MEMS and NEMS Sensors

Dear Colleagues,

The manufacturing and integration of autonomous and embedded sensors through a combination of micro- and nano-system technologies have been revolutionizing self-powered, high bandwidth devices for advance manufacturing (AM), artificial intelligence (AI), Internet of Things (IoT), and health technologies.

More specifically, nano- and micro-electro-mechanical-systems (N/MEMS) sensors are the building blocks for a vast range of applications, from continuous real-time health (wearable) and environmental monitoring (gas, biomolecules, pressure, temperature, etc.) to enabling embedded mobile Internet services (wireless), including smart/connected cars and unattended vehicles (UAV) (inertial). As these devices have numbered in the tens of billions, the potential for disruptive innovation has been immense.

Integration of nano- and micro-sensors-which are functionalized using emerging materials to complementary metal-oxide-semiconductors (CMOS) and microfluidics systems, and their electro-mechanical packing are very challenging. Because, the integration and packing require the multiple deposition of layers of different dielectrics and metals, the atomic mismatch between these layers, acting as electron trap, increases ohmic resistance, and creates noise and reduces sensitivity, selectivity and responsivity; and increases detection time.

This Special Issue aims to introduce the manufacturing, packaging and integration of autonomous and embedded sensors through a combination of micro- and nano-system. Topics in general include, but are not limited, to:

- Autonomous and embedded sensors: design, manufacture, packaging and reliability
- Biosensors (photonic, electrical, chemical) and their integration to MEMS, CMOS and microfluidic systems for COVID-19 and other (future) pandemics’ roteins/metabolites/analytes
- Sensor interconnectors/interfaces and their testing
- Graphene-based nano-sensors
- Electronic circuits for MEMS nano-sensor modulation
- Nano-electro-mechanical sensors

Prof. Dr. Mustafa Yavuz
Guest Editor

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