted: 25 January 2025 / Published: 28 January 2025
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
Browse Figures
Review Reports Versions Notes

Abstract

This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and ~8 GHz for the Sezawa mode. A SiO2 thin layer (~50 nm thick) was employed for the functionalization of the SAW. Relative humidity characterization was performed in the range of 20–90%. The SAW sensors achieved high values of humidity sensitivity for both adsorption and desorption. The Sezawa mode showed about 2.5 times higher humidity sensitivity than the Rayleigh mode: 17.2 KHz/%RH versus 6.17 KHz/%RH for adsorption and 8.88 KHz/%RH versus 3.79 KHz/%RH for desorption.
Keywords: SAW sensor; humidity; SiO2 SAW sensor; humidity; SiO2

Share and Cite

MDPI and ACS Style

Vasilache, D.; Nastase, C.; Boldeiu, G.; Nedelcu, M.; Parvulescu, C.; Dinescu, A.; Muller, A. High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications. Micromachines 2025, 16, 150. https://doi.org/10.3390/mi16020150

AMA Style

Vasilache D, Nastase C, Boldeiu G, Nedelcu M, Parvulescu C, Dinescu A, Muller A. High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications. Micromachines. 2025; 16(2):150. https://doi.org/10.3390/mi16020150

Chicago/Turabian Style

Vasilache, Dan, Claudia Nastase, George Boldeiu, Monica Nedelcu, Catalin Parvulescu, Adrian Dinescu, and Alexandru Muller. 2025. "High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications" Micromachines 16, no. 2: 150. https://doi.org/10.3390/mi16020150

APA Style

Vasilache, D., Nastase, C., Boldeiu, G., Nedelcu, M., Parvulescu, C., Dinescu, A., & Muller, A. (2025). High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications. Micromachines, 16(2), 150. https://doi.org/10.3390/mi16020150

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

Article Metrics

Back to TopTop