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Materials for Nano- and Micro-Electro-Mechanical-Systems

A special issue of Materials (ISSN 1996-1944). This special issue belongs to the section "Advanced Nanomaterials and Nanotechnology".

Deadline for manuscript submissions: 20 September 2024 | Viewed by 2764

Special Issue Editor

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Guest Editor
Mechanical and Mechatronics Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada
Interests: nano- and micro-electro-mechanical-systems (N/MEMS); nano-joining and in-built-electronic-packaging; nano- and micro-assembly and integration; quantum electronic solids: superconductors; graphene/graphene-like materials; transition metal chalcogenides (TMD); nanoplasmonic sensors; photo-electro-chemical oxygen demand (PECOD) sensors; field-effect-transistor (FET)-based biosensors; autonomous and embedded sensors (Fit and Forget) and sensor nodes; energy harvesting; nanorobotics; digital design and fabrication technologies (digital factories); metal-insulator-metal tunneling diodes
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Special Issue Information

Dear Colleagues,

The materials selection, design, tuning and functionalization/passivation with these tuned materials are requirements for ultra-precision and possible shortest response and detection time for dynamic and accurate sensing in nano- and micro-system devices.

Moreover, cost reduction, scale-up, compatibility, and simplicity are major value additions and breakthroughs, in addition to high-responsivity, -sensitivity, and -precision.

Furthermore, the integration of nano- and micro-electro-mechanical devices, which are functionalized with emerging materials, to CMOS systems and their electronic packing are very challenging since it requires the multiple deposition of layers of dielectrics and metals, and results in an atomic mismatch that increases ohmic resistance, creating noise and reducing sensitivity, selectivity and responsivity.

This Special Issue aims to introduce materials and device design for “Nano- and Micro-Electro-Mechanical-Systems”. Topics include, but are not limited to, the following:

  • Graphene/graphene-like and TMD materials based field-effect-transistors (FET)-sensors;
  • Nanoplasmonic/ Photo-electro-chemical sensors;
  • Thin -Film-Transistor (TFT)-based flexible sensors;
  • DNA probe-sensors;
  • Terahertz Resonant-Tunneling Diodes for sensing/detection/energy harvesting/wireless applications;
  • Electrical, mechanical and optical testing of nano/micro-devices: sensors, actuators and harvesters;
  • Dynamic electrical characterization of nano/micro-devices;
  • Electro-mechanical packaging of nano/micro-devices and their nano/micro-assembly.

Prof. Dr. Mustafa Yavuz
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Materials is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.


  • nano- and micro-electro-mechanical-systems (N/MEMS)
  • nano-joining and in-built-electronic-packaging
  • nano- and micro-assembly and integration
  • quantum electronic solids: superconductors, graphene/graphene-like materials, transition metal chalcogenides (TMD)
  • nanoplasmonic sensors
  • photo-electro-chemical oxygen demand (PECOD) sensors, field-effect-transistor (FET)-based biosensors
  • autonomous and embedded sensors (fit and forget) and sensor nodes
  • energy harvesting
  • nanorobotics, digital design and fabrication technologies (Digital Factories)
  • terahertz resonant-tunneling diodes

Published Papers (1 paper)

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26 pages, 9662 KiB  
Materials Perspectives of Integrated Plasmonic Biosensors
by Ayman Negm, Matiar M. R. Howlader, Ilya Belyakov, Mohamed Bakr, Shirook Ali, Mehrdad Irannejad and Mustafa Yavuz
Materials 2022, 15(20), 7289; - 18 Oct 2022
Cited by 3 | Viewed by 2324
With the growing need for portable, compact, low-cost, and efficient biosensors, plasmonic materials hold the promise to meet this need owing to their label-free sensitivity and deep light–matter interaction that can go beyond the diffraction limit of light. In this review, we shed [...] Read more.
With the growing need for portable, compact, low-cost, and efficient biosensors, plasmonic materials hold the promise to meet this need owing to their label-free sensitivity and deep light–matter interaction that can go beyond the diffraction limit of light. In this review, we shed light on the main physical aspects of plasmonic interactions, highlight mainstream and future plasmonic materials including their merits and shortcomings, describe the backbone substrates for building plasmonic biosensors, and conclude with a brief discussion of the factors affecting plasmonic biosensing mechanisms. To do so, we first observe that 2D materials such as graphene and transition metal dichalcogenides play a major role in enhancing the sensitivity of nanoparticle-based plasmonic biosensors. Then, we identify that titanium nitride is a promising candidate for integrated applications with performance comparable to that of gold. Our study highlights the emerging role of polymer substrates in the design of future wearable and point-of-care devices. Finally, we summarize some technical and economic challenges that should be addressed for the mass adoption of plasmonic biosensors. We believe this review will be a guide in advancing the implementation of plasmonics-based integrated biosensors. Full article
(This article belongs to the Special Issue Materials for Nano- and Micro-Electro-Mechanical-Systems)
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