MEMS in Italy

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 December 2022) | Viewed by 27870

Special Issue Editor


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Guest Editor
Dipartimento di Ingegneria Civile ed Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy
Interests: material and structural mechanics; computational mechanics; physically based AI; advanced materials; metamaterials; MEMS
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Special Issue Information

Dear Colleagues,

Microsystems or microelectromechanical systems (MEMS) over the last thirty years have seen impressive development in terms of potentialities and diffusion; they are now widespread as microsensors and/or micro-actuators and can be found in many objects of common use.

Italy has become one important player in the MEMS industry in terms of contributions to research and development, design, production, and innovative applications.

The purpose of this Special Issue is to offer an overview of the importance of MEMS in Italy, focusing on new trends in design, fabrication processes, and applications.

I therefore warmly invite you to submit contributions on all scientific and technical aspects of MEMS in Italy.

Topics include but are not limited to the following:

  • Theory and multiphysics working principles of MEMS;
  • Multiphysics modeling and simulations for MEMS;
  • Fabrication processes for MEMS, including additive manufacturing at the micro-scale;
  • Experimental characterization and reliability for MEMS;
  • New trends in MEMS design and production;
  • Innovative applications of MEMS;
  • MEMS low-power sensing techniques and devices.

Prof. Dr. Alberto Corigliano
Guest Editor

Manuscript Submission Information

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Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS
  • microsystems
  • multiphysics
  • modeling and simulation
  • experimental characterization
  • fabrication processes

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Published Papers (14 papers)

