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Feature Paper
Article

1,209 Views

12 Pages

Development and Experimental Validation of a Filament-Assisted Chemical Vapor Deposition (FACVD) Reactor Using a Plastic Chamber

Him Chan Kang,
Jeong Heon Lee and
Jae B. Kwak

Coatings2025, 15(10), 1213;https://doi.org/10.3390/coatings15101213

15 October 2025

This study explored the feasibility of using a plastic vacuum chamber for the Filament-Assisted Chemical Vapor Deposition (FACVD) of polymer thin films. Traditional chemical vapor deposition (CVD) methods often require high vacuum and elevated temper...

(This article belongs to the Special Issue Recent Progress in Thin Films and Surfaces: Deposition, Characterization and Various Applications)

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Feature Paper
Article

7 Citations

5,236 Views

10 Pages

Combined HF+MW CVD Approach for the Growth of Polycrystalline Diamond Films with Reduced Bow

Vadim Sedov,
Alexey Popovich,
Stepan Linnik,
Artem Martyanov and ,
Junjun Wei,
Sergei Zenkin,
Evgeny Zavedeev,
Sergey Savin,
Alexander Gaydaychuk and
Vitaly Konov
+ 7 authors+ 2 authors

Coatings2023, 13(2), 380;https://doi.org/10.3390/coatings13020380

7 February 2023

A combination of two methods of chemical vapor deposition (CVD) of diamond films, microwave plasma–assisted (MW CVD) and hot filament (HF CVD), was used for the growth of 100 µm-thick polycrystalline diamond (PCD) layers on Si substrates....

(This article belongs to the Special Issue 2D Materials-Based Thin Films and Coatings)

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Article

4 Citations

3,491 Views

14 Pages

The Growth Mechanism of Boron-Doped Diamond in Relation to the Carbon-to-Hydrogen Ratio Using the Hot-Filament Chemical Vapor Deposition Method

Taekyeong Lee,
Miyoung You,
Seohan Kim and
Pungkeun Song

Micromachines2025, 16(7), 742;https://doi.org/10.3390/mi16070742

25 June 2025

This study synthesized boron-doped diamond (BDD) thin films using hot-filament chemical vapor deposition at different carbon-to-hydrogen (C/H) ratios in the range of 0.3–0.9%. The C/H ratio influence, a key parameter controlling the balance bet...

(This article belongs to the Collection Women in Micromachines)

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