Next Article in Journal
A Fluorescent One-Dimensional Photonic Crystal for Label-Free Biosensing Based on Bloch Surface Waves
Previous Article in Journal
A Selective Iodide Ion Sensor Electrode Based on Functionalized ZnO Nanotubes
Article Menu

Export Article

Open AccessArticle
Sensors 2013, 13(2), 1998-2010; https://doi.org/10.3390/s130201998

A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes

School of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116023, China
*
Author to whom correspondence should be addressed.
Received: 9 December 2012 / Revised: 14 January 2013 / Accepted: 15 January 2013 / Published: 4 February 2013
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [5616 KB, uploaded 21 June 2014]

Abstract

For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors’ thermal performance should be considered during sensor design. The radiative heat flux is transferred from a membrane to a plane or from a membrane to a membrane. In the current study of the near-field thermal radiation, the scanning probe technology has difficulty in making a membrane separated at micron scale parallel to a plane or another membrane. A novel MEMS (micro electromechanical system) device was developed by sacrificial layer technique in this work to realize a double parallel freestanding membrane structure. Each freestanding membrane has a platinum thin-film resistor and the distance between the two membranes is 1 m. After evaluating the electrical and thermal characteristics of the lower freestanding membrane, experimental measurements of near-field radiative heat transfer between the lower membrane and the upper membrane were carried out by setting the lower membrane as a heat emitter and the upper membrane as a heat receiver. The near-field radiative heat transfer between the two membranes was validated by finding a larger-than-blackbody radiative heat transfer based on the experimental data. View Full-Text
Keywords: MEMS; freestanding membrane; near-field; thermal radiation MEMS; freestanding membrane; near-field; thermal radiation
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Feng, C.; Tang, Z.; Yu, J.; Sun, C. A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes. Sensors 2013, 13, 1998-2010.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top