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Special Issue "MEMS and NEMS Sensors"
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: closed (25 March 2023) | Viewed by 18327
Special Issue Editor
Interests: nano and micro-electro-mechanical systems (N/MEMS) devices; sensors; harvesters and actuators; quantum electronic solids; nano/micro-joining; nano-plasmonic
Special Issues, Collections and Topics in MDPI journals
Special Issue in Sensors: MEMS and Nano-Sensors
Special Issue in Materials: Materials for Nano/Microelectronic Packaging Applications
Special Issue in Sensors: Nano and MEMS Sensors
Special Issue in Materials: Functionalization of FET-Nano/Micro-Sensors with Emerging Materials
Special Issue in Materials: Superconductors for Opto-Nano and Micro-Electro-Mechanical Systems (O-N/MEMS)
Special Issue in Materials: Materials for Nano- and Micro-Electro-Mechanical-Systems
Special Issue Information
The manufacturing and integration of autonomous and embedded sensors through a combination of micro- and nano-system technologies have been revolutionizing self-powered, high bandwidth devices for advance manufacturing (AM), artificial intelligence (AI), Internet of Things (IoT), and health technologies.
More specifically, nano- and micro-electro-mechanical-systems (N/MEMS) sensors are the building blocks for a vast range of applications, from continuous real-time health (wearable) and environmental monitoring (gas, biomolecules, pressure, temperature, etc.) to enabling embedded mobile Internet services (wireless), including smart/connected cars and unattended vehicles (UAV) (inertial). As these devices have numbered in the tens of billions, the potential for disruptive innovation has been immense.
Integration of nano- and micro-sensors-which are functionalized using emerging materials to complementary metal-oxide-semiconductors (CMOS) and microfluidics systems, and their electro-mechanical packing are very challenging. Because, the integration and packing require the multiple deposition of layers of different dielectrics and metals, the atomic mismatch between these layers, acting as electron trap, increases ohmic resistance, and creates noise and reduces sensitivity, selectivity and responsivity; and increases detection time.
This Special Issue aims to introduce the manufacturing, packaging and integration of autonomous and embedded sensors through a combination of micro- and nano-system. Topics in general include, but are not limited, to:
- Autonomous and embedded sensors: design, manufacture, packaging and reliability
- Biosensors (photonic, electrical, chemical) and their integration to MEMS, CMOS and microfluidic systems for COVID-19 and other (future) pandemics’ roteins/metabolites/analytes
- Sensor interconnectors/interfaces and their testing
- Graphene-based nano-sensors
- Electronic circuits for MEMS nano-sensor modulation
- Nano-electro-mechanical sensors
Prof. Dr. Mustafa Yavuz
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
- sensor integration to N/MEMS
- CMOS and microfluidic systems
- electronic circuits for N/MEMS nano-sensor modulation
- bifurcation sensing
- sensor functionalization
- Nano-electro-mechanical sensors