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Micromachines, Volume 13, Issue 3

2022 March - 150 articles

Cover Story: High-production-rate fabrication of high-performance thin-film lithium niobate electro-optic modulators has been achieved using photolithography-assisted chemo-mechanical etching (PLACE) technology, resulting in an electro-optic 3-dB bandwidth beyond 50 GHz, a half wave voltage-length product of 2.16 Vcm, and a fiber-to-fiber insertion loss of 2.6 dB. View this paper
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Articles (150)

  • Review
  • Open Access
16 Citations
5,343 Views
23 Pages

21 March 2022

Micro-hotplate gas sensors are widely used in air quality monitoring, identification of hazardous chemicals, human health monitoring, and other fields due to their advantages of small size, low power consumption, excellent consistency, and fast respo...

  • Article
  • Open Access
7 Citations
2,908 Views
8 Pages

21 March 2022

In this study, we developed a liquid crystal (LC) droplet-based sensing platform for the detection of carboxylesterase (CES) and its inhibitors. The LC droplet patterns in contact with myristoylcholine chloride (Myr) exhibited dark cross appearances,...

  • Article
  • Open Access
6 Citations
3,007 Views
8 Pages

Low-Power Magnetron Sputtering Deposition of Antimonene Nanofilms for Water Splitting Reaction

  • Xingli Wang,
  • Junyu Ge,
  • Nicole Ru-Xuan Ang,
  • Kun Liang,
  • Chong-Wei Tan,
  • Hong Li and
  • Beng Kang Tay

21 March 2022

Antimonene (Sb) is a novel kind of two-dimensional (2D) material that is predicted to be promising for various applications, such as water splitting and semiconductor devices. Several methods have been reported to prepare Sb nanoflakes/nanofilms; how...

  • Article
  • Open Access
7 Citations
3,278 Views
15 Pages

21 March 2022

Research on the intracerebral mechanism of insomnia induced by serotonin (5-HT) deficiency is indispensable. In order to explore the effect of 5-HT deficiency-induced insomnia on brain regions related to memory in rats, we designed and fabricated a m...

  • Article
  • Open Access
15 Citations
5,845 Views
33 Pages

Design and Evaluation of a Button Sensor Antenna for On-Body Monitoring Activity in Healthcare Applications

  • Shahid Muhammad Ali,
  • Cheab Sovuthy,
  • Sima Noghanian,
  • Tale Saeidi,
  • Muhammad Faran Majeed,
  • Amir Hussain,
  • Faisal Masood,
  • Shariq Mahmood Khan,
  • Syed Aziz Shah and
  • Qammer H. Abbasi

20 March 2022

A button sensor antenna for on-body monitoring in wireless body area network (WBAN) systems is presented. Due to the close coupling between the sensor antenna and the human body, it is highly challenging to design sensor antenna devices. In this pape...

  • Article
  • Open Access
3 Citations
4,284 Views
16 Pages

Characterization of a Centrifugal Microfluidic Orthogonal Flow Platform

  • Michael Shane Woolf,
  • Leah M. Dignan,
  • Scott M. Karas,
  • Hannah M. Lewis,
  • Kevyn C. Hadley,
  • Aeren Q. Nauman,
  • Marcellene A. Gates-Hollingsworth,
  • David P. AuCoin,
  • Heather R. Green and
  • James P. Landers
  • + 1 author

20 March 2022

To bring to bear the power of centrifugal microfluidics on vertical flow immunoassays, control of flow orthogonally through nanoporous membranes is essential. The on-disc approach described here leverages the rapid print-cut-laminate (PCL) disc fabri...

  • Feature Paper
  • Review
  • Open Access
57 Citations
15,010 Views
30 Pages

20 March 2022

Microfluidics is a multidisciplinary technology with applications in various fields, such as biomedical, energy, chemicals and environment. Thermoplastic is one of the most prominent materials for polymer microfluidics. Properties such as good mechan...

