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Micromachines, Volume 12, Issue 4

2021 April - 120 articles

Cover Story: The Si substrate has attracted significant interest owing to its lower cost and easy integration with electronic devices. However, when the GaN layer is directly grown on the Si substrate, the Si surface easily reacts with NH3 to form the SiNx that prohibits GaN growth. Furthermore, the large lattice mismatch (~17%) between GaN and Si (111) causes a high dislocation density. Finally, the difference in thermal expansion coefficients (~56%) introduces large tensile stress in the GaN layer, which causes the wafer bowing and crack generation. Therefore, we demonstrate that AlN layers prepared with NH3 growth interruption improve the crystalline quality and strain relaxation in GaN-based LEDs grown on Si substrates. View this paper.
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Articles (120)

  • Article
  • Open Access
27 Citations
4,486 Views
20 Pages

20 April 2021

A fast mixing is critical for subsequent practical development of microfluidic devices, which are often used for assays in the detection of reagents and samples. The present work sets up computational fluid dynamics simulations to explore the flow ch...

  • Article
  • Open Access
4 Citations
3,205 Views
13 Pages

20 April 2021

Due to the stochastic and time-dependent character of the ice embryo formation and growth (i.e., a process that can be analyzed statistically, but cannot be predicted precisely), the heterogeneous ice nucleation on atmospheric aerosols or macroscopic...

  • Article
  • Open Access
1 Citations
2,996 Views
26 Pages

20 April 2021

The modern trend of decarbonization has encouraged intensive research on renewable energy (RE)-based distributed power generation (DG) and smart grid, where advanced electronic power interfaces are necessary for connecting the generator with power gr...

  • Review
  • Open Access
51 Citations
8,654 Views
29 Pages

Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review

  • Zhaoxin Lao,
  • Neng Xia,
  • Shijie Wang,
  • Tiantian Xu,
  • Xinyu Wu and
  • Li Zhang

20 April 2021

Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive appli...

  • Feature Paper
  • Review
  • Open Access
16 Citations
8,019 Views
28 Pages

20 April 2021

We present a broad assessment on the studies of optically-trapped single airborne aerosol particles, particularly chemical aerosol particles, using laser technologies. To date, extensive works have been conducted on ensembles of aerosols as well as o...

  • Article
  • Open Access
1 Citations
3,776 Views
9 Pages

19 April 2021

A flexible Ti/Cr/Ti multilayer strain gauge have been successfully developed based on polyimide substrate. The pure Ti metal strain gauge have shown the hysteresis phenomenon at the relationship between resistance and strain during tensile test. The...

  • Article
  • Open Access
4 Citations
4,251 Views
15 Pages

19 April 2021

This paper discusses the development of a multi-directional, universal, electromagnetic energy harvester. The device is a ball consisting of two parts: a rigid spherical core with internal tubes, coils and magnets, and a flexible silicone-based shell...

  • Article
  • Open Access
10 Citations
2,889 Views
7 Pages

Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe

  • Fan Zhang,
  • Qing Yang,
  • Hao Bian,
  • Xun Hou and
  • Feng Chen

19 April 2021

A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high...

  • Article
  • Open Access
7 Citations
2,879 Views
10 Pages

19 April 2021

A new type of wireless passive, high sensitivity, high temperature sensor was designed to meet the real-time temperature test in the harsh aero-engine environment. The sensor consists of a complementary split ring resonator and a substrate integrated...

  • Article
  • Open Access
18 Citations
4,166 Views
16 Pages

19 April 2021

Ultrasonic vibration-assisted cutting (UVAC) has been regarded as a promising technology to machine difficult-to-machine materials such as tungsten carbide, optical glass, and hardened steel in order to achieve superfinished surfaces. To increase vib...

  • Feature Paper
  • Article
  • Open Access
5 Citations
4,128 Views
13 Pages

19 April 2021

This work presents a comprehensive comparison of switchable electromechanical transducers in an AlN/GaN heterostructure toward the goal of reconfigurable RF building blocks in next-generation ad hoc radios. The transducers’ inherent switching was ach...

