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Article

The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring

1
The College of Information Engineering, Qujing Normal University, Qujing 655000, China
2
The College of Mechanical Engineering, Guizhou Institute of Technology, Guiyang 550003, China
*
Author to whom correspondence should be addressed.
Micromachines 2021, 12(4), 440; https://doi.org/10.3390/mi12040440
Submission received: 2 February 2021 / Revised: 11 April 2021 / Accepted: 13 April 2021 / Published: 15 April 2021

Abstract

An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining technology. To evaluate the threshold consistency and stability of omnidirectional inertia switch, the stiffness of rectangular suspension springs is analyzed. The simulation result shows that the coupling stiffness of the rectangular spring suspension system in the non-sensitive direction is a little more than that in the sensitive direction, which indicated that the omnidirectional switching system’s stability is reinforced, attributed to the design of rectangular springs. The dynamic response simulation shows that the threshold of the omnidirectional inertial switch using the rectangular suspension spring has high consistency in the horizontal direction. The prototype of an inertial switch is fabricated and tested successfully. The testing results indicate even threshold distribution in the horizontal direction. The threshold acceleration of the designed inertial switch is about 58 g in the X direction and 37 g in the Z direction; the contact time is about 18 μs.
Keywords: MEMS; inertial micro-switch; surface micromachining; contact time; rectangular suspension spring MEMS; inertial micro-switch; surface micromachining; contact time; rectangular suspension spring

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MDPI and ACS Style

Chen, W.; Wang, R.; Wang, H.; Sun, S. The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring. Micromachines 2021, 12, 440. https://doi.org/10.3390/mi12040440

AMA Style

Chen W, Wang R, Wang H, Sun S. The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring. Micromachines. 2021; 12(4):440. https://doi.org/10.3390/mi12040440

Chicago/Turabian Style

Chen, Wenguo, Rui Wang, Huiying Wang, and Shulei Sun. 2021. "The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring" Micromachines 12, no. 4: 440. https://doi.org/10.3390/mi12040440

APA Style

Chen, W., Wang, R., Wang, H., & Sun, S. (2021). The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring. Micromachines, 12(4), 440. https://doi.org/10.3390/mi12040440

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