Search Results (4,158)

This paper offers a critical review of cutting-edge research on multi-energy microgrids (MEMs), with a novel exploration of their potential role in supporting urban air mobility (UAM), specifically electric vertical takeoff and landing (eVTOL) aircraft. While extensive research has focused on improving the economic performance and emission reductions of MEMs, particularly in the context of electric vehicle (EV) charging, there remains a significant gap in understanding how microgrids can support the decarbonization of UAM. The paper examines the opportunities and challenges of integrating microgrids with UAM operations, highlighting the need for more research to optimize energy management systems that balance renewable energy use with the growing demand for aerial transport. Thermal energy storage systems are emphasized as a critical component for addressing transportation energy needs, offering a promising solution to reduce carbon emissions while enhancing system efficiency. This review aims to provide new insights into how the coupling of microgrids and UAM can contribute to the development of economically and environmentally sustainable smart cities. Full article

To address the demand for underwater acoustic detection with hydrostatic pressure resistance, this paper proposes a fiber-optic Fabry–Perot (F-P) underwater acoustic sensor based on micro-electromechanical system (MEMS) technology. According to the F-P interference principle, the diaphragm deforms under acoustic pressure, inducing variations in the F-P cavity length which modulate the interference spectrum and enable the measurement of underwater acoustic signals. A sensing diaphragm with a composite structure consisting of a central boss and a micro-hole array is designed, which improves the optical signal quality while reducing the influence of the pressure difference between the inner and outer surfaces of the diaphragm on sensor operation. MEMS fabrication, computer numerical control (CNC) machining, and laser fusion splicing technologies are employed to achieve batch fabrication of the sensing units and adhesive-free integration of the sensor. Experimental results show that the proposed sensor exhibits a flat frequency response within ±1.5 dB over the range of 1 kHz to 10 kHz, with an average signal-to-noise ratio (SNR) of 86.35 dB. The sensitivity reaches −181.79 dB re 1 rad/μPa at 10 kHz, with a maximum nonlinearity of 0.48% F.S., a repeatability error of 0.15% F.S. and a dynamic range of 100.83 dB. The proposed sensor features miniaturization, high consistency, hydrostatic pressure self-balancing capability, and immunity to electromagnetic interference, providing a solid foundation for hydrostatic-pressure-resistant underwater acoustic measurements in deep-sea environments. Full article

Compliant displacement amplification mechanisms are widely used in MEMSs and micro-actuated systems to enhance the limited stroke of micro-actuators. However, systematic integration of instantaneous center building block (IC-BB)-based conceptual design and structured post-synthesis optimization for symmetric single-input dual-output compliant displacement amplification mechanisms (SIDO-CDAMs) remains limited in the literature. In this work, a symmetric SIDO-CDAM is first conceptually synthesized using the IC-BB approach by employing only compliant dyad building blocks (CDBs), resulting in a mechanism that produces dual outputs in the same direction. The synthesized conceptual mechanism is subsequently realized with necessary geometric refinements and modeled to validate the conceptual design. A two-stage post-synthesis optimization framework is then proposed to enhance geometrical advantage (GA) while reducing stiffness. In Stage-1, Taguchi design of experiments combined with analysis of variance (ANOVA) is used to screen design parameters, identify the dominant factor, and fix it at its optimal level to eliminate masking effects. In Stage-2, a reduced Taguchi design integrated with gray relational analysis (GRA) is applied for multi-response optimization based on finite element analysis (FEA). Regression models and FEA-based confirmation tests are employed to validate the optimized design. The results demonstrate a significant improvement in displacement amplification with a simultaneous reduction in stiffness compared to the base design. The proposed IC-BB-based conceptual synthesis, coupled with structured post-synthesis optimization, provides a robust and computationally efficient framework for the development of micro-actuation and precision engineering applications. Full article

This work presents wirelessly interrogated microelectromechanical system (MEMS) capacitive sensors for continuous intraocular pressure (IOP) monitoring. The sensor uses a passive inductor–capacitor (LC) tank circuit comprising a fixed, on-chip spiral inductor and a pressure-sensitive, variable-gap capacitor with parallel-plate membrane electrodes and side anchors. The membrane is designed with dimensions of 500 µm × 500 µm × 2 µm and a capacitive transducer gap of 2.5 µm. Applied pressure deflects the top membrane, producing a corresponding capacitance variation that changes the frequency and phase response of the LC tank circuit, enabling real-time and continuous IOP monitoring over a target detection range of 0–50 mmHg and beyond. Mutual inductive coupling between the sensor and the external readout coil is investigated as a reliable readout mechanism. Full article

