This paper reports development of a novel, flexible hydrogel based capacitive pressure sensor. It features a simple design of hydrogel thin film sandwiched between two gold electrodes. The sensor shows linear increase in output with increase in press...
In this study, a subminiature implantable capacitive pressure sensor is proposed for biomedical applications. The proposed pressure sensor comprises an array of elastic silicon nitride (SiN) diaphragms formed by the application of a polysilicon (p-Si...
Flexible capacitive pressure sensors have been widely developed to be used in electronic skin, human movement, real-time health monitoring, and human–machine interactions. This paper introduces a Flexible Capacitive Pressure Sensor Array (FCPSA...
MEMS capacitive pressure sensors have proven to be more reliable in terms of temperature drift and long-term stability when compared to MEMS piezoresistive pressure sensors. In this study, a MEMS capacitive pressure sensor using micromachined technol...
Soft electronic technology has broad application prospects in biomedical and wearable devices, among others, due to its flexibility, lightweight nature, and biocompatibility. Although various materials and structures have been proposed for pressure s...
Flexible capacitive pressure sensors with a simple structure and low power consumption are attracting attention, owing to their wide range of applications in wearable electronic devices. However, it is difficult to manufacture pressure sensors with h...
Porous polymer dielectric materials have been developed to increase the sensitivity of capacitive pressure sensors, so that they might expand capacitive sensor use, and promote the realization of the advantages of this class of sensor in further fiel...
Wearable sensor devices have found a great deal of application in medicine on account of their small size and high sensitivity, and flexible elastomer materials are essential for their practical use. In this study we undertake CAD-assisted design of...
A circular non-touch mode capacitive pressure sensor can operate in both transverse and normal uniform loading modes, but the elastic behavior of its movable electrode plate is different under the two different loading modes, making its input–o...
Flexible pressure sensors have attracted tremendous attention from researchers for their widely applications in tactile artificial intelligence, electric skin, disease diagnosis, and healthcare monitoring. Obtaining flexible pressure sensors with hig...
In order to operate a gait rehabilitation device, it is necessary to accurately classify the states appearing in activities of daily living (ADLs). In the case of force sensing resistors (FSRs), which are often used as pressure sensors in gait analys...
Center of pressure refers to the centroid of the ground reaction force vector detected underneath the walking foot, which is a summary measure representing body segment movements during human locomotion. In this study, we developed a cost-effective,...
Flexible pressure sensors have attracted a considerable amount of attention in various fields including robotics and healthcare applications, among others. However, it remains significantly challenging to design and fabricate a flexible capacitive pr...
In the era of intelligent sensing, there is a huge demand for flexible pressure sensors. High sensitivity is the primary requirement for flexible pressure sensors, whereas pressure response range and resolution, which are also key parameters of senso...
Capacitive pressure sensors based on porous structures have been widely researched and applied to a variety of practical applications. To date, it remains a big challenge to develop a capacitive pressure sensor with a high sensitivity and good linear...
Embedding functional sensor layers directly into mechanical systems in heavy-duty surroundings facilitate the real-time monitoring of the system’s state. This work presents a fully-spray coated pressure sensor that is suitable for applications...
This study is devoted to the design of an elastic polymer thin film-based capacitive wind-pressure sensor to meet the anticipated use for real-time monitoring of structural wind pressure in civil engineering. This sensor is composed of four basic uni...
This study presents a comprehensive investigation into the design and optimization of capacitive pressure sensors (CPSs) for their integration into capacitive touch buttons in electronic applications. Using the Finite Element Method (FEM), various ge...
The development of capacitive pressure sensors with low cost, high sensitivity and facile fabrication techniques is desirable for flexible electronics and wearable devices. In this project, a highly sensitive and flexible capacitive pressure sensor w...
Many studies have been conducted to develop electronic skin (e-skin) and flexible wearable textiles which transform into actual “skin”, using different approaches. Moreover, many reports have investigated self-healing materials, multifunc...
Flexible pressure sensors usually exhibit high sensitivity, excellent resolution, and can be mass-produced. Herein, a high-resolution, capacitive, paper-based, 3D-printed pressure sensor with a simple, low-cost preparation method is proposed. The sen...
Flexible capacitive pressure sensors (CPSs) have been widely studied and applied due to their various advantages. Numerous studies have been carried out on improving their electromechanical sensing properties through microporous structures. However,...
Highly flexible and compressible porous polyurethane (PU) structures have effectively been applied in capacitive pressure sensors because of the good elastic properties of the PU structures. However, PU porous structure-based pressure sensors have be...
Sensitive and flexible pressure sensors have invoked considerable interest for a broad range of applications in tactile sensing, physiological sensing, and flexible electronics. The barrier between high sensitivity and low fabrication cost needs to b...
