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Keywords = gate-to-drain capacitance

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24 pages, 6128 KB  
Article
DC/AC/RF Characteristic Fluctuation of N-Type Bulk FinFETs Induced by Random Interface Traps
by Sekhar Reddy Kola and Yiming Li
Processes 2025, 13(10), 3103; https://doi.org/10.3390/pr13103103 - 28 Sep 2025
Abstract
Three-dimensional bulk fin-type field-effect transistors (FinFETs) have been the dominant devices since the sub-22 nm technology node. Electrical characteristics of scaled devices suffer from different process variation effects. Owing to the trapping and de-trapping of charge carriers, random interface traps (RITs) degrade device [...] Read more.
Three-dimensional bulk fin-type field-effect transistors (FinFETs) have been the dominant devices since the sub-22 nm technology node. Electrical characteristics of scaled devices suffer from different process variation effects. Owing to the trapping and de-trapping of charge carriers, random interface traps (RITs) degrade device characteristics, and, to study this effect, this work investigates the impact of RITs on the DC/AC/RF characteristic fluctuations of FinFETs. Under high gate bias, the device screening effect suppresses large fluctuations induced by RITs. In relation to different densities of interface traps (Dit), fluctuations of short-channel effects, including potential barriers and current densities, are analyzed. Bulk FinFETs exhibit entirely different variability, despite having the same number of RITs. Potential barriers are significantly altered when devices with RITs are located near the source end. An analysis and a discussion of RIT-fluctuated gate capacitances, transconductances, cut-off, and 3-dB frequencies are provided. Under high Dit conditions, we observe ~146% variation in off-state current, ~26% in threshold voltage, and large fluctuations of ~107% and ~131% in gain and cut-off frequency, respectively. The effects of the random position of RITs on both AC and RF characteristic fluctuations are also discussed and designed in three different scenarios. Across all densities of interface traps, the device with RITs near the drain end exhibits relatively minimal fluctuations in gate capacitance, voltage gain, cut-off, and 3-dB frequencies. Full article
(This article belongs to the Special Issue New Trends in the Modeling and Design of Micro/Nano-Devices)
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12 pages, 1760 KB  
Article
Effect of AlN Cap Layer on Polarization Coulomb Field Scattering in AlGaN/GaN Heterostructure Field Effect Transistor
by Qianding Cheng, Ming Yang, Zhiliang Gao, Ruojue Wang, Jihao He, Feng Yan, Xu Tang, Weihong Zhang, Zijun Hu and Jingguo Mu
Micromachines 2025, 16(10), 1093; https://doi.org/10.3390/mi16101093 - 26 Sep 2025
Abstract
In this study, AlGaN/GaN heterostructure field-effect transistors (HFETs) with an AlN cap layer and a GaN cap layer were fabricated. The devices were of different sizes. Capacitance–voltage (C-V) and current–voltage (I-V) curves were measured. Based on two-dimensional (2D) scattering [...] Read more.
In this study, AlGaN/GaN heterostructure field-effect transistors (HFETs) with an AlN cap layer and a GaN cap layer were fabricated. The devices were of different sizes. Capacitance–voltage (C-V) and current–voltage (I-V) curves were measured. Based on two-dimensional (2D) scattering theory, electron mobility corresponding to polarization Coulomb field (PCF) scattering and other primary scattering mechanisms was quantitatively determined. The influence of the AlN cap layer on PCF scattering in AlGaN/GaN HFETs was studied. It was found that the AlN cap layer suppresses the inverse piezoelectric effect (IPE) in the AlGaN barrier layer because of its greater polarization and larger Young’s modulus, thereby reducing the generation of additional polarization charge (APC) under the gate. In addition, the 2D electron gas (2DEG) density (n2DEG) under the gate of the samples with an AlN cap layer is higher. Both factors help reduce PCF scattering intensity. Moreover, mobility analysis of samples with different gate–drain spacings (LGD) showed that PCF scattering is less affected by LGD variations in devices with AlN cap layers. This study offers new insights into the structural optimization of AlGaN/GaN HFETs. Full article
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17 pages, 2806 KB  
Article
Impact of Multi-Bias on the Performance of 150 nm GaN HEMT for High-Frequency Applications
by Mohammad Abdul Alim and Christophe Gaquiere
Micromachines 2025, 16(8), 932; https://doi.org/10.3390/mi16080932 - 13 Aug 2025
Viewed by 638
Abstract
This study examines the performance of a GaN HEMT with a 150 nm gate length, fabricated on silicon carbide, across various operational modes, including direct current (DC), radio frequency (RF), and small-signal parameters. The evaluation of DC, RF, and small-signal performance under diverse [...] Read more.
