MEMS and NEMS Sensors: 2nd Edition

Dear colleagues,

The manufacturing and integration of autonomous and embedded sensors through a combination of micro- and nano-system technologies have revolutionized self-powered, high-bandwidth devices for advanced manufacturing (AM), artificial intelligence (AI), Internet of Things (IoT), and health technologies.

More specifically, nano- and micro-electro-mechanical-systems (N/MEMS) sensors are the building blocks for a vast range of applications, from continuous real-time health (wearable) and environmental monitoring (gas, biomolecules, pressure, temperature, etc.) to enabling embedded mobile internet services (wireless), including smart/connected cars and unattended vehicles (UAVs) (inertial). As these devices are present in the tens of billions, the potential for disruptive innovation has been immense.

The integration of nano- and micro-sensors, which are functionalized using emerging materials to complementary metal-oxide semiconductors (CMOSs) and microfluidics systems, and their electro-mechanical packing, represents a challenge. This is because the integration and packing require the deposition of multiple layers of different dielectrics and metals, and the atomic mismatch between these layers, acting as an electron trap, increases ohmic resistance and detection time, creates noise, and reduces sensitivity, selectivity, and responsivity.

This Special Issue aims to introduce the manufacturing, packaging, and integration of autonomous and embedded sensors through a combination of micro- and nano-systems. Topics in general include, but are not limited to, the following:

• Autonomous and embedded sensors: design, manufacture, packaging, and reliability;
• Biosensors (photonic, electrical, chemical) and their integration into MEMS, CMOS, and microfluidic systems for COVID-19 and other (future) pandemic proteins/metabolites/analytes;
• Sensor interconnectors/interfaces and their testing;
• Graphene-based nano-sensors;
• Electronic circuits for MEMS nano-sensor modulation;
• Nano-electro-mechanical sensors.

Prof. Dr. Mustafa Yavuz
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

• N/MEMS sensors
• sensor integration to N/MEMS
• CMOS and microfluidic systems
• electronic circuits for N/MEMS nano-sensor modulation
• bifurcation sensing
• sensor functionalization
• nano-electro-mechanical sensors
• PeCOD

• MEMS and NEMS Sensors in Sensors (11 articles)