  • Article
  • Open Access
8 Citations
3,092 Views
14 Pages

Microparticle Transport and Sedimentation in a Rhythmically Expanding Alveolar Chip

  • Wei Zhang,
  • Jun Dong,
  • Huimin Lv,
  • Weitao Bai,
  • Hongzhou Lu,
  • Bernd R. Noack,
  • Yonggang Zhu and
  • Yue Yang

20 March 2022

Understanding the mechanism of particle transport and sedimentation in pulmonary alveolus is important for deciphering the causes of respiratory diseases and helping the development of drug delivery. In this study, taking advantage of the microfluidi...

  • Article
  • Open Access
6 Citations
3,718 Views
8 Pages

20 March 2022

Electro-wetting-on-dielectric (EWOD) enables the manipulation of droplets on a two-dimensional surface, which provides a versatile technique for digital microfluidics at a micro- or nano-scale. However, the deficiency of the dispensing precision has...

  • Article
  • Open Access
4 Citations
3,259 Views
11 Pages

20 March 2022

The fabrication of bespoke artificial defects on bearing raceways helps in mimicking incipient faults during real application or for directly validating the diagnostic technology depending on their shapes and sizes. This is particularly useful when r...

  • Article
  • Open Access
20 Citations
7,885 Views
15 Pages

Continuous Glucose Monitoring System Based on Percutaneous Microneedle Array

  • Ming-Nan Chien,
  • Yu-Jen Chen,
  • Chin-Han Bai and
  • Jung-Tung Huang

20 March 2022

A continuous blood glucose monitoring system (CGMS) which include a microneedle-array blood glucose sensor, a circuit module, and a transmission module placed in a wearable device is developed in this research. When in use, the wearable device is att...

  • Review
  • Open Access
54 Citations
8,187 Views
16 Pages

Acoustics-Actuated Microrobots

  • Yaxuan Xiao,
  • Jinhua Zhang,
  • Bin Fang,
  • Xiong Zhao and
  • Nanjing Hao

20 March 2022

Microrobots can operate in tiny areas that traditional bulk robots cannot reach. The combination of acoustic actuation with microrobots extensively expands the application areas of microrobots due to their desirable miniaturization, flexibility, and...

  • Feature Paper
  • Communication
  • Open Access
9 Citations
3,793 Views
9 Pages

Characterization of Active Electrode Yield for Intracortical Arrays: Awake versus Anesthesia

  • Brandon Sturgill,
  • Rahul Radhakrishna,
  • Teresa Thuc Doan Thai,
  • Sourav S. Patnaik,
  • Jeffrey R. Capadona and
  • Joseph J. Pancrazio

20 March 2022

Intracortical microelectrode arrays are used for recording neural signals at single-unit resolution and are promising tools for studying brain function and developing neuroprosthetics. Research is being done to increase the chronic performance and re...

  • Article
  • Open Access
3 Citations
2,617 Views
12 Pages

20 March 2022

We proposed a novel Langasite (LGS) bonding method only using high temperature to solve the manufacturing difficulty of the sealed microcavity of pressure sensors. The optimal bonding parameters by comparative experiments were defined as 1350 °C...

  • Article
  • Open Access
6 Citations
3,240 Views
14 Pages

Development of a Soft Robotics Module for Active Control of Sitting Comfort

  • Tjark Roozendaal,
  • Martin Verwaal,
  • Alice Buso,
  • Rob B. N. Scharff,
  • Yu Song and
  • Peter Vink

20 March 2022

Sitting comfort is an important factor for passengers in selecting cars, airlines, etc. This paper proposes a soft robotic module that can be integrated into the seat cushion to provide better comfort experiences to passengers. Building on rapid manu...