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Research

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14 pages, 2851 KiB  
Article
MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength
by Tiago Vicentini Ferreira do Valle, Stefano Mariani, Aldo Ghisi, Biagio De Masi, Francesco Rizzini, Gabriele Gattere and Carlo Valzasina
Micromachines 2023, 14(2), 443; https://doi.org/10.3390/mi14020443 - 13 Feb 2023
Cited by 1 | Viewed by 1069
Abstract
Polycrystalline silicon is a brittle material, and its strength results are stochastically linked to microscale (or even nanoscale) defects, possibly dependent on the grain size and morphology. In this paper, we focus on the out-of-plane tensile strength of columnar polysilicon. The investigation has [...] Read more.
Polycrystalline silicon is a brittle material, and its strength results are stochastically linked to microscale (or even nanoscale) defects, possibly dependent on the grain size and morphology. In this paper, we focus on the out-of-plane tensile strength of columnar polysilicon. The investigation has been carried out through a combination of a newly proposed setup for on-chip testing and finite element analyses to properly interpret the collected data. The experiments have aimed to provide a static loading to a stopper, exploiting electrostatic actuation to move a massive shuttle against it, up to failure. The failure mechanism observed in the tested devices has been captured by the numerical simulations. The data have been then interpreted by the Weibull theory for three different stopper sizes, leading to an estimation of the reference out-of-plane strength of polysilicon on the order of 2.8–3.0 GPa, in line with other results available in the literature. Full article
(This article belongs to the Special Issue MEMS in Italy)
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13 pages, 11307 KiB  
Article
Effect of Red Mud Addition on Electrical and Magnetic Properties of Hemp-Derived-Biochar-Containing Epoxy Composites
by Silvia Zecchi, Fabrizio Ruscillo, Giovanni Cristoforo, Mattia Bartoli, Griffin Loebsack, Kang Kang, Erik Piatti, Daniele Torsello, Gianluca Ghigo, Roberto Gerbaldo, Mauro Giorcelli, Franco Berruti and Alberto Tagliaferro
Micromachines 2023, 14(2), 429; https://doi.org/10.3390/mi14020429 - 11 Feb 2023
Cited by 2 | Viewed by 1342
Abstract
Waste stream valorization is a difficult task where the economic and environmental issues must be balanced. The use of complex metal-rich waste such as red mud is challenging due to the wide variety of metal oxides present such as iron, aluminum, and titanium. [...] Read more.
Waste stream valorization is a difficult task where the economic and environmental issues must be balanced. The use of complex metal-rich waste such as red mud is challenging due to the wide variety of metal oxides present such as iron, aluminum, and titanium. The simple separation of each metal is not economically feasible, so alternative routes must be implemented. In this study, we investigated the use of red mud mixed with hemp waste to produce biochar with high conductivity and good magnetic properties induced by the reduction of the metal oxides present in the red mud through carbothermal processes occurring during the co-pyrolysis. The resulting biochar enriched with thermally-reduced red mud is used for the preparation of epoxy-based composites that are tested for electric and magnetic properties. The electric properties are investigated under DC (direct current) regime with or without pressure applied and under AC (alternating current) in a frequency range from 0.5 up to 16 GHz. The magnetic measurements show the effective tailoring of hemp-derived biochar with magnetic structures during the co-pyrolytic process. Full article
(This article belongs to the Special Issue MEMS in Italy)
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19 pages, 1699 KiB  
Article
PMUTs Arrays for Structural Health Monitoring of Bolted-Joints
by Omer M. O. Abdalla, Gianluca Massimino, Fabio Quaglia, Marco Passoni and Alberto Corigliano
Micromachines 2023, 14(2), 311; https://doi.org/10.3390/mi14020311 - 25 Jan 2023
Cited by 5 | Viewed by 1450
Abstract
Micro-electro-mechanical systems (MEMS) have enabled new techniques for the miniaturization of sensors suitable for Structural Health Monitoring (SHM) applications. In this study, MEMS-based sensors, specifically Piezoelectric Micromachined Ultrasonic Transducers (PMUT), are used to evaluate and monitor the pre-tensioning of a bolted joint structural [...] Read more.
Micro-electro-mechanical systems (MEMS) have enabled new techniques for the miniaturization of sensors suitable for Structural Health Monitoring (SHM) applications. In this study, MEMS-based sensors, specifically Piezoelectric Micromachined Ultrasonic Transducers (PMUT), are used to evaluate and monitor the pre-tensioning of a bolted joint structural system. For bolted joints to function properly, it is essential to maintain a suitable level of pre-tensioning. In this work, an array of PMUTs attached to the head and to the end of a bolt, serve as transmitter and receiver, respectively, in a pitch-catch Ultrasonic Testing (UT) scenario. The primary objective is to detect the Change in Time of Flight (CTOF) of the acoustic wave generated by the PMUT array and propagating along the bolt’s axis between a non-loaded bolt and a bolt in service. To model the pre-tensioning of bolted joints and the transmission of the acoustic wave to and from a group of PMUTs through the bolt, a set of numerical models is created. The CTOF is found to be linearly related to the amount of pre-tensioning. The numerical model is validated through comparisons with the results of a preliminary experimental campaign. Full article
