- Article
Spatially Multiplexed Micro-Spectrophotometry in Bright Field Mode for Thin Film Characterization
- Valerio Pini,
- Priscila M. Kosaka,
- Jose J. Ruz,
- Oscar Malvar,
- Mario Encinar,
- Javier Tamayo and
- Montserrat Calleja
Thickness characterization of thin films is of primary importance in a variety of nanotechnology applications, either in the semiconductor industry, quality control in nanofabrication processes or engineering of nanoelectromechanical systems (NEMS) b...