  • Article
  • Open Access
2 Citations
3,188 Views
13 Pages

Detecting the Knowledge Domains of Compound Semiconductors

  • Qian-Yo Lee,
  • Chiyang James Chou,
  • Ming-Xuan Lee and
  • Yen-Chun Lee

20 March 2022

The development of compound semiconductors (CS) has received extensive attention worldwide. This study aimed to detect and visualize CS knowledge domains for quantifying CS research patterns and emerging trends through a scientometric review based on...

  • Article
  • Open Access
7 Citations
4,671 Views
9 Pages

19 March 2022

Photonic integrated circuits (PICs) have garnered increasing attention because of their high efficiency in information processing. Recently, lithium niobate on insulator (LNOI) has become a new platform for PICs with excellent properties. Several tun...

  • Review
  • Open Access
38 Citations
6,310 Views
24 Pages

Modification of Surfaces with Vaterite CaCO3 Particles

  • Bushra Zafar,
  • Jack Campbell,
  • Jake Cooke,
  • Andre G. Skirtach and
  • Dmitry Volodkin

19 March 2022

Former studies have demonstrated a strong interest toward the crystallization of CaCO3 polymorphs in solution. Nowadays, CaCO3 crystallization on solid surfaces is extensively being studied using biomolecules as substrates for the control of the grow...

  • Article
  • Open Access
9 Citations
2,897 Views
15 Pages

Miniaturized Wideband Antenna Prototype Operating over the Ku-Band

  • Sujan Shrestha,
  • Hijab Zahra,
  • Arslan Kiyani,
  • Mohsen Asadnia,
  • Syed Muzahir Abbas and
  • Abdelhady Mahmoud

19 March 2022

A wideband antenna is proposed based on three-dimensional printing technology. The antenna was designed using the PREPERM 10 material, with permittivity ϵr = 10, where the overall height of the proposed prototype was maintained as 12.83 mm (0.5...

  • Feature Paper
  • Article
  • Open Access
8 Citations
4,970 Views
6 Pages

3D Printed PCB Microfluidics

  • Stefan Gassmann,
  • Sathurja Jegatheeswaran,
  • Till Schleifer,
  • Hesam Arbabi and
  • Helmut Schütte

19 March 2022

The combination of printed circuit boards (PCB) and microfluidics has many advantages. The combination of electrodes, sensors and electronics is needed for almost all microfluidic systems. Using PCBs as a substrate, this integration is intrinsic. Add...

  • Article
  • Open Access
28 Citations
5,520 Views
13 Pages

Fabrication of 3D GelMA Scaffolds Using Agarose Microgel Embedded Printing

  • Bo Yang,
  • Tianqi Liu,
  • Ge Gao,
  • Xianglin Zhang and
  • Bin Wu

18 March 2022

Photocrosslinked Gelatin–Methacryloyl (GelMA) has been widely used in the field of 3D bioprinting due to its excellent biological properties, but its properties are not yet optimized. With the advent of embedded printing, the balance between hy...

  • Review
  • Open Access
31 Citations
15,540 Views
35 Pages

Electropolishing and Shaping of Micro-Scale Metallic Features

  • Sana Zaki,
  • Nan Zhang and
  • Michael D. Gilchrist

18 March 2022

Electropolishing (EP) is most widely used as a metal finishing process. It is a non-contact electrochemical process that can clean, passivate, deburr, brighten, and improve the biocompatibility of surfaces. However, there is clear potential for it to...

  • Article
  • Open Access
7 Citations
3,023 Views
10 Pages

Complementary Approaches for Enhancing Polystyrene Hydrophobicity: Additives Development and Replication of Micro/Nanotextures

  • Rachel Le Brouster,
  • Julien Giboz,
  • Ali Nourdine,
  • Lionel Tenchine,
  • Florence Dubelley and
  • Patrice Mele

18 March 2022

This work aims at developing polymer surfaces with enhanced hydrophobicity by controlling both the surface chemistry and the surface structure. As a first step, a chemical surface modification is achieved by the incorporation of a synthetized tailore...