(This article belongs to the Special Issue MEMS in Italy)
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14 pages, 9835 KiB  
Article
Design, Fabrication, and Experimental Validation of Microfluidic Devices for the Investigation of Pore-Scale Phenomena in Underground Gas Storage Systems
by Alice Massimiani, Filippo Panini, Simone Luigi Marasso, Nicolò Vasile, Marzia Quaglio, Christian Coti, Donatella Barbieri, Francesca Verga, Candido Fabrizio Pirri and Dario Viberti
Micromachines 2023, 14(2), 308; https://doi.org/10.3390/mi14020308 - 25 Jan 2023
Cited by 7 | Viewed by 1712
Abstract
The understanding of multiphase flow phenomena occurring in porous media at the pore scale is fundamental in a significant number of fields, from life science to geo and environmental engineering. However, because of the optical opacity and the geometrical complexity of natural porous [...] Read more.
The understanding of multiphase flow phenomena occurring in porous media at the pore scale is fundamental in a significant number of fields, from life science to geo and environmental engineering. However, because of the optical opacity and the geometrical complexity of natural porous media, detailed visual characterization is not possible or is limited and requires powerful and expensive imaging techniques. As a consequence, the understanding of micro-scale behavior is based on the interpretation of macro-scale parameters and indirect measurements. Microfluidic devices are transparent and synthetic tools that reproduce the porous network on a 2D plane, enabling the direct visualization of the fluid dynamics. Moreover, microfluidic patterns (also called micromodels) can be specifically designed according to research interests by tuning their geometrical features and surface properties. In this work we design, fabricate and test two different micromodels for the visualization and analysis of the gas-brine fluid flow, occurring during gas injection and withdrawal in underground storage systems. In particular, we compare two different designs: a regular grid and a real rock-like pattern reconstructed from a thin section of a sample of Hostun rock. We characterize the two media in terms of porosity, tortuosity and pore size distribution using the A* algorithm and CFD simulation. We fabricate PDMS-glass devices via soft lithography, and we perform preliminary air-water displacement tests at different capillary numbers to observe the impact of the design on the fluid dynamics. This preliminary work serves as a validation of design and fabrication procedures and opens the way to further investigations. Full article
(This article belongs to the Special Issue MEMS in Italy)
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13 pages, 2410 KiB  
Article
Impact of Gait Events Identification through Wearable Inertial Sensors on Clinical Gait Analysis of Children with Idiopathic Toe Walking
by Paolo Brasiliano, Guido Mascia, Paolo Di Feo, Eugenio Di Stanislao, Martina Alvini, Giuseppe Vannozzi and Valentina Camomilla
Micromachines 2023, 14(2), 277; https://doi.org/10.3390/mi14020277 - 21 Jan 2023
Viewed by 2234
Abstract
Idiopathic toe walking (ITW) is a gait deviation characterized by forefoot contact with the ground and excessive ankle plantarflexion over the entire gait cycle observed in otherwise-typical developing children. The clinical evaluation of ITW is usually performed using optoelectronic systems analyzing the sagittal [...] Read more.
Idiopathic toe walking (ITW) is a gait deviation characterized by forefoot contact with the ground and excessive ankle plantarflexion over the entire gait cycle observed in otherwise-typical developing children. The clinical evaluation of ITW is usually performed using optoelectronic systems analyzing the sagittal component of ankle kinematics and kinetics. However, in standardized laboratory contexts, these children can adopt a typical walking pattern instead of a toe walk, thus hindering the laboratory-based clinical evaluation. With these premises, measuring gait in a more ecological environment may be crucial in this population. As a first step towards adopting wearable clinical protocols embedding magneto-inertial sensors and pressure insoles, this study analyzed the performance of three algorithms for gait events identification based on shank and/or foot sensors. Foot strike and foot off were estimated from gait measurements taken from children with ITW walking barefoot and while wearing a foot orthosis. Although no single algorithm stands out as best from all perspectives, preferable algorithms were devised for event identification, temporal parameters estimate and heel and forefoot rocker identification, depending on the barefoot/shoed condition. Errors more often led to an erroneous characterization of the heel rocker, especially in shoed condition. The ITW gait specificity may cause errors in the identification of the foot strike which, in turn, influences the characterization of the heel rocker and, therefore, of the pathologic ITW behavior. Full article
(This article belongs to the Special Issue MEMS in Italy)
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18 pages, 7447 KiB  
Article
An Experimental and Numerical Study on Glass Frit Wafer-to-Wafer Bonding
by Seyed Amir Fouad Farshchi Yazdi, Matteo Garavaglia, Aldo Ghisi and Alberto Corigliano
Micromachines 2023, 14(1), 165; https://doi.org/10.3390/mi14010165 - 08 Jan 2023
Viewed by 1547
Abstract