This study examines the performance of a GaN HEMT with a 150 nm gate length, fabricated on silicon carbide, across various operational modes, including direct current (DC), radio frequency (RF), and small-signal parameters. The evaluation of DC, RF, and small-signal performance under diverse bias conditions remains a relatively unexplored area of study for this specific technology. The DC characteristics revealed relatively little Ids at zero gate and drain voltages, and the current grew as Vgs increased. Essential measurements include Idss at 109 mA and Idssm at 26 mA, while the peak gm was 62 mS. Because transconductance is sensitive to variations in Vgs and Vds, it shows “Vth roll-off,” where Vth decreases as Vds increases. The transfer characteristics corroborated this trend, illustrating the impact of drain-induced barrier lowering (DIBL) on threshold voltage (Vth) values, which spanned from −5.06 V to −5.71 V across varying drain-source voltages (Vds). The equivalent-circuit technique revealed substantial non-linear behaviors in capacitances such as Cgs and Cgd concerning Vgs and Vds, while also identifying extrinsic factors including parasitic capacitances and resistances. Series resistances (Rgs and Rgd) decreased as Vgs increased, thereby enhancing device conductivity. As Vgs approached neutrality, particularly at elevated Vds levels, the intrinsic transconductance (gmo) and time constants (τgm, τgs, and τgd) exhibited enhanced performance. ft and fmax, which are essential for high-frequency applications, rose with decreasing Vgs and increasing Vds. When Vgs approached −3 V, the S21 and Y21 readings demonstrated improved signal transmission, with peak S21 values of approximately 11.2 dB. The stability factor (K), which increased with Vds, highlighted the device’s operational limits. The robust correlation between simulation and experimental data validated the equivalent-circuit model, which is essential for enhancing design and creating RF circuits. Further examination of bias conditions would enhance understanding of the device’s performance. Full article
(This article belongs to the Topic Wide Bandgap Semiconductor Electronics and Devices)
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15 pages, 3579 KB  
Article
Dual-Control-Gate Reconfigurable Ion-Sensitive Field-Effect Transistor with Nickel-Silicide Contacts for Adaptive and High-Sensitivity Chemical Sensing Beyond the Nernst Limit
by Seung-Jin Lee, Seung-Hyun Lee, Seung-Hwa Choi and Won-Ju Cho
Chemosensors 2025, 13(8), 281; https://doi.org/10.3390/chemosensors13080281 - 2 Aug 2025
Viewed by 609
Abstract
In this study, we propose a bidirectional chemical sensor platform based on a reconfigurable ion-sensitive field-effect transistor (R-ISFET) architecture. The device incorporates Ni-silicide Schottky barrier source/drain (S/D) contacts, enabling ambipolar conduction and bidirectional turn-on behavior for both p-type and n-type configurations. Channel polarity [...] Read more.