  • Article
  • Open Access
11 Citations
3,796 Views
8 Pages

18 March 2022

In this paper, thermoreflectance microscopy was used to measure the high spatial resolution temperature distribution of the p-GaN HEMT under high power density. The maximum temperature along the GaN channel was located at the drain-side gate edge reg...

  • Article
  • Open Access
5 Citations
4,751 Views
12 Pages

A 2.5 V, 2.56 ppm/°C Curvature-Compensated Bandgap Reference for High-Precision Monitoring Applications

  • Guangqian Zhu,
  • Zhaoshu Fu,
  • Tingting Liu,
  • Qidong Zhang and
  • Yintang Yang

18 March 2022

This work presents a high-precision high-order curvature-compensated bandgap voltage reference (BGR) for battery monitoring applications. The collector currents of bipolar junction transistor (BJT) pairs with different ratios and temperature characte...

  • Article
  • Open Access
2 Citations
3,148 Views
11 Pages

A Novel AlGaN/Si3N4 Compound Buffer Layer HEMT with Improved Breakdown Performances

  • Jingwei Guo,
  • Shengdong Hu,
  • Ping Li,
  • Jie Jiang,
  • Ruoyu Wang,
  • Yuan Wang and
  • Hao Wu

18 March 2022

In this article, an AlGaN and Si3N4 compound buffer layer high electron mobility transistor (HEMT) is proposed and analyzed through TCAD simulations. In the proposed HEMT, the Si3N4 insulating layer is partially buried between the AlGaN buffer layer...

  • Article
  • Open Access
5 Citations
3,227 Views
9 Pages

Monitoring Junction Temperature of RF MOSFET under Its Working Condition Using Fiber Bragg Grating

  • Zhenmin Liu,
  • Na Chen,
  • Yong Liu,
  • Zhenyi Chen,
  • Fufei Pang and
  • Tingyun Wang

18 March 2022

When a high-power radio frequency (RF) metal oxide semiconductor field effect transistor (MOSFET) works in low-efficiency situations, considerable power is dissipated into heat, resulting in an excessive junction temperature and a likely failure. In...

  • Article
  • Open Access
13 Citations
3,687 Views
12 Pages

Screen-Printing of Functionalized MWCNT-PEDOT:PSS Based Solutions on Bendable Substrate for Ammonia Gas Sensing

  • Direk Boonthum,
  • Chutima Oopathump,
  • Supasil Fuengfung,
  • Patipak Phunudom,
  • Ananya Thaibunnak,
  • Nachapan Juntong,
  • Suvanna Rungruang and
  • Udomdej Pakdee

18 March 2022

Multi-walled carbon nanotubes (MWCNTs) were grown on a stainless-steel foil by thermal chemical vapor deposition (CVD) process. The MWCNTs were functionalized with carboxylic groups (COOH) on their surfaces by using oxidation and acid (3:1 H2SO4/HNO3...

  • Article
  • Open Access
7 Citations
4,383 Views
16 Pages

18 March 2022

Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and uniformity i...

  • Feature Paper
  • Review
  • Open Access
27 Citations
17,135 Views
33 Pages

17 March 2022

This paper describes the fabrication opportunities that Printed Circuit Boards (PCBs) offer for electronic and biomedical engineering. Historically, PCB substrates have been used to support the components of the electronic devices, linking them using...

  • Article
  • Open Access
2 Citations
2,943 Views
22 Pages

Optical Force and Torque on a Graphene-Coated Gold Nanosphere by a Vector Bessel Beam

  • Bing Yan,
  • Xiulan Ling,
  • Renxian Li,
  • Jianyong Zhang and
  • Chenhua Liu

17 March 2022

In the framework of the generalized Lorenz–Mie theory (GLMT), the optical force and torque on a graphene-coated gold nanosphere by a vector Bessel beam are investigated. The core of the particle is gold, whose dielectric function is given by th...