In complex marine environments, achieving low-cost, highly reliable, and continuous navigation is crucial for the intelligent and autonomous operation of unmanned surface vehicles (USVs). Currently, the integrated Global Navigation Satellite System and Strapdown Inertial Navigation System (GNSS/SINS) serves as the primary navigation architecture for USVs. While the cost of high-performance GNSS receivers has steadily decreased, high-precision SINS remains prohibitively expensive. Consequently, micro-electromechanical system (MEMS)-based SINS has emerged as a preferred alternative due to its favorable balance of cost, power consumption, and size. However, significant inertial sensor errors make it difficult to maintain high-precision positioning during GNSS outages. To address this limitation, the single-axis rotational inertial navigation system (SRINS) has been introduced. Nevertheless, constrained by the single-axis mechanical structure and complex sea state disturbances, the system still struggles to effectively modulate random errors and azimuth gyroscope drift, rendering it insufficient for highly demanding navigation tasks. To overcome these bottlenecks, this article systematically reviews four core technologies: (1) Comprehensive denoising and temperature drift compensation techniques for MEMS gyroscopes; (2) rapid moving-base initial alignment models under high sea state disturbances; (3) fast online calibration methods for azimuth gyroscope drift; and (4) adaptive and robust GNSS/SINS integration architectures capable of accommodating high-dynamic conditions and non-Gaussian interference. Finally, this article discusses the engineering conflict between deploying high-precision algorithms and the limited onboard computational capacity of USVs. It concludes by highlighting a highly promising navigation paradigm for future research: the integration of factor graph optimization with physics-informed deep learning. Full article

To address limited segment coverage and integration drift in wearable inertial gait analysis, this work proposes a real-time multi-segment gait analysis method using seven MEMS-IMUs deployed on the pelvis and lower limbs. The method employs parameter adaptive nonlinear complementary filtering and foot-based event detection to calculate spatiotemporal parameters and joint angles. Validation against optical motion capture (OMC) showed sagittal joint angle RMSEs below 2.37°, pelvic angle RMSEs below 0.96°, and correlation coefficients above 0.89 during normal walking in healthy adults. Supported by real-time 3D skeletal visualization, the proposed system provides a low-cost and portable solution for quantitative gait assessment under controlled walking conditions, with potential for future rehabilitation monitoring after further clinical validation. Full article

Engineering systems increasingly demand multifunctional and energy-efficient integration within constrained volume and energy budgets. One promising solution is the monolithic integration of components and functions to minimize occupied volume and simplify control interfaces. Paraffin-based phase change material (PCM) actuators provide high mechanical work density and can be coupled with thermoelectric generators (TEGs) for multifunctional operation. However, their dynamic response is typically constrained by the intrinsically low thermal conductivity of PCM materials. This work introduces a quasi-monolithic fabrication method for a fully integrated TEG-PCM system combining standard four-layer printed circuit board (PCB) technology and CNC milling. By constructing the system as a quasi-monolithic block, thermal interface materials are considerably reduced, thereby diminishing parasitic thermal resistance and promoting faster heat transport from the TEG to the PCM cavity. The system is fabricated using CNC milling with high depth resolution enabled by an electrical sensing-via structure. Experimental validation shows a 76% improvement in displacement rate (15.03 µm/s) at half the input power (1 W) compared to a conventional hybrid-assembled TEG-PCM actuator system consisting of a commercial TEG and an aluminum PCM container. The exploitation of the PCM as a thermal flux modulator for energy harvesting has been preliminarily investigated; considering the measured 5 K temperature difference sustained during a simulated short “day–night” cycle, an estimated open-circuit voltage of ∼13.5 mV is expected to be retrieved under load-match conditions. The actuator is compatible with PCB-based power management and thermal routing, enabling scalable incorporation into compact microsystems and multifunctional MEMS devices. Full article

Capacitive micromechanical ultrasonic transducers (CMUTs), as microelectromechanical systems (MEMS) devices, have broad application prospects in ultrasonic imaging and sensing. This study investigates the influence of surface acoustic waves (SAWs) using periodically arranged CMUTs as the fundamental unit cells. We first utilize finite element analysis (FEA) to calculate and analyze the band structure and bandgap characteristics of phononic crystals under infinite periodic conditions. Subsequently, for finite periodic structures in practical applications, acoustic transmission spectra were further simulated using FEA to verify the bandgap characteristics of the structure for SAWs. Accordingly, this paper leverages a deep learning framework based on a multilayer perceptron (MLP) architecture to achieve the inverse design and optimization of CMUT geometric parameters, tailored to specific target bandgap requirements. The results demonstrate that this approach can efficiently and accurately determine the optimal structural configurations, offering a robust and novel technical paradigm for the precise control of SAWs using CMUT-based periodic arrays. Full article

