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Sensors 2016, 16(1), 106;

Influences of an Aluminum Covering Layer on the Performance of Cross-Like Hall Devices

School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China
Globalfoundries Singapore, Singapore 738406, Singapore
Nanjing Foreign Language School, Nanjing 210008, China
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 1 December 2015 / Revised: 12 January 2016 / Accepted: 12 January 2016 / Published: 15 January 2016
(This article belongs to the Section Physical Sensors)
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This work studies the effects of an aluminum covering on the performance of cross-like Hall devices. Four different Hall sensor structures of various sizes were designed and fabricated. The sensitivity and offset of the Hall sensors, two key points impacting their performance, were characterized using a self-built measurement system. The work analyzes the influences of the aluminum covering on those two aspects of the performance. The aluminum layer covering mainly leads to an eddy-current effect in an unstable magnetic field and an additional depletion region above the active region. Those two points have influences on the sensitivity and the offset voltage, respectively. The analysis guides the designer whether to choose covering with an aluminum layer the active region of the Hall sensor as a method to reduce the flicker noise and to improve the stability of the Hall sensor. Because Hall devices, as a reference element, always suffer from a large dispersion, improving their stability is a crucial issue. View Full-Text
Keywords: cross-like Hall sensor; sensitivity; offset voltage; aluminum covering cross-like Hall sensor; sensitivity; offset voltage; aluminum covering

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Lyu, F.; Liu, X.; Ding, Y.; Toh, E.-H.; Zhang, Z.; Pan, Y.; Wang, Z.; Li, C.; Li, L.; Sha, J.; Pan, H. Influences of an Aluminum Covering Layer on the Performance of Cross-Like Hall Devices. Sensors 2016, 16, 106.

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