  • Article
  • Open Access
12 Citations
4,564 Views
20 Pages

Micro-Hole Generation by High-Energy Pulsed Bessel Beams in Different Transparent Materials

  • Valeria V. Belloni,
  • Monica Bollani,
  • Shane M. Eaton,
  • Paolo Di Trapani and
  • Ottavia Jedrkiewicz

18 April 2021

Micro-drilling transparent dielectric materials by using non-diffracting beams impinging orthogonally to the sample can be performed without scanning the beam position along the sample thickness. In this work, the laser micromachining process, based...

  • Article
  • Open Access
60 Citations
6,848 Views
13 Pages

CPW-Fed Flexible Ultra-Wideband Antenna for IoT Applications

  • Sharadindu Gopal Kirtania,
  • Bachir Adham Younes,
  • Abdul Rakib Hossain,
  • Tutku Karacolak and
  • Praveen Kumar Sekhar

17 April 2021

In this article, an inkjet-printed circular-shaped monopole ultra-wideband (UWB) antenna with an inside-cut feed structure was implemented on a flexible polyethylene terephthalate (PET) substrate. The coplanar waveguide (CPW)-fed antenna was designed...

  • Article
  • Open Access
1 Citations
3,103 Views
13 Pages

Soft Tooling-Friendly Inductive Mold Heating—A Novel Concept

  • Tobias Vieten,
  • Davide Zanin,
  • Andrea Knöller,
  • Thomas Litwin,
  • Wolfgang Eberhardt and
  • André Zimmermann

17 April 2021

In order to economize injection molded prototypes, additive manufacturing of, e.g., curable plastics based tools, can be employed, which is known as soft tooling. However, one disadvantage of such tools is that the variothermal process, which is need...

  • Article
  • Open Access
15 Citations
5,264 Views
11 Pages

Understanding the Leakage Mechanisms and Breakdown Limits of Vertical GaN-on-Si p+nn Diodes: The Road to Reliable Vertical MOSFETs

  • Kalparupa Mukherjee,
  • Carlo De Santi,
  • Matteo Buffolo,
  • Matteo Borga,
  • Shuzhen You,
  • Karen Geens,
  • Benoit Bakeroot,
  • Stefaan Decoutere,
  • Andrea Gerosa and
  • Matteo Meneghini
  • + 2 authors

16 April 2021

This work investigates p+nn GaN-on-Si vertical structures, through dedicated measurements and TCAD simulations, with the ultimate goal of identifying possible strategies for leakage and breakdown optimization. First, the dominant leakage processes w...

  • Article
  • Open Access
17 Citations
3,469 Views
12 Pages

16 April 2021

The rapid and sensitive detection of Staphylococcus aureus (S. aureus) is essential to ensure food safety and protect humans from foodborne diseases. In this study, a sensitive and facile electrochemical immunosensor using AuPdPt trimetallic nanopart...

  • Article
  • Open Access
6 Citations
4,358 Views
14 Pages

Hydrogel Surface-Modified Polyurethane Copolymer Film with Water Permeation Resistance and Biocompatibility for Implantable Biomedical Devices

  • Hey In Jeong,
  • Dae Hyeok An,
  • Jun Woo Lim,
  • Taehoon Oh,
  • Hojin Lee,
  • Sung-Min Park,
  • Jae Hyun Jeong and
  • Jae Woo Chung

16 April 2021

To use implantable biomedical devices such as electrocardiograms and neurostimulators in the human body, it is necessary to package them with biocompatible materials that protect the internal electronic circuits from the body’s internal electrolytes...

  • Article
  • Open Access
4 Citations
3,482 Views
19 Pages

Control of Spring Softening and Hardening in the Squared Daisy

  • Mathieu Gratuze,
  • Abdul-Hafiz Alameh,
  • Seyedfakhreddin Nabavi and
  • Frederic Nabki

16 April 2021

Nonlinear, mechanical microelectromechanical system (MEMS) resonating structures exhibit large displacement and a relatively broad operating bandwidth. These unique features make them particularly of interest for the development of MEMS actuators and...

  • Article
  • Open Access
2,460 Views
12 Pages

16 April 2021

This paper presents the effect of blade type and feeding force during resin-bonded dentin specimen preparation on the microtensile bond strength (μTBS) test. Forty resin-bonded flat middle dentin specimens were divided into four groups. The specimens...

