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  • Open Access
Micromachines2026, 17(3), 314;https://doi.org/10.3390/mi17030314 
(registering DOI)

28 February 2026

The further development of scalable fabrication for perovskite solar cells has been considerably constrained by strong process variability and the lack of a reliable real-time predictive mechanism during the thin-film formation process. Existing mach...

  • Article
  • Open Access

Development and Application of Nanostructured Mn3O4 Based Sensor in the Determination of Heavy Metals in Water and Wastewater

  • Vasiliki Keramari,
  • Catherine Dendrinou-Samara,
  • Zoi Kourpouanidou,
  • Lambrini Papadopoulou,
  • Aristidis Anthemidis and
  • Stella Girousi
Micromachines2026, 17(3), 308;https://doi.org/10.3390/mi17030308 
(registering DOI)

28 February 2026

In this work, a novel nanostructured Mn3O4-based electrochemical sensor was developed for the determination of heavy metals in aqueous media. The Mn3O4 nanostructure was solvothermally synthesized in the sole presence of propylene glycol (PG). Under...

  • Article
  • Open Access
Micromachines2026, 17(3), 310;https://doi.org/10.3390/mi17030310 
(registering DOI)

28 February 2026

This study presents a sustainable strategy for developing high-performance supercapacitor separators through the upcycling of waste newspapers into functional cellulose-based membranes. The intrinsic porous architecture of cellulose fibers was exploi...

  • Article
  • Open Access

Fusion of Physical Mechanism and Data-Driven Methods for Online Thickness Measurement and Error Compensation in SiC CMP

  • Junjie Lin,
  • Taotao Chen,
  • Yicheng Ren,
  • Zhilong Song,
  • Binghai Lyu,
  • Julong Yuan and
  • Wenhong Zhao
Micromachines2026, 17(3), 313;https://doi.org/10.3390/mi17030313 
(registering DOI)

28 February 2026

The thickness of silicon carbide (SiC) wafers is a crucial parameter that significantly affects the performance of devices, and its high-precision online measurement during chemical mechanical polishing (CMP) faces challenges from complex process-ind...

  • Article
  • Open Access
Micromachines2026, 17(3), 312;https://doi.org/10.3390/mi17030312 
(registering DOI)

28 February 2026

Flexible skin electronics are increasingly sought after for their potential in sensing and drug delivery within wearable human–machine interfaces. However, developing multifunctional applications that maintain biocompatibility and stable electr...

  • Article
  • Open Access
Micromachines2026, 17(3), 311;https://doi.org/10.3390/mi17030311 
(registering DOI)

28 February 2026

To enhance the anti-jamming performance and operational reliability of drones, this paper presents the design, fabrication, and measurement of a novel polarization-reconfigurable metasurface antenna that meets these demands. The design process is gui...

  • Article
  • Open Access
Micromachines2026, 17(3), 309;https://doi.org/10.3390/mi17030309 
(registering DOI)

28 February 2026

Wafer map defect classification plays a critical role in yield monitoring and root-cause analysis in semiconductor manufacturing. Although recent convolutional neural network (CNN)-based approaches have achieved high classification accuracy, most exi...

  • Article
  • Open Access
Micromachines2026, 17(3), 307;https://doi.org/10.3390/mi17030307 
(registering DOI)

28 February 2026

With the advancement of SiC wafers toward 12 inches and innovations in laser cutting technology, new demands have emerged for SiC grinding techniques—namely, high efficiency, low loss, and low wear ratio. This paper investigates electrochemical...

  • Review
  • Open Access
Micromachines2026, 17(3), 306;https://doi.org/10.3390/mi17030306 
(registering DOI)

28 February 2026

Chronic and infected wounds remain a major clinical challenge due to their dynamic microenvironments and the lack of real-time diagnostic feedback in conventional dressings. Recent advances in stimuli-responsive nanomaterial-based biosensors have ena...

  • Article
  • Open Access
Micromachines2026, 17(3), 305;https://doi.org/10.3390/mi17030305 
(registering DOI)

28 February 2026

The uniformity of nitrogen (N) doping concentration in 4H-SiC epitaxial wafers is a critical determinant of electrical consistency and device reliability. In this study, key chemical vapor deposition (CVD) growth parameters, including the C/Si ratio,...

  • Article
  • Open Access

Size-Dependent Transition from Stable Surface Modes to Symmetric Geometric Cleavage in Ultrasound-Driven Microbubbles

  • Ruixiang Yu,
  • Teng Zhang,
  • Lianbin Zhao,
  • Yongcheng Fang,
  • Yongzhen Jin,
  • Zihan Tang,
  • Yumeng Feng,
  • Yuanyuan Li and
  • Hao Wu
Micromachines2026, 17(3), 304;https://doi.org/10.3390/mi17030304 
(registering DOI)

28 February 2026

The dynamic evolution of microbubbles under ultrasonic excitation is fundamental to applications ranging from targeted drug delivery to acoustic cleaning. This study employs a synchronous high-speed microscopic imaging system to systematically invest...