  • Article
  • Open Access
24 Citations
6,184 Views
11 Pages

Design of a Capacitive MEMS Accelerometer with Softened Beams

  • Chenggang Wang,
  • Yongcun Hao,
  • Zheng Sun,
  • Luhan Zu,
  • Weizheng Yuan and
  • Honglong Chang

17 March 2022

Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerom...

  • Article
  • Open Access
8 Citations
3,828 Views
21 Pages

17 March 2022

The motion control of high-precision electromechanitcal systems, such as micropositioners, is challenging in terms of the inherent high nonlinearity, the sensitivity to external interference, and the complexity of accurate identification of the model...

  • Article
  • Open Access
14 Citations
3,886 Views
7 Pages

Temperature-Dependent Optical Properties of Perovskite Quantum Dots with Mixed-A-Cations

  • Lei Hu,
  • Weiren Zhao,
  • Weijia Duan,
  • Guojie Chen,
  • Bingfeng Fan and
  • Xiaoli Zhang

17 March 2022

In this work, metal halide perovskite quantum dots (QDs) with Formamidinium (FA) and Cs mixed cations were fabricated using a solution-processed method at room temperature. By controlling Cs doping ratios in a precursor, the optical properties of mix...

  • Article
  • Open Access
3,612 Views
13 Pages

A Simple Method for Fabricating Ink Chamber of Inkjet Printheads

  • Zheguan Huang,
  • Yang Tang,
  • Zhibin Liu,
  • Xiaofei Zhang,
  • Yan Zhou and
  • Yonglin Xie

17 March 2022

The process of fabricating chambers is becoming more important for inkjet printheads. However, there are some problems with the majority of present fabrication methods, such as nozzle structural deformation, blocked chambers, and collapsed chambers....

  • Article
  • Open Access
10 Citations
3,764 Views
10 Pages

17 March 2022

In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers...

  • Review
  • Open Access
14 Citations
5,986 Views
13 Pages

Ion-Driven Electrochemical Random-Access Memory-Based Synaptic Devices for Neuromorphic Computing Systems: A Mini-Review

  • Heebum Kang,
  • Jongseon Seo,
  • Hyejin Kim,
  • Hyun Wook Kim,
  • Eun Ryeong Hong,
  • Nayeon Kim,
  • Daeseok Lee and
  • Jiyong Woo

17 March 2022

To enhance the computing efficiency in a neuromorphic architecture, it is important to develop suitable memory devices that can emulate the role of biological synapses. More specifically, not only are multiple conductance states needed to be achieved...

  • Feature Paper
  • Article
  • Open Access
11 Citations
5,108 Views
9 Pages

17 March 2022

X-ray zone plates made from gold are common optical components used in X-ray imaging experiments. These nanostructures are normally fabricated using a combination of electron-beam lithography and gold electroplating with cyanide gold baths. In this s...

  • Article
  • Open Access
38 Citations
8,656 Views
23 Pages

Belt Tear Detection for Coal Mining Conveyors

  • Xiaoqiang Guo,
  • Xinhua Liu,
  • Hao Zhou,
  • Rafal Stanislawski,
  • Grzegorz Królczyk and
  • Zhixiong Li

17 March 2022

The belt conveyor is the most commonly used conveying equipment in the coal mining industry. As the core part of the conveyor, the belt is vulnerable to various failures, such as scratches, cracks, wear and tear. Inspection and defect detection is es...

  • Feature Paper
  • Article
  • Open Access
10 Citations
4,030 Views
11 Pages

Observations on Detonation Growth of Lead Azide at Microscale

  • Yunfei Mu,
  • Wei Zhang,
  • Ruiqi Shen and
  • Yinghua Ye

16 March 2022

Lead azide (LA) is a commonly used primary explosive, the detonation growth of which is difficult to study because it is so sensitive and usually has a small charge size in applications. We used photon Doppler velocimetry (PDV) and calibrated polyvin...