Surface Acoustic Wave (SAW) magnetic sensors are traditionally fabricated on rigid substrates, which severely limits their application on curved or irregular surfaces. To address this critical limitation, this paper presents a novel flexible SAW magnetic sensor based on a grating-arrayed Terfenol-D thin film deposited on a 50 µm thick flexible lithium niobate (LiNbO₃) substrate. Unlike conventional designs using a continuous magnetostrictive layer, the proposed grating-arrayed structure is designed to aid in hysteresis compensation and minimize measurement errors associated with residual magnetization. As demonstrated experimentally, the sensors achieve a high sensitivity of 85.8 kHz/mT for devices with λ-wide gratings and a maximum frequency shift of 377 kHz at 5 mT. A systematic investigation reveals that sensitivity is critically dependent on the grating width and film thickness, with 500 nm thick gratings yielding optimal performance. Crucially, the sensor’s functionality under mechanical deformation is validated, and a differential measurement method is introduced to effectively compensate for stress-induced frequency shifts, ensuring reliable operation in practical, non-ideal conditions. The results confirm the sensor’s robust performance under the tested stress conditions, positioning this flexible SAW magnetic sensor as a promising solution for advanced, conformable sensing applications. Full article

Lead zirconate titanate (PZT) is a widely used material for applications in microsensors, actuators, and transducers. Due to its high piezoelectric coefficient, large dielectric constant, and strong polarization capability near the morphotropic phase boundary (Zr/Ti ≈ 52/48), it is considered one of the most attractive materials for micro-electromechanical systems (MEMS). These advantageous material properties strongly depend on the PZT layer’s microstructure and crystallinity, which are primarily determined by the choice of seed layer, deposition conditions, and the post-deposition annealing treatment that promotes the formation of the PZT’s perovskite phase. In this contribution, sputter-deposited PZT thin films were crystallized by conventional furnace annealing (CFA) to evaluate the effect of heating/cooling rates (1 °C·min⁻¹–7 °C·min⁻¹) within a temperature range of 450 °C to 700 °C on structural, electrical, and ferroelectric properties, with consideration of the seed layer preparation. We characterized the materials’ properties by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and measurements of the ferroelectric hysteresis, capacitance, and leakage current. All samples annealed at temperatures of at least 500 °C fully crystallized into the perovskite phase, independently of the heating/cooling rate. The best ferroelectric performance was achieved at 550 °C with a 1 °C·min⁻¹ heating/cooling rate, yielding a saturation polarization of 82.8 µC·cm⁻² and a remnant polarization of 36.9 µC·cm⁻² under a maximum applied field of 300 kV·cm⁻¹. Full article

Acoustic emission (AE) monitoring in metal additive manufacturing (AM) requires compact sensors capable of high-frequency operation, broad bandwidth, and high sensitivity. However, increasing structural stiffness to achieve high resonance frequencies typically reduces electromechanical sensitivity. This work presents a finite element study of a coupled-resonator capacitive micromachined ultrasonic transducer (CMUT) designed to address this trade-off. The proposed architecture integrates three mechanically coupled silicon membranes with a stepped capacitive cavity that increases capacitance while preserving structural stiffness, enabling enhanced sensitivity without compromising high-frequency operation. COMSOL Multiphysics simulations were used to evaluate modal characteristics and frequency response under DC pre-stressed conditions. Modal coupling produced closely spaced resonances that broadened the effective bandwidth, while the stepped cavity significantly increased voltage output through improved electromechanical coupling. Compared to a single-resonator flat-cavity design, the coupled stepped-cavity configuration demonstrated nearly a threefold enhancement in output voltage while maintaining operation near 100 kHz. Additionally, adjusting the central resonator length enabled controlled frequency tuning for scalable array implementation. These results establish a proof of concept for a high-frequency, high-sensitivity micro-electro-mechanical systems (MEMS) CMUT architecture suitable for distributed AE monitoring in advanced manufacturing environments. Full article

