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Micromachines, Volume 12, Issue 4

April 2021 - 120 articles

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Cover Story: The Si substrate has attracted significant interest owing to its lower cost and easy integration with electronic devices. However, when the GaN layer is directly grown on the Si substrate, the Si surface easily reacts with NH3 to form the SiNx that prohibits GaN growth. Furthermore, the large lattice mismatch (~17%) between GaN and Si (111) causes a high dislocation density. Finally, the difference in thermal expansion coefficients (~56%) introduces large tensile stress in the GaN layer, which causes the wafer bowing and crack generation. Therefore, we demonstrate that AlN layers prepared with NH3 growth interruption improve the crystalline quality and strain relaxation in GaN-based LEDs grown on Si substrates. View this paper.

Articles (120)

  • Article
  • Open Access
22 Citations
4,218 Views
20 Pages

20 April 2021

A fast mixing is critical for subsequent practical development of microfluidic devices, which are often used for assays in the detection of reagents and samples. The present work sets up computational fluid dynamics simulations to explore the flow ch...

  • Article
  • Open Access
4 Citations
2,943 Views
13 Pages

20 April 2021

Due to the stochastic and time-dependent character of the ice embryo formation and growth (i.e., a process that can be analyzed statistically, but cannot be predicted precisely), the heterogeneous ice nucleation on atmospheric aerosols or macroscopic...

  • Article
  • Open Access
1 Citations
2,835 Views
26 Pages

20 April 2021

The modern trend of decarbonization has encouraged intensive research on renewable energy (RE)-based distributed power generation (DG) and smart grid, where advanced electronic power interfaces are necessary for connecting the generator with power gr...

  • Review
  • Open Access
50 Citations
8,010 Views
29 Pages

Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review

  • Zhaoxin Lao,
  • Neng Xia,
  • Shijie Wang,
  • Tiantian Xu,
  • Xinyu Wu and
  • Li Zhang

20 April 2021

Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive appli...

  • Feature Paper
  • Review
  • Open Access
14 Citations
6,960 Views
28 Pages

20 April 2021

We present a broad assessment on the studies of optically-trapped single airborne aerosol particles, particularly chemical aerosol particles, using laser technologies. To date, extensive works have been conducted on ensembles of aerosols as well as o...

  • Article
  • Open Access
1 Citations
3,510 Views
9 Pages

19 April 2021

A flexible Ti/Cr/Ti multilayer strain gauge have been successfully developed based on polyimide substrate. The pure Ti metal strain gauge have shown the hysteresis phenomenon at the relationship between resistance and strain during tensile test. The...

  • Article
  • Open Access
4 Citations
3,947 Views
15 Pages

19 April 2021

This paper discusses the development of a multi-directional, universal, electromagnetic energy harvester. The device is a ball consisting of two parts: a rigid spherical core with internal tubes, coils and magnets, and a flexible silicone-based shell...

  • Article
  • Open Access
9 Citations
2,732 Views
7 Pages

Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe

  • Fan Zhang,
  • Qing Yang,
  • Hao Bian,
  • Xun Hou and
  • Feng Chen

19 April 2021

A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high...

  • Article
  • Open Access
7 Citations
2,696 Views
10 Pages

19 April 2021

A new type of wireless passive, high sensitivity, high temperature sensor was designed to meet the real-time temperature test in the harsh aero-engine environment. The sensor consists of a complementary split ring resonator and a substrate integrated...

  • Article
  • Open Access
16 Citations
3,740 Views
16 Pages

19 April 2021

Ultrasonic vibration-assisted cutting (UVAC) has been regarded as a promising technology to machine difficult-to-machine materials such as tungsten carbide, optical glass, and hardened steel in order to achieve superfinished surfaces. To increase vib...

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