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Micro/Nanostructures in Sensors and Actuators

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A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (31 August 2024) | Viewed by 20793

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Prof. Dr. Cong Wang

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Guest Editor

School of Mechanical Engineering and Electronic Information, China University of Geosciences, Wuhan 430074, China
Interests: micro/nano fabrication; micro/nanofluidics; electrokinetics; BioMEMS; biosensor
Special Issues, Collections and Topics in MDPI journals

Prof. Dr. Shulan Jiang

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Guest Editor

School of Mechanical Engineering and Electronic Information, China University of Geosciences, Wuhan 430074, China
Interests: micro/nano fabrication; BioMEMS; micro/nanosensors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

With the rapid development of micro- and nano-scale manufacturing technology and material science, sensors and actuators have been being miniaturized and integrated into microsystems, especially for wearable or implantable devices. Micro/nanostructures in the sensors and actuators leverage unique micro- and nano-scale phenomena significantly different from those in the macro-scale world. These micro/nanostructures have several merits to be developed to provide rapid, accurate, and robust analysis & control. Accordingly, this Special Issue seeks to showcase research papers and review articles that focus on (1) novel methodological developments in micro/nano structures used for sensors & actuators; (2) novel designs, fabrication, and applications of sensors & actuators (e.g., micro/nanofluidic sensors, wearable or implantable sensors & actuators, etc.).

We look forward to receiving your submissions!

Prof. Dr. Cong Wang
Prof. Dr. Shulan Jiang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

micro/nano fabrication
micro/nano structure
sensors & actuators
MEMS
BioMEMS

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Related Special Issue

Micro/Nanostructures in Sensors and Actuators, 2nd Edition in Micromachines (7 articles)

Published Papers (11 papers)

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Research

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19 pages, 3608 KiB

Open AccessArticle

A Detailed Analysis of the Dynamic Behavior of a MEMS Vibrating Internal Ring Gyroscope

by Waqas Amin Gill, Ian Howard, Ilyas Mazhar and Kristoffer McKee

Micromachines 2024, 15(9), 1107; https://doi.org/10.3390/mi15091107 - 30 Aug 2024

Cited by 1 | Viewed by 1268

Abstract

This paper presents the development of an analytical model of an internal vibrating ring gyroscope in a Microelectromechanical System (MEMS). The internal ring structure consists of eight semicircular beams that are attached to the externally placed anchors. This research work analyzes the vibrating ring gyroscope’s in-plane displacement behavior and the resulting elliptical vibrational modes. The elliptical vibrational modes appear as pairs with the same resonance frequency due to the symmetric structure of the design. The analysis commences by conceptualizing the ring as a geometric structure with a circular shape possessing specific dimensions such as thickness, height, and radius. We construct a linear model that characterizes the vibrational dynamics of the internal vibrating ring. The analysis develops a comprehensive mathematical formulation for the radial and tangential displacements in local polar coordinates by considering the inextensional displacement of the ring structure. By utilizing the derived motion equations, we highlight the underlying relationships driving the vibrational characteristics of the MEMS’ vibrating ring gyroscope. These dynamic vibrational relationships are essential in enabling the vibrating ring gyroscope’s future utilization in accurate navigation and motion sensing technologies. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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14 pages, 2956 KiB

Open AccessArticle

Rapid Fabrication of Tungsten Oxide-Based Electrochromic Devices through Femtosecond Laser Processing

by Liqun Wang, Zihao Zhai and Longnan Li

Micromachines 2024, 15(6), 785; https://doi.org/10.3390/mi15060785 - 14 Jun 2024

Viewed by 1162

Abstract

The sol-gel method is a widely adopted technique for the preparation of tungsten trioxide (WO₃) materials, favored for its cost-effectiveness and straightforward production procedures. However, this method encounters challenges such as prolonged annealing periods and limited flexibility in fabricating patterned WO₃ films. This study introduces a novel approach that integrates femtosecond laser processing with the sol-gel method to enhance the fabrication of WO₃ films. By adjusting polyvinylpyrrolidone (PVP) concentrations during sol-gel synthesis, precise control over film thickness and optimized film properties were achieved. The innovative technique significantly reduced the annealing time required to achieve an 80% transmittance rate from 90 min to 40 min, marking a 56% decrease. Laser processing increased the surface roughness of the films from Sa = 0.032 to Sa = 0.119, facilitating enhanced volatilization of organics during heat treatment. Additionally, this method improved the transmittance modulation of the films by 22% at 550 nm compared to unprocessed counterparts. This approach not only simplifies the manufacturing process but also enhances the optical efficiency of electrochromic devices, potentially leading to broader applications and more effective energy conservation strategies. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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13 pages, 4646 KiB