Monitoring dissolved carbon dioxide (CO₂) in aquatic and sediment systems is critical for understanding carbon cycling and climate feedback. This study develops and characterizes a compact, low-cost microbolometer-based attenuated total reflectance (ATR) mid-infrared sensor for direct dissolved CO₂ measurement in liquid and soil-water environments. The system integrates a ZnSe ATR crystal with custom suspended SiN membrane microbolometers and uses evanescent-wave absorption at 4.26 μm with a broadband LED source and computational spectral reconstruction, eliminating the need for an interferometer. Calibration shows excellent linearity (R² ≈ 0.99) over 50–1000 ppm CO₂, with a practical limit of detection (LOD) of ~26–35 ppm at 5–25 °C. UV-induced CO₂ generation from soil-water mixtures was investigated across UV wavelengths, revealing UV-C (254 nm) as optimal, producing net ΔCO₂ ≈ 339 ppm above ambient levels in 30 min. Environmental factors (temperature 5–35 °C, pH 5–11, pressure 1–1.5 ATM, dissolved organic carbon) were systematically evaluated, confirming robust sensor performance (accuracy >90%, correlation r > 0.98 with reference instrument). This sensor represents the first integration of MEMS microbolometer detectors with ATR evanescent-wave spectroscopy for liquid-phase dissolved CO₂, enabling real-time monitoring and rapid sediment organic carbon assessment in a field-deployable platform. Full article

Understanding the rapid non-isothermal crystallization behavior of polymers is crucial for tailoring and optimizing their performance. However, conventional techniques are limited in achieving rapid heating and cooling rates, which hinders in-depth investigation of the crystallization kinetics of fast-crystallizing polymers. In this study, a high-scan-rate MEMS thermopile DSC chip is employed to systematically investigate the non-isothermal crystallization kinetics of polyamide 66 (PA66) under rapid temperature variations. The results show that PA66 forms a lamellar α phase under slow cooling (1 °C/s) and a cauliflower-like γ phase under rapid cooling (300 °C/s), and becomes completely amorphous under ultrafast cooling (quenching). Furthermore, the technique enables quantitative analysis of the cold crystallization kinetics of fully amorphous PA66 during rapid heating. The results indicate that PA66 exhibits a higher apparent activation energy for homogeneous nucleation cold crystallization at low heating rates (≤10 °C/s), reaching 172.3 kJ·mol⁻¹, which is approximately 3.2 times that at high heating rates (≥25 °C/s). The results of this study demonstrate that the developed fast-scanning chip-based DSC provides a powerful tool for analyzing the processing heating and cooling rate conditions of rapidly crystallizing polymers. Full article

Acinetobacter baumannii, a prominent opportunistic pathogen in healthcare settings, causes severe infections and poses significant challenges for clinical treatment. This study investigates the synergistic effects of α-pinene combined with meropenem (MEM) on A. baumannii biofilm formation and lung injury in mice, aiming to develop new strategies to combat persistent infections and antibiotic resistance. α-pinene combined with MEM exhibited strong synergistic antibacterial activity against carbapenem-resistant A. baumannii (CRAB 5E9). The combination significantly inhibited biofilm formation, extracellular polymer production, surface motility, and quorum sensing. The expression of key genes such as ompA, bfmR, bap, csuAB, abaI, and abaR was reduced by up to 61%. In vivo, the treatment alleviated weight loss, decreased the bacterial load in lung tissue, and reduced lung inflammation. Furthermore, it significantly suppressed proteins involved in the inflammatory response and the MAPK pathway, including TLR4, NF-κB, NLRP3, TRAF6, ERK2, p38 MAPK, JNK, and TNF-α. The combination of α-pinene and MEM synergistically inhibits A. baumannii biofilm formation and alleviates the inflammatory response in a mouse model, offering a potential therapeutic approach for combating A. baumannii infections. Full article

Porous thin-film getters are extensively utilized in the field of MEMS vacuum packaging. Nevertheless, their effectiveness is frequently constrained by the comparatively modest effective surface area of conventional planar structures. In this work, a porous Au/Ti thin-film getter based on a three-dimensional black silicon scaffold is developed to enhance the effective surface area and improve gettering performance. The fabrication of black silicon nanostructures is achieved through an SF₆/O₂-based inductively coupled plasma (ICP) etching process, followed by the deposition of Au/Ti bilayer films by DC magnetron sputtering. The morphological evolution of the Ti film on the nanostructured substrate and the activation behavior of the Au/Ti bilayer are systematically investigated using scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The results demonstrate that the shadowing effect during sputtering leads to the formation of a porous film with increased surface roughness and an open structure. XPS analysis demonstrates that there is a significant increase in the oxygen content on the surface at higher activation temperatures. This suggests that effective sorption capability is achieved following activation. In comparison with planar substrates, the three-dimensional black silicon scaffold has been demonstrated to promote the formation of a more open and functional structure. The results obtained from this study indicate that the proposed fabrication strategy offers a feasible and MEMS-compatible approach for the construction of porous thin-film getters, thereby enhancing their effective surface area. Full article