  • Article
  • Open Access
13 Citations
4,545 Views
10 Pages

High-Performance CVD Bilayer MoS2 Radio Frequency Transistors and Gigahertz Mixers for Flexible Nanoelectronics

  • Qingguo Gao,
  • Chongfu Zhang,
  • Kaiqiang Yang,
  • Xinjian Pan,
  • Zhi Zhang,
  • Jianjun Yang,
  • Zichuan Yi,
  • Feng Chi and
  • Liming Liu

16 April 2021

Two-dimensional (2D) MoS2 have attracted tremendous attention due to their potential applications in future flexible high-frequency electronics. Bilayer MoS2 exhibits the advantages of carrier mobility when compared with monolayer mobility, thus maki...

  • Article
  • Open Access
14 Citations
4,115 Views
17 Pages

16 April 2021

Appropriate use of helmets as industrial personal protective gear is a long-standing challenge. The dilemma for any user wearing a helmet is thermal discomfort versus the chances of head injuries while not wearing it. Applying helmet microclimate psy...

  • Article
  • Open Access
33 Citations
5,927 Views
27 Pages

Flexible Piezoresistive Tactile Sensor Based on Polymeric Nanocomposites with Grid-Type Microstructure

  • Da-Huei Lee,
  • Cheng-Hsin Chuang,
  • Muhammad Omar Shaikh,
  • Yong-Syuan Dai,
  • Shao-Yu Wang,
  • Zhi-Hong Wen,
  • Chung-Kun Yen,
  • Chien-Feng Liao and
  • Cheng-Tang Pan

16 April 2021

Piezoresistive tactile sensors made using nanocomposite polymeric materials have been shown to possess good flexibility, electrical performance, and sensitivity. However, the sensing performance, especially in the low-pressure range, can be significa...

  • Article
  • Open Access
12 Citations
3,291 Views
15 Pages

15 April 2021

The technology for stepper drive that can achieve accurate motion in the hydraulic field has always been urgently needed in the industry. This paper proposes a hydraulic stepper drive based on five high speed on/off valves and two miniature plunger c...

  • Article
  • Open Access
9 Citations
2,771 Views
18 Pages

15 April 2021

Identification and sensing are two of the main tasks a wireless sensor node has to perform in an Internet of Things (IoT) environment. Placing active powered nodes on objects is the most usual approach for the fulfillment of these functions. With the...

  • Article
  • Open Access
6 Citations
3,016 Views
11 Pages

15 April 2021

An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining technology. To evaluate the threshold consistency and stability of omnidirectional inertia switch, t...

  • Feature Paper
  • Review
  • Open Access
41 Citations
10,328 Views
36 Pages

Review of Design Considerations for Brain-on-a-Chip Models

  • Tiffany Cameron,
  • Tanya Bennet,
  • Elyn M. Rowe,
  • Mehwish Anwer,
  • Cheryl L. Wellington and
  • Karen C. Cheung

15 April 2021

In recent years, the need for sophisticated human in vitro models for integrative biology has motivated the development of organ-on-a-chip platforms. Organ-on-a-chip devices are engineered to mimic the mechanical, biochemical and physiological proper...

  • Article
  • Open Access
4 Citations
3,481 Views
15 Pages

15 April 2021

To date, most research regarding amino acid detection and quantification in fingermarks relies on spectrometric methods. Herein, the Sakaguchi colorimetric test was adapted to a rotationally-driven microfluidic platform and used to detect and quantif...

  • Article
  • Open Access
9 Citations
3,591 Views
14 Pages

Optimization of a Spin-Orbit Torque Switching Scheme Based on Micromagnetic Simulations and Reinforcement Learning

  • Roberto L. de Orio,
  • Johannes Ender,
  • Simone Fiorentini,
  • Wolfgang Goes,
  • Siegfried Selberherr and
  • Viktor Sverdlov

15 April 2021

Spin-orbit torque memory is a suitable candidate for next generation nonvolatile magnetoresistive random access memory. It combines high-speed operation with excellent endurance, being particularly promising for application in caches. In this work, a...

  • Article
  • Open Access
18 Citations
3,342 Views
17 Pages

15 April 2021

This paper presents the design, fabrication, and testing of a novel three-dimensional (3D) three-fingered electrothermal microgripper with multiple degrees of freedom (multi DOFs). Each finger of the microgripper is composed of a V-shaped electrother...