Flexible pressure sensors are increasingly recognized for their potential use in wearable electronic devices, attributed to their sensitivity and broad pressure response range. Introducing surface microstructures can notably enhance sensitivity; howe...
Flexible capacitive pressure sensors have attracted extensive attention due to their dynamic response and good sensing capability for static and small pressures. Using microstructural dielectric layers is an effective method for improving performance...
The significant potential of flexible sensors in various fields such as human health, soft robotics, human–machine interaction, and electronic skin has garnered considerable attention. Capacitive pressure sensor is popular given their mechanica...
A novel hollow capacitive wind pressure sensor is for the first time proposed. The sensing element of the proposed sensor uses a non-parallel plate variable capacitor, whose movable electrode plate uses a transversely uniformly loaded annular conduct...
We propose a flexible capacitive pressure sensor that utilizes porous polydimethylsiloxane elastomer with zinc oxide nanowire as nanocomposite dielectric layer via a simple porogen-assisted process. With the incorporation of nanowires into the porous...
Microelectromechanical systems (MEMS)-based capacitive pressure sensors are conventionally fabricated from diaphragms made of Si, which has a high elastic modulus that limits the control of internal stress and constrains size reduction and low-pressu...
Wafer bonding of a silicon carbide (SiC) diaphragm to a patterned SiC substrate coated with aluminum nitride (AlN) film as an insulating layer is a promising choice to fabricate an all-SiC capacitive pressure sensor. To demonstrate the bonding feasib...
This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 μm CMOS-MEMS process, incorporated with additional post-processing steps su...
The design, especially the numerical calibration, of a circular touch mode capacitive pressure sensor is highly dependent on the accuracy of the analytical solution of the contact problem between the circular conductive membrane and the rigid plate o...
Flexible capacitive pressure sensors have been widely used in electronic skin, human movement and health monitoring, and human–machine interactions. Recently, electronic textiles afford a valuable alternative to traditional capacitive pressure...
Attempts have been made to introduce microstructures or wrinkles into the elastomer surface to increase the sensitivity of the elastomer. However, the disadvantage of this method is that when a force is applied to the pressure sensor, the contact are...
This article presents the design, manufacture and testing of a capacitive pressure sensor with a high, tunable performance to low compressive loads (<10 kPa) and a resolution of less than 0.5 kPa. Such a performance is required for the monitoring...
Flexible pressure sensors are widely applied in tactile perception, fingerprint recognition, medical monitoring, human–machine interfaces, and the Internet of Things. Among them, flexible capacitive pressure sensors have the advantages of low e...
In recent years, laser engraving has received widespread attention as a convenient, efficient, and programmable method which has enabled high-quality porous graphene to be obtained from various precursors. Laser engraving is often used to fabricate t...
We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between −55 °C and 225 °C. The circui...
A flexible microfluidic super-capacitive pressure sensor is developed to measure the surface pressure of a complex structure. The innovative sensor contains a filter paper filled with ionic liquid, and coated with two indium tin oxide polyethylene te...
Wide-range flexible pressure sensors are in difficulty in research while in demand in application. In this paper, a wide-range capacitive flexible pressure sensor is developed with the foaming agent ammonium bicarbonate (NH4HCO3). By controlling the...
Textile-based pressure sensors have garnered considerable interest in electronic textiles due to their diverse applications, including human–machine interface and healthcare monitoring systems. We studied a textile-based capacitive pressure sen...
Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated to...
The flexible and wearable capacitive sensors have captured tremendous interest due to their enormous potential for healthcare monitoring, soft robotics, and human−computer interface. However, despite recent progress, there are still pressing ch...
In experimental chambers for simulating the atmospheric near-surface conditions of Mars, or in situ measurements on Mars, the measurement of the humidity in carbon dioxide gas at low temperature and under low pressure is needed. For this purpose, pol...
In this paper, an analytical solution-based method for the design and numerical calibration of polymer conductive membrane-based non-touch mode circular capacitive pressure sensors is presented. The accurate analytical relationship between the capaci...
This paper reports the novel design of a touch mode capacitive pressure sensor (TMCPS) system with a wireless approach for a full-range continuous monitoring of ventricular pressure. The system consists of two modules: an implantable set and an exter...
Many practical applications require flexible high-sensitivity pressure sensors. However, such sensors are difficult to achieve using conventional materials. Engineering the morphology of the electrodes and the topography of the dielectrics has been d...
Conducting polymer composites consisting of carbon nanotubes (CNTs) as a conductive filler and polydimethylsiloxane (PDMS) as a polymer matrix were fabricated to investigate their capacitive and piezoresistive effects as pressure sensors. The pressur...
Flexible, wearable pressure sensors offer numerous benefits, including superior sensing capabilities, a lightweight and compact design, and exceptional conformal properties, making them highly sought after in various applications including medical mo...
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