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Journal: Micromachines, 2019
Volume: 10
Number: 323
Article:
An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
Authors:
by
Liang Zhou, Xiaoyang Zhang and Huikai Xie
Link:
https://www.mdpi.com/2072-666X/10/5/323
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