Unconventional MEMS Sensors

Dear Colleagues,

The last 30 years have seen the advent of MicroElectroMechanical Systems (MEMS) for a wide range of applications, including digital projectors, inertial (automotive, joysticks, phones) and chemical sensors. Currently, MEMS are based on silicon material and associated micromachining techniques. Over the years, MEMS based on alternative materials to silicon (polymers, SiC, graphene, bioinspired, etc), enabling to finely tune their properties, have been considered as a powerful alternative to silicon based MEMS sensors, just like organic light-emitting diodes (OLEDs) are taking a major share of the global market of the smartphone and display industries, for instance. Nonetheless, considerable challenges remain to bring unconventional MEMS to maturity. For example, the design and fabrication processing of these MEMS sensors, as well as their transducing strategies, have to be rethought with respect to conventional silicon MEMS sensors.

We invite research papers, reviews and shorter communications that focus on innovative materials, beyond the standard silicon, in microsystem sensors to contribute to this Special Issue on unconventional MEMS sensors. Topics of particular interest are, but are not limited to, development of novel active materials (electroactive, stimuli-responsive, chemically sensitive for instance) for structural, transducer and/or sensitive elements, fabrication processes (printing, 3-dimensional, etc) and the physical, chemical, biological sensing characterization and application of resulting unconventional MEMS devices.

Prof. Dr. Isabelle Dufour
Dr. Cédric Ayela
Dr. Damien Thuau
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

• Unconventional MEMS
• Physical/Chemical sensors
• Microfabrication
• Sensors