In this study, we propose a bidirectional chemical sensor platform based on a reconfigurable ion-sensitive field-effect transistor (R-ISFET) architecture. The device incorporates Ni-silicide Schottky barrier source/drain (S/D) contacts, enabling ambipolar conduction and bidirectional turn-on behavior for both p-type and n-type configurations. Channel polarity is dynamically controlled via the program gate (PG), while the control gate (CG) suppresses leakage current, enhancing operational stability and energy efficiency. A dual-control-gate (DCG) structure enhances capacitive coupling, enabling sensitivity beyond the Nernst limit without external amplification. The extended-gate (EG) architecture physically separates the transistor and sensing regions, improving durability and long-term reliability. Electrical characteristics were evaluated through transfer and output curves, and carrier transport mechanisms were analyzed using band diagrams. Sensor performance—including sensitivity, hysteresis, and drift—was assessed under various pH conditions and external noise up to 5 Vpp (i.e., peak-to-peak voltage). The n-type configuration exhibited high mobility and fast response, while the p-type configuration demonstrated excellent noise immunity and low drift. Both modes showed consistent sensitivity trends, confirming the feasibility of complementary sensing. These results indicate that the proposed R-ISFET sensor enables selective mode switching for high sensitivity and robust operation, offering strong potential for next-generation biosensing and chemical detection. Full article
(This article belongs to the Section Electrochemical Devices and Sensors)
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13 pages, 2423 KB  
Article
A Stepped-Spacer FinFET Design for Enhanced Device Performance in FPGA Applications
by Meysam Zareiee, Mahsa Mehrad and Abdulkarim Tawfik
Micromachines 2025, 16(8), 867; https://doi.org/10.3390/mi16080867 - 27 Jul 2025
Viewed by 485
Abstract
As transistor dimensions continue to scale below 10 nm, traditional MOSFET architectures face increasing limitations from short-channel effects, gate leakage, and variability. FinFETs, especially junctionless FinFETs on silicon-on-insulator (SOI) substrates, offer improved electrostatic control and simplified fabrication, making them attractive for deeply scaled [...] Read more.
As transistor dimensions continue to scale below 10 nm, traditional MOSFET architectures face increasing limitations from short-channel effects, gate leakage, and variability. FinFETs, especially junctionless FinFETs on silicon-on-insulator (SOI) substrates, offer improved electrostatic control and simplified fabrication, making them attractive for deeply scaled nodes. In this work, we propose a novel Stepped-Spacer Structured FinFET (S3-FinFET) that incorporates a three-layer HfO2/Si3N4/HfO2 spacer configuration designed to enhance electrostatics and suppress parasitic effects. Using 2D TCAD simulations, the S3-FinFET is evaluated in terms of key performance metrics, including transfer/output characteristics, ON/OFF current ratio, subthreshold swing (SS), drain-induced barrier lowering (DIBL), gate capacitance, and cut-off frequency. The results show significant improvements in leakage control and high-frequency behavior. These enhancements make the S3-FinFET particularly well-suited for Field-Programmable Gate Arrays (FPGAs), where power efficiency, speed, and signal integrity are critical to performance in reconfigurable logic environments. Full article
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10 pages, 4005 KB  
Article
Novel 4H-SiC Double-Trench MOSFETs with Integrated Schottky Barrier and MOS-Channel Diodes for Enhanced Breakdown Voltage and Switching Characteristics
by Peiran Wang, Chenglong Li, Chenkai Deng, Qinhan Yang, Shoucheng Xu, Xinyi Tang, Ziyang Wang, Wenchuan Tao, Nick Tao, Qing Wang and Hongyu Yu
Nanomaterials 2025, 15(12), 946; https://doi.org/10.3390/nano15120946 - 18 Jun 2025
Viewed by 687
Abstract
In this study, a novel silicon carbide (SiC) double-trench MOSFET (DT-MOS) combined Schottky barrier diode (SBD) and MOS-channel diode (MCD) is proposed and investigated using TCAD simulations. The integrated MCD helps inactivate the parasitic body diode when the device is utilized as a [...] Read more.
In this study, a novel silicon carbide (SiC) double-trench MOSFET (DT-MOS) combined Schottky barrier diode (SBD) and MOS-channel diode (MCD) is proposed and investigated using TCAD simulations. The integrated MCD helps inactivate the parasitic body diode when the device is utilized as a freewheeling diode, eliminating bipolar degradation. The adjustment of SBD position provides an alternative path for reverse conduction and mitigates the electric field distribution near the bottom source trench region. As a result of the Schottky contact adjustment, the reverse conduction characteristics are less influenced by the source oxide thickness, and the breakdown voltage (BV) is largely improved from 800 V to 1069 V. The gate-to-drain capacitance is much lower due to the removal of the bottom oxide, bringing an improvement to the turn-on switching rise time from 2.58 ns to 0.68 ns. These optimized performances indicate the proposed structure with both SBD and MCD has advantages in switching and breakdown characteristics. Full article
(This article belongs to the Section Nanoelectronics, Nanosensors and Devices)
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14 pages, 4015 KB  
Article
Effect of Dual Al2O3 MIS Gate Structure on DC and RF Characteristics of Enhancement-Mode GaN HEMT
by Yuan Li, Yong Huang, Jing Li, Huiqing Sun and Zhiyou Guo
Micromachines 2025, 16(6), 687; https://doi.org/10.3390/mi16060687 - 7 Jun 2025
Viewed by 1074
Abstract
A dual Al2O3 MIS gate structure is proposed to enhance the DC and RF performance of enhancement-mode GaN high-electron mobility transistors (HEMTs). As a result, the proposed MOS-HEMT with a dual recessed MIS gate structure offers 84% improvements in cutoff [...] Read more.