Open AccessArticle

A Single-Clamp Inchworm Actuator with Two Piezoelectric Stacks

by Lu Liu, Zheyang Ji, Yue Zhang, Huan Chen, Weimin Lou and Ming Kong

Micromachines 2024, 15(6), 718; https://doi.org/10.3390/mi15060718 - 29 May 2024

Cited by 3 | Viewed by 1290

Abstract

Inchworm piezoelectric actuators have attracted much attention in the field of precision positioning due to the advantages of a large stroke, high output force, and high resolution. However, traditional inchworm piezoelectric actuators use two sets of clamps and a set of drive structures to achieve stepping motion, which generally requires at least three piezoelectric stacks, resulting in a complex structure and the control system. Several methodologies have been advanced to minimize the utilization of piezoelectric stacks. However, there still exists the issue of excessive volume. Therefore, an inchworm piezoelectric actuator with a single-clamp and single drive structure is proposed in the study, which provides a compact size and smaller volume. The clamping mechanism comprises two sets of clamping feet with opposite displacement, which alternate contact with the guide frame and adjustable plate to ensure that the clamping mechanism always has frictional force and accomplishes the stepping motion. The testing of the actuator’s step distance, output force, and other parameters was conducted utilizing a displacement sensor. Experimental results indicate that the actuator achieved a maximum speed of 174.3 μm/s and an output force of 8.6 N when the frequency and voltage were 19 Hz and 150 V. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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16 pages, 3711 KiB

Open AccessArticle

Intelligent Detection and Odor Recognition of Cigarette Packaging Paper Boxes Based on a Homemade Electronic Nose

by Xingguo Wang, Hao Li, Yunlong Wang, Bo Fu and Bin Ai

Micromachines 2024, 15(4), 458; https://doi.org/10.3390/mi15040458 - 28 Mar 2024

Cited by 3 | Viewed by 1894

Abstract

The printing process of box packaging paper can generate volatile organic compounds, resulting in odors that impact product quality and health. An efficient, objective, and cost-effective detection method is urgently needed. We utilized a self-developed electronic nose system to test four different cigarette packaging paper samples. Employing multivariate statistical methods like Principal Component Analysis (PCA), Linear Discriminant Analysis (LDA), Statistical Quality Control (SQC), and Similarity-based Independent Modeling of Class Analogy (SIMCA), we analyzed and processed the collected data. Comprehensive evaluation and quality control models were constructed to assess sample stability and distinguish odors. Results indicate that our electronic nose system rapidly detects odors and effectively performs quality control. By establishing models for quality stability control, we successfully identified samples with acceptable quality and those with odors. To further validate the system’s performance and extend its applications, we collected two types of cigarette packaging paper samples with odor data. Using data augmentation techniques, we expanded the dataset and achieved an accuracy rate of 0.9938 through classification and discrimination. This highlights the significant potential of our self-developed electronic nose system in recognizing cigarette packaging paper odors and odorous samples. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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10 pages, 3566 KiB

Open AccessArticle

Development of Shape Prediction Model of Microlens Fabricated via Diffuser-Assisted Photolithography

by Ha-Min Kim, Yoo-Kyum Shin and Min-Ho Seo

Micromachines 2023, 14(12), 2171; https://doi.org/10.3390/mi14122171 - 29 Nov 2023

Cited by 1 | Viewed by 1507

Abstract

The fabrication of microlens arrays (MLAs) using diffuser-assisted photolithography (DPL) has garnered substantial recent interest owing to the exceptional capabilities of DPL in adjusting the size and shape, achieving high fill factors, enhancing productivity, and ensuring excellent reproducibility. The inherent unpredictability of light interactions within the diffuser poses challenges in accurately forecasting the final shape and dimensions of microlenses in the DPL process. Herein, we introduce a comprehensive theoretical model to forecast microlens shapes in response to varying exposure doses within a DPL framework. We establish a robust MLA fabrication method aligned with conventional DPL techniques to enable precise shape modulation. By calibrating the exposure doses meticulously, we generate diverse MLA configurations, each with a distinct shape and size. Subsequently, by utilizing the experimentally acquired data encompassing parameters such as height, radius of curvature, and angles, we develop highly precise theoretical prediction models, achieving R-squared values exceeding 95%. The subsequent validation of our model encompasses the accurate prediction of microlens shapes under specific exposure doses. The verification results exhibit average error rates of approximately 2.328%, 7.45%, and 3.16% for the height, radius of curvature, and contact angle models, respectively, all of which were well below the 10% threshold. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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21 pages, 7654 KiB

