Abstract
The 6-DOF vibration isolation platform (VIP) is used to isolate vibration in the processing and manufacturing of semiconductor chips, especially electric vehicle chips. The 6-DOF VIP has the characteristics of high position accuracy, fast dynamic response, and short motion travel. In this paper, a novel four-quadrant Lorentz force motor (FQLFM) applied on the 6-DOF VIP is proposed. The structure of this LFM has a high force density, low force fluctuation, and low coupling force. First, the basic structure and operating principle of the proposed FQLFM are presented. Secondly, the expressions of the magnetic field and electromagnetic force are obtained based on an equivalent current model and the permanent magnet mirror-image method (PMMIM). Thirdly, the magnetic field and electromagnetic force characteristics of the proposed FQLFM and an LFM with a traditional bilateral structure are analyzed and compared. The relationship between the force and displacement of the FQLFM is investigated. Moreover, the PMMIM is verified by a 3D finite element analysis (FEA). Finally, the experimental platform for a force test is built and the above results are validated by an experiment.