A dual Al2O3 MIS gate structure is proposed to enhance the DC and RF performance of enhancement-mode GaN high-electron mobility transistors (HEMTs). As a result, the proposed MOS-HEMT with a dual recessed MIS gate structure offers 84% improvements in cutoff frequency (fT) and 92% improvements in maximum oscillation frequency (fmax) compared to conventional HEMTs (from 7.1 GHz to 13.1 GHz and 17.5 GHz to 33.6 GHz, respectively). As for direct-current characteristics, a remarkable reduction in off-state gate leakage current and a 26% enhancement in the maximum saturation drain current (from 519 mA·mm−1 to 658 A·mm−1) are manifested in HEMTs with new structures. The maximum transconductance (gm) is also raised from 209 mS·mm−1 to 246 mS·mm−1. Correspondingly, almost unchanged gate–source capacitance curves and gate–drain capacitance curves are also discussed to explain the electrical characteristic mechanism. These results indicate the superiority of using a dual Al2O3 MIS gate structure in GaN-based HEMTs to promote the RF and DC performance, providing a reference for further development in a miniwatt antenna amplifier and sub-6G frequencies of operation. Full article
(This article belongs to the Topic Wide Bandgap Semiconductor Electronics and Devices)
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9 pages, 6367 KB  
Article
1200V 4H-SiC MOSFET with a High-K Source Gate for Improving Third-Quadrant and High Frequency Figure of Merit Performance
by Mingyue Li, Zhaofeng Qiu, Tianci Li, Yi Kang, Shan Lu and Xiarong Hu
Micromachines 2025, 16(5), 508; https://doi.org/10.3390/mi16050508 - 27 Apr 2025
Viewed by 791
Abstract
This paper proposes a 1200V 4H-SiC MOSFET incorporating a High-K dielectric-integrated fused source-gate (HKSG) structure, engineered to concurrently enhance the third-quadrant operation and high-frequency figure of merit (HF-FOM). The High-K dielectric enhances the electric field effect, reducing the threshold voltage of the source-gate. [...] Read more.
This paper proposes a 1200V 4H-SiC MOSFET incorporating a High-K dielectric-integrated fused source-gate (HKSG) structure, engineered to concurrently enhance the third-quadrant operation and high-frequency figure of merit (HF-FOM). The High-K dielectric enhances the electric field effect, reducing the threshold voltage of the source-gate. As a result, the reverse conduction voltage drops from 2.79 V (body diode) to 1.53 V, and the bipolar degradation is eliminated. Moreover, by incorporating a shielding area within the merged source-gate architecture, the gate-to-drain capacitance Cgd of the HKSG-MOS is reduced. The simulation results show that the HF-FOM Cgd × Ron,sp and Qgd × Ron,sp of the HKSG-MOS are decreased by 48.1% and 58.9%, respectively, compared with that of conventional SiC MOSFET. The improved performances make the proposed SiC MOSFEET have great potential in high-frequency power applications. Full article
(This article belongs to the Section D1: Semiconductor Devices)
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13 pages, 10954 KB  
Article
A Stepped Gate Oxide Structure for Suppressing Gate-Induced Drain Leakage in Fully Depleted Germanium-on-Insulator Multi-Subchannel Tunneling Field-Effect Transistors
by Rui Chen, Liming Wang, Ruizhe Han, Keqin Liao, Xinlong Shi, Peijian Zhang and Huiyong Hu
Micromachines 2025, 16(4), 375; https://doi.org/10.3390/mi16040375 - 26 Mar 2025
Cited by 1 | Viewed by 656
Abstract
To address the severe gate-induced drain leakage (GIDL) issue in fully depleted germanium-on-insulator (FD-GeOI) multi-subchannel tunneling field-effect transistors (MS TFETs), this paper proposes a stepped gate oxide (SGO) structure. In the off-state, the SGO structure effectively suppresses GIDL by reducing the electric field [...] Read more.