A thermo-mechanical wafer-to-wafer bonding process is studied through experiments on the glass frit material and thermo-mechanical numerical simulations to evaluate the effect of the residual stresses on the wafer warpage. To experimentally characterize the material, confocal laser profilometry and scanning electron microscopy for [...] Read more.
A thermo-mechanical wafer-to-wafer bonding process is studied through experiments on the glass frit material and thermo-mechanical numerical simulations to evaluate the effect of the residual stresses on the wafer warpage. To experimentally characterize the material, confocal laser profilometry and scanning electron microscopy for surface observation, energy dispersive X-ray spectroscopy for microstructural investigation, and nanoindentation and die shear tests for the evaluation of mechanical properties are used. An average effective Young’s modulus of 86.5 ± 9.5 GPa, a Poisson’s ratio of 0.19 ± 0.02, and a hardness of 5.26 ± 0.8 GPa were measured through nanoindentation for the glass frit material. The lowest nominal shear strength ranged 1.13 ÷ 1.58 MPa in the strain rate interval to 0.33 ÷ 4.99 × 103 s1. To validate the thermo-mechanical model, numerical results are compared with experimental measurements of the out-of-plane displacements at the wafer surface (i.e., warpage), showing acceptable agreement. Full article
(This article belongs to the Special Issue MEMS in Italy)
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14 pages, 6036 KiB  
Article
High Frequency MEMS Capacitive Mirror for Space Applications
by Alvise Bagolini, Anze Sitar, Luca Porcelli, Maurizio Boscardin, Simone Dell’Agnello and Giovanni Delle Monache
Micromachines 2023, 14(1), 158; https://doi.org/10.3390/mi14010158 - 08 Jan 2023
Cited by 3 | Viewed by 2011
Abstract
Free space optics laser communication using modulating retroreflectors (MR) is a challenging application for an active mirror, due to the high frequencies (>100 kHz) required to enable sufficient data transfer. Micro Electromechanical (MEMS) mirrors are a promising option for high-frequency applications, given the [...] Read more.
Free space optics laser communication using modulating retroreflectors (MR) is a challenging application for an active mirror, due to the high frequencies (>100 kHz) required to enable sufficient data transfer. Micro Electromechanical (MEMS) mirrors are a promising option for high-frequency applications, given the very small moving mass typical of such devices. Capacitive MEMS mirrors are presented here for free space communications, based on a novel fabrication sequence that introduces a single-layer thin film aluminum mirror structure with an underlying silicon oxide sacrificial layer. The use of aluminum instead of gold as a mirror layer diminishes the heating generated by the absorption of the sun’s radiation once the mirrors exit the earth’s atmosphere. Thanks to the novel fabrication sequence, the presented mirror devices have a full range actuation voltage of less than 40 V, and a high operational frequency with an eigenfrequency above 2 MHz. The devices were manufactured and characterized, and their main parameters were obtained from experimental data combined with finite element analysis, thus enabling future design optimization of the reported MEMS technology. By optical characterization of the far field diffraction pattern, good mirror performance was demonstrated. Full article
(This article belongs to the Special Issue MEMS in Italy)
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15 pages, 5365 KiB  
Article
3D Printed Chitosan/Alginate Hydrogels for the Controlled Release of Silver Sulfadiazine in Wound Healing Applications: Design, Characterization and Antimicrobial Activity
by Carlo Bergonzi, Annalisa Bianchera, Giulia Remaggi, Maria Cristina Ossiprandi, Ruggero Bettini and Lisa Elviri
Micromachines 2023, 14(1), 137; https://doi.org/10.3390/mi14010137 - 04 Jan 2023
Cited by 10 | Viewed by 2679
Abstract
The growing demand for personalized medicine requires innovation in drug manufacturing to combine versatility with automation. Here, three-dimensional (3D) printing was explored for the production of chitosan (CH)/alginate (ALG)-based hydrogels intended as active dressings for wound healing. ALG hydrogels were loaded with 0.75% [...] Read more.
The growing demand for personalized medicine requires innovation in drug manufacturing to combine versatility with automation. Here, three-dimensional (3D) printing was explored for the production of chitosan (CH)/alginate (ALG)-based hydrogels intended as active dressings for wound healing. ALG hydrogels were loaded with 0.75% w/v silver sulfadiazine (SSD), selected as a drug model commonly used for the therapeutic treatment of infected burn wounds, and four different 3D CH/ALG architectures were designed to modulate the release of this active compound. CH/ALG constructs were characterized by their water content, elasticity and porosity. ALG hydrogels (Young’s modulus 0.582 ± 0.019 Mpa) were statistically different in terms of elasticity compared to CH (Young’s modulus 0.365 ± 0.015 Mpa) but very similar in terms of swelling properties (water content in ALG: 93.18 ± 0.88% and in CH: 92.76 ± 1.17%). In vitro SSD release tests were performed by using vertical diffusion Franz cells, and statistically significant different behaviors in terms of the amount and kinetics of drugs released were observed as a function of the construct. Moreover, strong antimicrobial potency (100% of growth inhibition) against Staphylococcus aureus and Pseudomonas aeruginosa was demonstrated depending on the type of construct, offering a proof of concept that 3D printing techniques could be efficiently applied to the production of hydrogels for controlled drug delivery. Full article