Open AccessArticle

A 3D-Printed Micro-Optofluidic Chamber for Fluid Characterization and Microparticle Velocity Detection

by Emanuela Cutuli, Dario Sanalitro, Giovanna Stella, Lorena Saitta and Maide Bucolo

Micromachines 2023, 14(11), 2115; https://doi.org/10.3390/mi14112115 - 18 Nov 2023

Cited by 4 | Viewed by 2104

Abstract

This work proposes a multi-objective polydimethylsiloxane (PDMS) micro-optofluidic (MoF) device suitably designed and manufactured through a 3D-printed-based master–slave approach. It exploits optical detection techniques to characterize immiscible fluids or microparticles in suspension inside a compartment specifically designed at the core of the device referred to as the MoF chamber. In addition, we show our novel, fast, and cost-effective methodology, dual-slit particle signal velocimetry (DPSV), for fluids and microparticle velocity detection. Different from the standard state-of-the-art approaches, the methodology focuses on signal processing rather than image processing. This alternative has several advantages, including the ability to circumvent the requirement of complex and extensive setups and cost reduction. Additionally, its rapid processing speed allows for real-time sample manipulations in ongoing image-based analyses. For our specific design, optical signals have been detected from the micro-optics components placed in two slots designed ad hoc in the device. To show the devices’ multipurpose capabilities, the device has been tested with fluids of various colors and densities and the inclusion of synthetic microparticles. Additionally, several experiments have been conducted to prove the effectiveness of the DPSV approach in estimating microparticle velocities. A digital particle image velocimetry (DPIV)-based approach has been used as a baseline against which the outcomes of our methods have been evaluated. The combination of the suitability of the micro-optical components for integration, along with the MoF chamber device and the DPSV approach, demonstrates a proof of concept towards the challenge of real-time total-on-chip analysis. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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13 pages, 3690 KiB

Open AccessArticle

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si₃N₄-SiO₂ Double-Covered Waveguiding Layer

by Luming Li, Mingyong Zhou, Lei Huang and Bingyan Jiang

Micromachines 2023, 14(9), 1696; https://doi.org/10.3390/mi14091696 - 30 Aug 2023

Cited by 2 | Viewed by 1498

Abstract

Love surface acoustic wave (L-SAW) sensors are miniaturized, easy to integrate, and suitable for detection in liquid environments. In this paper, an L-SAW sensor with a thin Si₃N₄-SiO₂ double-covered layer was proposed for samples with small mass loads. The output response, phase velocity of the acoustic wave, and the mass sensitivity were analyzed using the finite element method (FEM). The simulation results show that the Si₃N₄ layer with high wave velocity greatly weakens the limitation of SiO₂ on the phase velocity. The phase velocity can reach about 4300 m/s, which can increase the frequency shift when the same mass load is applied. Within a certain range, the mass sensitivity of the sensor is enhanced with the increase in the total thickness of the waveguiding layer and the thickness ratio of Si₃N₄ in the double-covered layer. When the thickness ratio is 1:2, the peak value of the mass sensitivity of the sensor is approximately 50% higher than that achieved with only the SiO₂ waveguiding layer. The surface average stress of the delay line region follows the same trend as the mass sensitivity. The increase in mass sensitivity is the result of the heightened stress on the sensor surface. This L-SAW sensor, featuring a double-covered waveguiding layer, demonstrates high sensitivity and a simple structure. The simulation results lay a foundation for the design and manufacture of SAW sensors. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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21 pages, 5026 KiB

Open AccessArticle

Investigations of Shape Deformation Behaviors of the Ferromagnetic Ni–Mn–Ga Alloy/Porous Silicone Rubber Composite towards Actuator Applications

by Wan-Ting Chiu, Yui Watanabe, Masaki Tahara, Tomonari Inamura and Hideki Hosoda

Micromachines 2023, 14(8), 1604; https://doi.org/10.3390/mi14081604 - 14 Aug 2023