To address the severe gate-induced drain leakage (GIDL) issue in fully depleted germanium-on-insulator (FD-GeOI) multi-subchannel tunneling field-effect transistors (MS TFETs), this paper proposes a stepped gate oxide (SGO) structure. In the off-state, the SGO structure effectively suppresses GIDL by reducing the electric field intensity at the channel/drain interface while simultaneously decreasing gate capacitance to reduce static power consumption. Based on an accurate device model, a systematic investigation was conducted into the effects of varying the thickness and length of the SGO structure on TFET performance, enabling the optimization of the SGO design. The simulation results demonstrate that, compared to normal MS TFETs, the SGO MS TFET reduces the off-state GIDL current (Ioff) from 4.6×107 A to 2.6×1011 A, achieving a maximum improvement of 4.22 orders of magnitude in the on-state-to-off-state current ratio (Ion/Ioff) and a 28% reduction in subthreshold swing (SS). Furthermore, compared to lightly doped drain (LDD) MS TFETs, the SGO MS TFET achieves a 32% reduction in total gate capacitance and a 23% enhancement in carrier mobility at the channel/drain interface. This study demonstrates that SGO provides an effective solution for GIDL suppression. Full article
(This article belongs to the Section D1: Semiconductor Devices)
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12 pages, 5422 KB  
Article
Revealing the Impact of Gel Electrolytes on the Performance of Organic Electrochemical Transistors
by Mancheng Li, Xiaoci Liang, Chuan Liu and Songjia Han
Gels 2025, 11(3), 202; https://doi.org/10.3390/gels11030202 - 14 Mar 2025
Cited by 1 | Viewed by 1524
Abstract
Gel electrolyte-gated organic electrochemical transistors (OECTs) are promising bioelectronic devices known for their high transconductance, low operating voltage, and integration with biological systems. Despite extensive research on the performance of OECTs, a precise model defining the dependence of OECT performance on gel electrolytes [...] Read more.
Gel electrolyte-gated organic electrochemical transistors (OECTs) are promising bioelectronic devices known for their high transconductance, low operating voltage, and integration with biological systems. Despite extensive research on the performance of OECTs, a precise model defining the dependence of OECT performance on gel electrolytes is still lacking. In this work, we refine the device model to comprehensively account for the electrical double layer (EDL)’s capacitance of the gel electrolyte. Both experimental data and theoretical calculations indicate that the maximum transconductance of the OECT is contingent upon ion concentration, drain voltage, and scan rate, highlighting a strong correlation between the transconductance and the hydrogel electrolyte. Overall, this model serves as a theoretical tool for improving the performance of OECTs, enabling the further development of bioelectronic devices. Full article
(This article belongs to the Special Issue Research on the Applications of Conductive Hydrogels)
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26 pages, 8203 KB  
Article
Transistor Frequency-Response Analysis: Recursive Shunt-Circuit Transformations
by Pratyush Manocha and Gabriel A. Rincón-Mora
Electronics 2025, 14(2), 296; https://doi.org/10.3390/electronics14020296 - 13 Jan 2025
Viewed by 1362
Abstract
Frequency-response analysis is critical in circuit design. Frequency response encodes crucial information, like gain, accuracy, bandwidth, response time, phase shift, stability, and more. Unfortunately, existing methods are either algebraic and obscure or approximations with inaccuracies. So applying them to more complex circuits is [...] Read more.
