Nano and MEMS Sensors

Dear Colleagues,

The manufacturing and integration of autonomous and embedded sensors through a combination of micro- and nanosystem technologies have been revolutionizing self-powered, high bandwidth devices for advance manufacturing (AM), artificial intelligence (AI), and IoT. 

More specifically, nano and MEMS sensors are the building blocks for a vast range of applications, from continuous real-time health (wearable) and environmental monitoring (gas, pressure, temperature, etc.) to enabling embedded mobile Internet services (wireless), including smart/connected cars and unattended vehicles (UAV) (inertial). As these devices have numbered in the tens of billions, the potential for disruptive innovation has been immense.

This Special Issue aims to introduce the design, manufacturing, packaging, and integration of autonomous and embedded sensors through a combination of micro- and nanosystems. Topics in general include, but are not limited to:

-Autonomous and embedded sensors: design, manufacture, packaging, and reliability;
-Biosensors (electrical/optical and chemical) and their integration to MEMS, CMOS, and microfluidic systems;
-Sensor interconnectors/interfaces and their testing;
-Acoustic/electromagnetic/electrostatic interactions for sensor/actuator design;
-Graphene/TMDs-based nanosensors and transducers;
-Electronic circuits/PCBs for MEMS and nanosensors; -MEMS/Nanogenerators for self-sustaining sensors and sensor nodes/networks.

Prof. Dr. Mustafa Yavuz
Guest Editor

Manuscript Submission Information

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