  • Article
  • Open Access
7 Citations
3,235 Views
11 Pages

Biosensing Near the Exceptional Point Based on Resonant Optical Tunneling Effect

  • Yang Liu,
  • Pengyun Yan,
  • Feng Liu,
  • Aoqun Jian and
  • Shengbo Sang

14 April 2021

Inspired by exceptional point (EP) sensing in non-Hermitian systems, in this work, a label-free biosensor for detecting low-concentration analytes is proposed, via a special multilayer structure: a resonant optical tunneling resonator. Due to the squ...

  • Article
  • Open Access
3 Citations
2,547 Views
20 Pages

Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures

  • Harris J. Hall,
  • Sean McDaniel,
  • Piyush Shah,
  • David Torres,
  • Jose Figueroa and
  • LaVern Starman

14 April 2021

Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to micr...

  • Feature Paper
  • Review
  • Open Access
108 Citations
16,775 Views
15 Pages

Wearable Sensors and Systems for Wound Healing-Related pH and Temperature Detection

  • Ning Tang,
  • Youbin Zheng,
  • Xue Jiang,
  • Cheng Zhou,
  • Han Jin,
  • Ke Jin,
  • Weiwei Wu and
  • Hossam Haick

14 April 2021

Wound healing is a complex tissue regeneration process involving many changes in multiple physiological parameters. The pH and temperature of a wound site have long been recognized as important biomarkers for assessing wound healing status. For effec...

  • Article
  • Open Access
11 Citations
3,459 Views
11 Pages

14 April 2021

Lower warp is required for the single crystal silicon wafers sawn by a fixed diamond wire saw with the thinness of a silicon wafer. The residual stress in the surface layer of the silicon wafer is the primary reason for warp, which is generated by th...

  • Article
  • Open Access
23 Citations
3,436 Views
11 Pages

Electroosmotic Mixing of Non-Newtonian Fluid in a Microchannel with Obstacles and Zeta Potential Heterogeneity

  • Lanju Mei,
  • Defu Cui,
  • Jiayue Shen,
  • Diganta Dutta,
  • Willie Brown,
  • Lei Zhang and
  • Ibibia K. Dabipi

14 April 2021

This paper investigates the electroosmotic micromixing of non-Newtonian fluid in a microchannel with wall-mounted obstacles and surface potential heterogeneity on the obstacle surface. In the numerical simulation, the full model consisting of the Nav...

  • Article
  • Open Access
11 Citations
6,703 Views
9 Pages

14 April 2021

Normally-off p-gallium nitride (GaN) high electron mobility transistor (HEMT) devices with multi-finger layout were successfully fabricated by use of a self-terminating etching technique with Cl2/BCl3/SF6-mixed gas plasma. This etching technique feat...

  • Article
  • Open Access
2 Citations
2,721 Views
10 Pages

14 April 2021

This paper explores the effectiveness of the white, red, green, and blue light emitted diodes (LEDs) light sources to detect the third layer of the electrode pixel and the fourth layer of the via-hole passivation on thin-film transistors. The time-de...

  • Article
  • Open Access
10 Citations
2,912 Views
9 Pages

14 April 2021

A rapid, sensitive and simple microflow cytometry-based agglutination immunoassay (MCIA) was developed for point-of-care (POC) quantitative detection of SARS-CoV-2 IgM and IgG antibodies. The antibody concentration was determined by using the transit...

  • Review
  • Open Access
153 Citations
23,870 Views
18 Pages

Microneedles: A New Generation Vaccine Delivery System

  • Ipshita Menon,
  • Priyal Bagwe,
  • Keegan Braz Gomes,
  • Lotika Bajaj,
  • Rikhav Gala,
  • Mohammad N. Uddin,
  • Martin J. D’Souza and
  • Susu M. Zughaier

14 April 2021

Transdermal vaccination route using biodegradable microneedles is a rapidly progressing field of research and applications. The fear of painful needles is one of the primary reasons most people avoid getting vaccinated. Therefore, developing an alter...

  • Review
  • Open Access
91 Citations
15,161 Views
34 Pages

14 April 2021

Piezoelectric vibration energy harvesting technologies have attracted a lot of attention in recent decades, and the harvesters have been applied successfully in various fields, such as buildings, biomechanical and human motions. One important challen...