Frequency-response analysis is critical in circuit design. Frequency response encodes crucial information, like gain, accuracy, bandwidth, response time, phase shift, stability, and more. Unfortunately, existing methods are either algebraic and obscure or approximations with inaccuracies. So applying them to more complex circuits is often arduous or unreliable. This paper proposes recursive shunt-circuit transformations: a simple, rigorous, and insightful analytical method for conceptualizing and designing electronic circuits. The method asserts that (a) each equivalent capacitance shunts away its parallel resistance past its RC frequency. This (b) decreases the gain (induces a pole) and (c) changes the circuit. (d) The next dominant capacitance shunts its parallel resistance past the next pole and so on until all remaining capacitances shunt their parallel resistances past the poles they establish. The method also asserts that (e) bypass capacitances increase gain (induce zeros) and (f) cross-amp capacitances couple stages and poles. By applying this method and concepts, designers can (i) simplify an arbitrarily complex circuit into simpler coupled/decoupled stages and (ii) determine and manage poles and zeros with insight. This method was applied to design and analyze single- and multi- stage amplifier circuits and results were benchmarked against traditional methods and NGSPICE simulations, demonstrating its accuracy and broad applicability. Full article
(This article belongs to the Special Issue Analog Circuits and Analog Computing)
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14 pages, 2036 KB  
Article
New Label-Free DNA Nanosensor Based on Top-Gated Metal–Ferroelectric–Metal Graphene Nanoribbon on Insulator Field-Effect Transistor: A Quantum Simulation Study
by Khalil Tamersit, Abdellah Kouzou, José Rodriguez and Mohamed Abdelrahem
Nanomaterials 2024, 14(24), 2038; https://doi.org/10.3390/nano14242038 - 19 Dec 2024
Cited by 1 | Viewed by 1163
Abstract
In this paper, a new label-free DNA nanosensor based on a top-gated (TG) metal–ferroelectric–metal (MFM) graphene nanoribbon field-effect transistor (TG-MFM GNRFET) is proposed through a simulation approach. The DNA sensing principle is founded on the dielectric modulation concept. The computational method employed to [...] Read more.
In this paper, a new label-free DNA nanosensor based on a top-gated (TG) metal–ferroelectric–metal (MFM) graphene nanoribbon field-effect transistor (TG-MFM GNRFET) is proposed through a simulation approach. The DNA sensing principle is founded on the dielectric modulation concept. The computational method employed to evaluate the proposed nanobiosensor relies on the coupled solutions of a rigorous quantum simulation with the Landau–Khalatnikov equation, considering ballistic transport conditions. The investigation analyzes the effects of DNA molecules on nanodevice behavior, encompassing potential distribution, ferroelectric-induced gate voltage amplification, transfer characteristics, subthreshold swing, and current ratio. It has been observed that the feature of ferroelectric-induced gate voltage amplification using the integrated MFM structure can significantly enhance the biosensor’s sensitivity to DNA molecules, whether in terms of threshold voltage shift or drain current variation. Additionally, we propose the current ratio as a sensing metric due to its ability to consider all DNA-induced modulations of electrical parameters, specifically the increase in on-state current and the decrease in off-state current and subthreshold swing. The obtained results indicate that the proposed negative-capacitance GNRFET-based DNA nanosensor could be considered an intriguing option for advanced point-of-care testing. Full article
(This article belongs to the Section Synthesis, Interfaces and Nanostructures)
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12 pages, 11779 KB  
Communication
Normally-Off Trench-Gated AlGaN/GaN Current Aperture Vertical Electron Transistor with Double Superjunction
by Jong-Uk Kim, Do-Yeon Park, Byeong-Jun Park and Sung-Ho Hahm
Technologies 2024, 12(12), 262; https://doi.org/10.3390/technologies12120262 - 16 Dec 2024
Viewed by 2372
Abstract
This study proposes an AlGaN/GaN current aperture vertical electron transistor (CAVET) featuring a double superjunction (SJ) to enhance breakdown voltage (BV) and investigates its electrical characteristics via technology computer-aided design (TCAD) Silvaco Atlas simulation. An additional p-pillar was formed beneath the gate [...] Read more.
