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Open AccessArticle

External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

Mechatronics and MEMS Research Laboratory, Ryerson University, Toronto, ON M5B 2K3, Canada
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Author to whom correspondence should be addressed.
These authors contributed to this paper equally.
Micromachines 2019, 10(10), 667; https://doi.org/10.3390/mi10100667
Received: 12 August 2019 / Revised: 11 September 2019 / Accepted: 29 September 2019 / Published: 30 September 2019
(This article belongs to the Special Issue Optical MEMS, Volume II)
An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed circuit board) micromirror is proposed in this paper that can overcome two limitations associated with the previous FPCB micromirror with a configuration of an external PM plus moving coil, i.e., (1) it reduces the overall width beyond the mirror plate, and (2) increases the maximum rotation angle. The micromirror has two external electromagnets underneath an FPCB structure (two torsion beams and a middle seat) with two moving PM discs attached to the back and a metal-coated mirror plate bonded to the front of the FPCB middle seat. Modeling and simulation were introduced, and the prototype was fabricated and tested to verify the design. The achieved performance was better than that of the previous design: a maximum resonant rotation angle of 62° (optical) at a driving voltage of ±3 V with a frequency of 191 Hz, the required extra width beyond the mirror plate was 6 mm, and an aperture of 8 mm × 5.5 mm with a roughness of <10 nm and a flatness of >10 m (ROC, radius of curvature). The previous FPCB micromirror’s performance was: strain limited maximum rotation angle was 40° (optical), the extra width beyond the mirror plate was 14.7 mm, and had an aperture of 4 mm × 4 mm with a similar roughness and flatness. View Full-Text
Keywords: flexible printed circuit board (FPCB) micromirror; external electromagnet; moving permanent magnet (PM); large aperture; high flatness flexible printed circuit board (FPCB) micromirror; external electromagnet; moving permanent magnet (PM); large aperture; high flatness
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Periyasamy, K.G.K.; Tan, V.J.; He, S.; Kourtzanidis, N. External Electromagnet FPCB Micromirror for Large Angle Laser Scanning. Micromachines 2019, 10, 667.

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