  • Article
  • Open Access
19 Citations
4,730 Views
10 Pages

Flexible Quantum-Dot Color-Conversion Layer Based on Microfluidics for Full-Color Micro-LEDs

  • Panyuan Li,
  • Jin Tao,
  • Yongzhou Zhao,
  • Yifang Sun,
  • Kaili Fan,
  • Licai Zhu,
  • Wenchao Sun,
  • Jinguang Lv,
  • Yuxin Qin and
  • Jingqiu Liang
  • + 4 authors

16 March 2022

In this article, red and green perovskite quantum dots are incorporated into the pixels of a flexible color-conversion layer assembly using microfluidics. The flexible color-conversion layer is then integrated with a blue micro-LED to realize a full-...

  • Article
  • Open Access
13 Citations
3,127 Views
11 Pages

16 March 2022

We experimentally investigate the transpiration cooling characteristics of a porous material, sintered wire mesh. Three samples with different porosities in a plain weave structure are tested with various blowing ratios in an open-loop wind tunnel wi...

  • Article
  • Open Access
10 Citations
3,378 Views
17 Pages

16 March 2022

The conductive slip ring is used for power or signal transmission between two objects rotating relative to each other. It has become an essential part of modern industrial development. In traditional automated production measurements, the typical met...

  • Article
  • Open Access
8 Citations
4,340 Views
18 Pages

16 March 2022

MEMS (micro electrical mechanical systems) gyroscopes are used to measure the angular rate in several applications. The performance of a MEMS gyroscope is dependent on more than one factor, such as mechanical imperfections, environmental condition-de...

  • Article
  • Open Access
14 Citations
4,272 Views
11 Pages

Chip-Based MEMS Platform for Thermogravimetric/Differential Thermal Analysis (TG/DTA) Joint Characterization of Materials

  • Wenhan Zhou,
  • Xinyu Li,
  • Fanglan Yao,
  • Haozhi Zhang,
  • Ke Sun,
  • Fang Chen,
  • Pengcheng Xu and
  • Xinxin Li

16 March 2022

Combined use of thermal analysis techniques can realize complementarity of different characterization methods. Comprehensive thermal analysis with both thermogravimetric analysis and differential thermal analysis (TG/DTA) can measure not only mass ch...

  • Article
  • Open Access
6 Citations
2,894 Views
9 Pages

An Automated Power Evaluation Workbench for Triboelectric Nanogenerators

  • Ming Yuan,
  • Chunhui Li,
  • Sheng Zhang and
  • Yannan Xie

15 March 2022

Triboelectric nanogenerators (TENGs) have high potential in self-powered sensing and energy harvesting applications. In general, TENGs’ internal source resistance is high, and their output power varies under different load resistance values. Th...

  • Article
  • Open Access
6 Citations
3,755 Views
9 Pages

Study of the Electron-Phonon Coupling in PbS/MnTe Quantum Dots Based on Temperature-Dependent Photoluminescence

  • Nur Diyana Halim,
  • Muhammad Safwan Zaini,
  • Zainal Abidin Talib,
  • Josephine Ying Chyi Liew and
  • Mazliana Ahmad Kamarudin

15 March 2022

The temperature dependence of photoluminescence (PL) emission is a valuable tool for investigating carrier localization, recombination, and carrier–phonon interactions. Herein, electron–phonon couplings in lead sulfide (PbS) quantum dots...

  • Technical Note
  • Open Access
2 Citations
3,718 Views
10 Pages

Reconfigurable Electronic Platforms: A Top-Down Approach to Learn about Design and Integration of Electronic Systems

  • Almudena Rivadeneyra,
  • Francisco J. Romero,
  • Michael Haider,
  • Vijay D. Bhatt,
  • Jose F. Salmeron,
  • Noel Rodriguez,
  • Diego P. Morales and
  • Markus Becherer

15 March 2022

This case report presents a real example of a study which introduces the use of reconfigurable platforms in the teaching of electronics engineering to establish a bridge between theory and practice. This gap is one of the major concerns of the electr...

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Micromachines - ISSN 2072-666X