This study proposes an AlGaN/GaN current aperture vertical electron transistor (CAVET) featuring a double superjunction (SJ) to enhance breakdown voltage (BV) and investigates its electrical characteristics via technology computer-aided design (TCAD) Silvaco Atlas simulation. An additional p-pillar was formed beneath the gate current blocking layer to create a lateral depletion region that provided a high off-state breakdown voltage. To address the tradeoff between the drain current and off-state breakdown voltage, the key design parameters were carefully optimized. The proposed device exhibited a higher off-state breakdown voltage (2933 V) than the device with a single SJ (2786 V), although the specific on-resistance of the proposed method (1.29 mΩ·cm−2) was slightly higher than that of the single SJ device (1.17 mΩ·cm−2). In addition, the reverse transfer capacitance was improved by 15.6% in the proposed device. Full article
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13 pages, 5511 KB  
Article
A Novel 4H-SiC SGT MOSFET with Improved P+ Shielding Region and Integrated Schottky Barrier Diode
by Xiaobo Cao, Jing Liu, Yingnan An, Xing Ren and Zhonggang Yin
Micromachines 2024, 15(7), 933; https://doi.org/10.3390/mi15070933 - 22 Jul 2024
Cited by 1 | Viewed by 1907
Abstract
A silicon carbide (SiC) SGT MOSFET featuring a “一”-shaped P+ shielding region (PSR), named SPDT-MOS, is proposed in this article. The improved PSR is introduced as a replacement for the source trench to enhance the forward performance of the device. Its improvement consists [...] Read more.
A silicon carbide (SiC) SGT MOSFET featuring a “一”-shaped P+ shielding region (PSR), named SPDT-MOS, is proposed in this article. The improved PSR is introduced as a replacement for the source trench to enhance the forward performance of the device. Its improvement consists of two parts. One is to optimize the electric field distribution of the device, and the other is to expand the current conduction path. Based on the improved PSR and grounded split gate (SG), the device remarkably improves the conduction characteristics, gate oxide reliability, and frequency response. Moreover, the integrated sidewall Schottky barrier diode (SBD) prevents the inherent body diode from being activated and improves the reverse recovery characteristics. As a result, the gate-drain capacitance, gate charge, and reverse recovery charge (Qrr) of the SPDT-MOS are 81.2%, 41.2%, and 90.71% lower than those of the DTMOS, respectively. Compared to the double shielding (DS-MOS), the SPDT-MOS exhibits a 20% reduction in on-resistance and an 8.1% increase in breakdown voltage. Full article
(This article belongs to the Special Issue Power Semiconductor Devices and Applications, 2nd Edition)
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9 pages, 3014 KB  
Article
Effects of a Spike-Annealed HfO2 Gate Dielectric Layer on the On-Resistance and Interface Quality of AlGaN/GaN High-Electron-Mobility Transistors
by Gyuhyung Lee, Jeongyong Yang, Min Jae Yeom, Sisung Yoon and Geonwook Yoo
Electronics 2024, 13(14), 2783; https://doi.org/10.3390/electronics13142783 - 15 Jul 2024
Cited by 1 | Viewed by 2864
Abstract
Various high-k dielectrics have been proposed for AlGaN/GaN MOSHEMTs for gate leakage and drain-current collapse suppression. Hafnium oxide (HfO2) is particularly interesting because of its large bandgap, high dielectric constant, and ferroelectricity under specific phase and doping conditions. However, defects and [...] Read more.
Various high-k dielectrics have been proposed for AlGaN/GaN MOSHEMTs for gate leakage and drain-current collapse suppression. Hafnium oxide (HfO2) is particularly interesting because of its large bandgap, high dielectric constant, and ferroelectricity under specific phase and doping conditions. However, defects and surface scattering caused by HfO2 dissimilarity and degraded HfO2/GaN interface quality still leave the challenge of reducing the SS and Ron. In this study, we investigated the effects of the first spike-annealed HfO2 (6 nm) layer, compared with the conventional ALD-HfO2 (6 nm) layer in the HfO2 bilayer gate dielectric structure on AlGaN/GaN HEMTs. Both devices exhibit negligible hysteresis and near-ideal (~60 mV/dec) subthreshold slopes of more than three orders of magnitude. The device with the first annealed HfO2 layer exhibited a reduced Ron with notably less gate bias dependency and enhanced output current. On the other hand, the capacitance–voltage and conductance methods revealed that the border and interface trap densities of the device were inferior to those of the conventional HfO2 layer. The trade-off between enhanced electrical performance and oxide traps is discussed based on these results. Full article
(This article belongs to the Special Issue Challenges, Innovation and Future Perspectives of GaN Technology)
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