  • Article
  • Open Access
27 Citations
3,473 Views
12 Pages

14 April 2021

A new electrochemical platform was suggested for the sensing of the dasatinib (DA) anticancer drug based on paste electrode modification (PE) amplified with Fe3O4-SWCNTs nanocomposite and 1-hexyl-3-methylimidazolium tetrafluoroborate (mim-BF4). The...

  • Article
  • Open Access
7 Citations
3,491 Views
7 Pages

Directional and Fast Photoluminescence from CsPbI3 Nanocrystals Coupled to Dielectric Circular Bragg Gratings

  • Yan Hua,
  • Yuming Wei,
  • Bo Chen,
  • Zhuojun Liu,
  • Zhe He,
  • Zeyu Xing,
  • Shunfa Liu,
  • Peinian Huang,
  • Yan Chen and
  • Jin Liu
  • + 1 author

13 April 2021

Lead halide perovskite nanocrystals (NCs), especially the all-inorganic perovskite NCs, have drawn substantial attention for both fundamental research and device applications in recent years due to their unique optoelectronic properties. To build hig...

  • Article
  • Open Access
5 Citations
4,313 Views
8 Pages

Stability Assessment of p-i-n Perovskite Photovoltaic Mini-Modules Utilizing Different Top Metal Electrodes

  • Janardan Dagar,
  • Gopinath Paramasivam,
  • Carola Klimm,
  • Markus Fenske,
  • Christof Schultz,
  • Rutger Schlatmann,
  • Bert Stegemann and
  • Eva Unger

13 April 2021

Long-term stability is one of the major challenges for p-i-n type perovskite solar modules (PSMs). Here, we demonstrate the fabrication of fully laser-patterned series interconnected p-i-n perovskite mini-modules, in which either single Cu or Ag laye...

  • Article
  • Open Access
13 Citations
4,175 Views
15 Pages

13 April 2021

Microscale and nanoscale robots, frequently referred to as future cargo systems for targeted drug delivery, can effectively convert magnetic energy into locomotion. However, navigating and imaging them within a complex colloidal vascular system at a...

  • Article
  • Open Access
4 Citations
3,458 Views
14 Pages

13 April 2021

This paper proposes a temperature threshold triggered energy harvester for potential application of heat-event monitoring. The proposed structure comprises an electricity generation cantilever and a bimetallic cantilever that magnetically attract tog...

  • Review
  • Open Access
33 Citations
6,207 Views
22 Pages

12 April 2021

Harmonic Radio Frequency Identification (RFID) systems have attracted significant interest over the last decade as it provides many benefits over the conventional RFID systems. Harmonic RFID is desired over conventional RFID systems due to reduced se...

  • Feature Paper
  • Article
  • Open Access
5 Citations
3,368 Views
9 Pages

Color-Tunable White LEDs with Single Chip Realized through Phosphor Pattern and Thermal-Modulating Optical Film

  • Zhenpeng Su,
  • Bo Zhao,
  • Zheng Gong,
  • Yang Peng,
  • Fan Bai,
  • Huai Zheng and
  • Sang Woo Joo

12 April 2021

In this paper, a new method to regulate the correlated color temperature (CCT) of white light-emitting diodes (LEDs) is proposed for the single-chip packaging structure, in which the blue light distribution emitted from the chip in the red/yellow pho...

  • Article
  • Open Access
12 Citations
4,539 Views
18 Pages

12 April 2021

Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of achieving lar...

  • Article
  • Open Access
3,151 Views
9 Pages

11 April 2021

Artificial vascularized tubular liver tissue has perfusable blood vessels that allow fluid access to the tissue interior, enabling the injection of drugs and collection of metabolites, which are valuable for drug discovery. It is amenable to standard...

  • Article
  • Open Access
6 Citations
2,846 Views
15 Pages

Design and Performance Study for Electrothermally Deep-Sea Drive Microunits Using a Paraffin Phase Change Material

  • Dayong Ning,
  • Zihao Li,
  • Gangda Liang,
  • Qibo Wang,
  • Weifeng Zou,
  • Yongjun Gong and
  • Jiaoyi Hou

9 April 2021

Considering the further exploration of the ocean, the requirements for deep-sea operation equipment have increased. Many problems existing in the widely used deep-sea hydraulic system have become increasingly prominent. Compared with the traditional...

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Micromachines - ISSN 2072-666X