(This article belongs to the Special Issue MEMS in Italy)
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22 pages, 2331 KiB  
Article
pH-Responsive PVA-Based Nanofibers Containing GO Modified with Ag Nanoparticles: Physico-Chemical Characterization, Wound Dressing, and Drug Delivery
by Erfan Rahmani, Mehrab Pourmadadi, Nayereh Zandi, Abbas Rahdar and Francesco Baino
Micromachines 2022, 13(11), 1847; https://doi.org/10.3390/mi13111847 - 28 Oct 2022
Cited by 20 | Viewed by 2051
Abstract
Site-specific drug delivery and carrying repairing agents for wound healing purposes can be achieved using the intertwined three-dimensional structure of nanofibers. This study aimed to optimize and fabricate poly (vinyl alcohol) (PVA)-graphene oxide (GO)-silver (Ag) nanofibers containing curcumin (CUR) using the electrospinning method [...] Read more.
Site-specific drug delivery and carrying repairing agents for wound healing purposes can be achieved using the intertwined three-dimensional structure of nanofibers. This study aimed to optimize and fabricate poly (vinyl alcohol) (PVA)-graphene oxide (GO)-silver (Ag) nanofibers containing curcumin (CUR) using the electrospinning method for potential wound healing applications. Fourier Transform Infrared (FTIR) spectrophotometry, X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Dynamic Light Scattering (DLS), and zeta potential were used to characterize the nanostructures. The mechanical properties of the nanostructures were subsequently examined by tensile strength and elongation test. As shown by MIC analysis of E. coli and S. aureus bacteria, the fabricated nanofibers had superior inhibitory effects on the bacteria growth. Ag nanoparticles incorporation into the nanofibers resulted in increased loading and encapsulation efficiencies from 21% to 56% and from 61% to 86%, respectively. CUR release from PVA/GO-Ag-CUR nanofiber at pH 7.4 was prevented, while the acidic microenvironment (pH 5.4) increased the release of CUR from PVA/GO-Ag-CUR nanofiber, corroborating the pH-sensitivity of the nanofibers. Using the in vitro wound healing test on NIH 3T3 fibroblast cells, we observed accelerated growth and proliferation of cells cultured on PVA/GO-Ag-CUR nanofibers. Full article
(This article belongs to the Special Issue MEMS in Italy)
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16 pages, 5490 KiB  
Article
Micromachined Tools Using Acoustic Wave Triggering for the Interaction with the Growth of Plant Biological Systems
by Simone Grasso, Francesca Di Marcello, Anna Sabatini, Alessandro Zompanti, Maria Vittoria Di Loreto, Costanza Cenerini, Francesco Lodato, Laura De Gara, Christian Cherubini, Giorgio Pennazza and Marco Santonico
Micromachines 2022, 13(9), 1525; https://doi.org/10.3390/mi13091525 - 15 Sep 2022
Cited by 1 | Viewed by 1491
Abstract
A plant biological system is exposed to external influences. In general, each plant has its characteristics and needs with specific interaction mechanisms adapted to its survival. Interactions between systems can be examined and modeled as energy exchanges of mechanical, chemical or electrical variables. [...] Read more.
A plant biological system is exposed to external influences. In general, each plant has its characteristics and needs with specific interaction mechanisms adapted to its survival. Interactions between systems can be examined and modeled as energy exchanges of mechanical, chemical or electrical variables. Thus, each specific interaction can be examined by triggering the system via a specific stimulus. The objective of this work was to study a specific stimulus (mechanical stimulation) as a driver of plants and their interaction with the environment. In particular, the experimental design concerns the setting up and testing of an automatic source of mechanical stimuli at different wavelengths, generated by an electromechanical transducer, to induce a micro-interaction in plants (or in parts of them) that produces a specific behavior (hypothesis) of plants. Four different experimental setups were developed for this work, each pursuing the same objective: the analysis of the germination process induced by stimulation by sound waves in the audible range. It can be said that the introduction of sound waves as a stimulant or a brake for the growth of plants can offer significant advantages when used on a large scale in the primary sector, since these effects can be used instead of polluting chemical solutions. Full article
(This article belongs to the Special Issue MEMS in Italy)
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12 pages, 2341 KiB  
Article
Microsystem Nodes for Soil Monitoring via an Energy Mapping Network: A Proof-of-Concept Preliminary Study
by Anna Sabatini, Alfiero Leoni, Gil Goncalves, Alessandro Zompanti, Marco V. Marchetta, Paulo Cardoso, Simone Grasso, Maria Vittoria Di Loreto, Francesco Lodato, Costanza Cenerini, Etelvina Figuera, Giorgio Pennazza, Giuseppe Ferri, Vincenzo Stornelli and Marco Santonico
Micromachines 2022, 13(9), 1440; https://doi.org/10.3390/mi13091440 - 01 Sep 2022
Cited by 3 | Viewed by 1509
Abstract
The need for accurate information and the availability of novel tool and technological advances in agriculture have given rise to innovative autonomous systems. The aim is to monitor key parameters for optimal water and fertilizer management. A key issue in precision agriculture is [...] Read more.
