Recent Advances in Silicon-Based MEMS Sensors and Actuators

Dear Colleagues,

With the development of microelectronics technology and micro/nano manufacturing technology, Si-based MEMS sensors and actuators have progressed significantly. Due to their advantages of high precision, miniaturization and low power consumption, Si-based MEMS sensors and actuators have been widely applied in many fields, such as consumer electronics, automotive electronics, aerospace and military equipment. In order to showcase the latest research results in this field and promote technological innovation and application expansion, we would like to invite scholars, researchers and engineers from all over the world to contribute to this Special Issue.

This Special Issue will focus on research advances in Si-based MEMS sensors and actuators, covering novel sensing and execution mechanisms, advanced fabrication methods, performance optimization strategies and innovative applications in biomedical, environmental monitoring, intelligent manufacturing and communication electronics. We look forward to innovative, scientific and practical high-quality manuscripts, whether they be theoretical research, experimental exploration or practical application cases, which will bring inspiration to the development of the Si-based MEMS field.

Manuscripts must be original works with rigorous structures, accurate data and clear discussions, and they must conform to the format standard of the journal. Furthermore, manuscripts must not have been previously published in other journals. The submission deadline is May 31, 2025. Areas of interest include but are not limited to the following:

• Structural design and optimization methods;
• System modeling and simulation;
• Advanced fabrication techniques;
• Experimental explorations and practical applications.

Prof. Dr. Linxi Dong
Prof. Dr. Chenying Wang
Prof. Dr. Weidong Wang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.