Cited by 3 | Viewed by 1668

Abstract

Ferromagnetic shape memory alloys (FSMAs), which are potential candidates for future technologies (i.e., actuators in robots), have been paid much attention for their high work per volume and rapid response as external stimulation, such as a magnetic field, is imposed. Among all the FSMAs, the Ni–Mn–Ga-based alloys were considered promising materials due to their appropriate phase transformation temperatures and ferromagnetism. Nevertheless, their intrinsic embrittlement issue and sluggish twin motion due to the inhibition of grain boundaries restrict their practicability. This study took advantage of the single-crystal Ni–Mn–Ga cube/silicone rubber composite materials to solve the two aforementioned difficulties. The single-crystal Ni–Mn–Ga cube was prepared by using a high-temperature alloying procedure and a floating-zone (FZ) method, and the cubes were verified to be the near-{100}_p Ni–Mn–Ga alloy. Various room temperature (RT) curing silicone rubbers were utilized as matrix materials. Furthermore, polystyrene foam particles (PFP) were used to provide pores, allowing a porous silicone rubber matrix. It was found that the elastic modulus of the silicone rubber was successfully reduced by introducing the PFP. Additionally, the magnetic field-induced martensite variant reorientation (MVR) was greatly enhanced by introducing a porous structure into the silicone rubber. The single-crystal Ni–Mn–Ga cube/porous silicone rubber composite materials are considered to be promising materials for applications in actuators. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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11 pages, 3447 KiB

Open AccessFeature PaperEditor’s ChoiceArticle

Multi-Layered Bipolar Ionic Diode Working in Broad Range Ion Concentration

by Jaehyun Kim, Cong Wang and Jungyul Park

Micromachines 2023, 14(7), 1311; https://doi.org/10.3390/mi14071311 - 26 Jun 2023

Cited by 3 | Viewed by 2389

Abstract

Ion current rectification (ICR) is the ratio of ion current by forward bias to backward bias and is a critical indicator of diode performance. In previous studies, there have been many attempts to improve the performance of this ICR, but there is the intrinsic problem for geometric changes that induce ionic rectification due to fabrication problems. Additionally, the high ICR could be achieved in the narrow salt concentration range only. Here, we propose a multi-layered bipolar ionic diode based on an asymmetric nanochannel network membrane (NCNM), which is realized by soft lithography and self-assembly of homogenous-sized nanoparticles. Owing to the freely changeable geometry based on soft lithography, the ICR performance can be explored according to the variation of microchannel shape. The presented diode with multi-layered configuration shows strong ICR performance, and in a broad range of salt concentrations (0.1 mM~100 mM), steady ICR performance. It is interesting to note that when each anion-selective (AS) and cation-selective (CS) NCNM volume was similar to each optimized volume in a single-layered device, the maximum ICR was obtained. Multi-physics simulation, which reveals greater ionic concentration at the bipolar diode junction under forward bias and less depletion under backward in comparison to the single-layer scenario, supports this tendency as well. Additionally, under different frequencies and salt concentrations, a large-area hysteresis loop emerges, which indicates fascinating potential for electroosmotic pumps, memristors, biosensors, etc. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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13 pages, 14516 KiB

Open AccessArticle

Arc Discharge System for Micromachining of Helical Fiber

by Jian Wang, Chao Ma, Shaochen Duan, Donghui Wang and Libo Yuan

Micromachines 2023, 14(6), 1120; https://doi.org/10.3390/mi14061120 - 26 May 2023

Cited by 1 | Viewed by 1786

Abstract

This article developed a micromachining system of arcing helical fiber with four electrodes to address the issues with conventional approaches to processing helical fibers, which have several uses. The technique may be utilized to create several types of helical fibers. First, the simulation demonstrates that the four-electrode arc’s constant-temperature heating area is larger than the two-electrode arc’s size. A large constant-temperature heating area is not only beneficial to the stress release of fiber, but also reduces the influence of fiber vibration and reduces the difficulty of device debugging. Then, a variety of helical fibers with various pitches were processed using the system presented in this research. By using a microscope, it can be observed that the cladding and core edges of the helical fiber are constantly smooth and the central core is tiny and off-axis, both of which are favorable for the propagation of optical waveguides. A low off-axis has been shown to minimize optical loss through modeling of energy coupling in spiral multi-core optical fibers. The transmission spectrum findings indicated that the device’s insertion loss and transmission spectrum fluctuation were both minimal for four different types of multi-core spiral long-period fiber gratings with intermediate cores. These prove that the spiral fibers prepared by this system have excellent quality. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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Review

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19 pages, 7528 KiB

Open AccessFeature PaperEditor’s ChoiceReview

Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors

by Seokwon Joo, Jung Yeon Han, Soonmin Seo and Ju-Hyung Kim

Micromachines 2023, 14(11), 2034; https://doi.org/10.3390/mi14112034 - 31 Oct 2023

Cited by 1 | Viewed by 2588

Abstract

Rapid technological advancements have led to increased demands for sensors. Hence, high performance suitable for next-generation technology is required. As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the characteristics and performance of sensors, and research centered specifically on these patterns is necessary for high integration and high performance of these devices. In this paper, we review the patterning techniques used in recently reported sensors, specifically the most widely used capacitive sensors, and their impact on sensor performance. Moreover, we introduce a method for increasing sensor performance through three-dimensional (3D) structures. Full article

(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)

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