The need for accurate information and the availability of novel tool and technological advances in agriculture have given rise to innovative autonomous systems. The aim is to monitor key parameters for optimal water and fertilizer management. A key issue in precision agriculture is the in situ monitoring of soil macronutrients. Here, a proof-of-concept study was conducted that tested two types of sensors capable of capturing both the electrochemical response of the soil and the electrical potential generated by the interaction between the soil and plants. These two sensors can be used to monitor large areas using a network approach, due to their small size and low power consumption. The voltammetric sensor (BIONOTE-L) proved to be able to characterize different soil samples. It was able, indeed, to provide a reproducible voltammetric fingerprint specific for each soil type, and to monitor the concentration of CaCl2 and NaCl in the soil. BIONOTE-L can be coupled to a device capable of capturing the energy produced by interactions between plants and soil. As a consequence, the functionality of the microsystem node when applied in a large-area monitoring network can be extended. Additional calibrations will be performed to fully characterize the instrument node, to implement the network, and to specialize it for a particular application in the field. Full article
(This article belongs to the Special Issue MEMS in Italy)
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17 pages, 3529 KiB  
Article
Microencapsulation of Bacillus velezensis Using Alginate-Gum Polymers Enriched with TiO2 and SiO2 Nanoparticles
by Mojde Moradi Pour, Roohallah Saberi Riseh, Reza Ranjbar-Karimi, Mohadeseh Hassanisaadi, Abbas Rahdar and Francesco Baino
Micromachines 2022, 13(9), 1423; https://doi.org/10.3390/mi13091423 - 29 Aug 2022
Cited by 35 | Viewed by 2471
Abstract
Bacillus bacteria are a group of plant growth stimulants that increase plant growth and resistance to plant pathogens by producing various metabolites. With their large surface area and small size, nanoparticles can be used in controlled-release formulations and increase the efficiency of the [...] Read more.
Bacillus bacteria are a group of plant growth stimulants that increase plant growth and resistance to plant pathogens by producing various metabolites. With their large surface area and small size, nanoparticles can be used in controlled-release formulations and increase the efficiency of the desired product. Encapsulation of biological agents in combination with nanoparticles can be an essential step in increasing the performance of these agents in adverse environmental conditions. In this study, which is the result of a collaboration between scientists from Italy and Iran, Bacillus velezensis was encapsulated in alginate combined with whey protein and zedo, mastic, and tragacanth gums in the presence of silica and titania nanoparticles to obtain two-layer and multilayer assemblies acting as novel, smart micro-encapsulation systems. The results of laboratory studies showed that the B. velezensis could produce protease, lipase, siderophore, auxin, and a dissolution of mineral phosphate. Scanning electron microscopy images (SEM) showed that the studied microcapsules were almost spherical. Moisture affinity, swelling, and efficiency of each microcapsule were examined. The results showed that the highest encapsulation efficiency (94.3%) was related to the multilayer formulation of alginate-whey protein-zedo. XRD and FTIR spectroscopy showed that the alginate, whey protein, and zedo were mixed properly and no incompatible composition occurred in the reaction. This study aimed to provide a suitable formulation of biofertilizers based on biodegradable compounds as an alternative to chemical fertilizers, which is low cost and very effective without harming humans and the environment. Full article
(This article belongs to the Special Issue MEMS in Italy)
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23 pages, 5956 KiB  
Article
Performance Analysis of a CSFH-Based Microgripper: Analytical Modeling and Simulation
by Teferi Sitotaw Yallew, Nicola Pio Belfiore, Alvise Bagolini and Maria F. Pantano
Micromachines 2022, 13(9), 1391; https://doi.org/10.3390/mi13091391 - 25 Aug 2022
Cited by 1 | Viewed by 1800
Abstract
Microgrippers are promising tools for micro-manipulation and characterization of cells. In this paper, a biocompatible electro-thermally actuated microgripper with rotary capacitive position sensor is presented. To overcome the limited displacement possibilities usually provided by electrothermal actuators and to achieve the desired tweezers output [...] Read more.
Microgrippers are promising tools for micro-manipulation and characterization of cells. In this paper, a biocompatible electro-thermally actuated microgripper with rotary capacitive position sensor is presented. To overcome the limited displacement possibilities usually provided by electrothermal actuators and to achieve the desired tweezers output displacement, conjugate surface flexure hinges (CSFH) are adopted. The microgripper herein reported can in principle manipulate biological samples in the size range between 15 and 120 µm. A kinematics modeling approach based on the pseudo-rigid-body-method (PRBM) is applied to describe the microgripper’s working mechanism, and analytical modeling, based on finite elements method (FEM), is used to optimize the electrothermal actuator design and the heat dissipation mechanism. Finally, FEM-based simulations are carried out to verify the microgripper, the electrothermal actuator and heat dissipation mechanism performance, and to assess the validity of the analytical modeling. Full article
(This article belongs to the Special Issue MEMS in Italy)
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Review

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48 pages, 8092 KiB  
Review
Organic Bioelectronics Development in Italy: A Review
by Matteo Parmeggiani, Alberto Ballesio, Silvia Battistoni, Rocco Carcione, Matteo Cocuzza, Pasquale D’Angelo, Victor V. Erokhin, Simone Luigi Marasso, Giorgia Rinaldi, Giuseppe Tarabella, Davide Vurro and Candido Fabrizio Pirri
Micromachines 2023, 14(2), 460; https://doi.org/10.3390/mi14020460 - 16 Feb 2023
Cited by 2 | Viewed by 2852
Abstract
In recent years, studies concerning Organic Bioelectronics have had a constant growth due to the interest in disciplines such as medicine, biology and food safety in connecting the digital world with the biological one. Specific interests can be found in organic neuromorphic devices [...] Read more.
In recent years, studies concerning Organic Bioelectronics have had a constant growth due to the interest in disciplines such as medicine, biology and food safety in connecting the digital world with the biological one. Specific interests can be found in organic neuromorphic devices and organic transistor sensors, which are rapidly growing due to their low cost, high sensitivity and biocompatibility. This trend is evident in the literature produced in Italy, which is full of breakthrough papers concerning organic transistors-based sensors and organic neuromorphic devices. Therefore, this review focuses on analyzing the Italian production in this field, its trend and possible future evolutions. Full article
(This article belongs to the Special Issue MEMS in Italy)
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