  • Article
  • Open Access

Effects of In Situ Preheating Technology on Mechanical Properties and Microstructure of FFF-Printed PEEK

  • Junhua Wang,
  • Yuanming Mao,
  • Jianan Shen,
  • Yan Lu,
  • Kun Li,
  • Junfei Xu,
  • Zhuangya Zhang,
  • Ruijie Gu and
  • Tancheng Xie
Micromachines2026, 17(3), 303;https://doi.org/10.3390/mi17030303 
(registering DOI)

28 February 2026

The Polyether ether ketone (PEEK) suffers from insufficient interlayer molecular chain diffusion and weak interfacial fusion during Fused Filament Fabrication (FFF) due to its high melt viscosity and rapid cooling characteristics, restricting the mec...

  • Article
  • Open Access

A Comb-Shaped Flexible Microelectrode Array for Simultaneous Multi-Scale Cortical Recording

  • Suyi Zhang,
  • Jin Shan,
  • Shiya Lv,
  • Yu Liu,
  • Jian Miao,
  • Ziyu Liu,
  • Ezhu Ning,
  • Zhaojie Xu,
  • Juntao Liu and
  • Yilin Song
  • + 3 authors
Micromachines2026, 17(3), 301;https://doi.org/10.3390/mi17030301 
(registering DOI)

28 February 2026

High-resolution, multi-modal neural interfaces are essential for advancing systems neuroscience and brain–computer interface technologies. This study designed and fabricated a 128-channel comb-shaped flexible micro-electrode array. The device i...

  • Article
  • Open Access

A Battery-Free, Data-Informed UV Dose Sensor Made of Laser-Induced Graphene and Bio-Derived Electrolytes

  • Mohammadreza Chimerad,
  • Pouya Borjian,
  • Faisal Bin Kashem,
  • Swaminathan Rajaraman and
  • Hyoung J. Cho
Micromachines2026, 17(3), 302;https://doi.org/10.3390/mi17030302 
(registering DOI)

28 February 2026

This study presents a sustainable, battery-free UV (ultraviolet) dose sensor designed for intelligent food packaging applications. The device integrates laser-induced graphene (LIG) electrodes, a ZnO-CNT (carbon nanotube) UV-active composite, and a b...

  • Article
  • Open Access

27 February 2026

This paper proposes a corner analysis approach for CMOS circuits taking into the account radiation effects. The presented simulation approach is implemented using the open-source design automation (EDA) software QUCS-S 25.2.0 and Ngspice 45. It was d...

  • Article
  • Open Access

27 February 2026

This study presents the development of a highly sensitive and selective electrochemical method for the determination of etamsylate (ETM) using a Boron-Doped Diamond (BDD) electrode. Analytical conditions were optimized using Square Wave Voltammetry (...

  • Article
  • Open Access

High-Efficiency and Low-Defect Removal Mechanism of Silicon Carbide Using Center-Inlet Computer-Controlled Polishing

  • Pengli Lei,
  • Baojian Ji,
  • Jing Hou,
  • Mincai Liu,
  • Wenhui Deng,
  • Fei Fan,
  • Jian Wang and
  • Bo Zhong

27 February 2026

Reaction-bonded silicon carbide (RB-SiC) is the preferred material for space optical systems because of its low density and high specific stiffness. However, its hardness and multi-component properties lead to low efficiency and pit defects during th...

  • Article
  • Open Access

Shear Instability Control of Hybrid Small-Scale Plates Embedded in a Polymer Matrix via Shape Memory Alloy Nanofibers

  • Mohammad Reza Farajpour,
  • Mohammad Danesh,
  • Mohammad Hossein Shokrani and
  • Ali Farajpour

27 February 2026

A refined mathematical framework is developed to investigate the ability of shape memory alloy (SMA) nanofibers to control the shear instability of a hybrid small-scale plate made of three layers containing nanofibers. The middle layer is reinforced...

  • Article
  • Open Access

Electrical Properties and Performance Enhancement of AlGaN/GaN/Si HEMTs

  • Hana Mosbahi,
  • Mohammed Khalil Mohammed Ali and
  • Malek Gassoumi

27 February 2026

This study presents a detailed electrical analysis of AlGaN/GaN/Si HEMTs grown by molecular beam epitaxy, using direct and pulse current, small-signal microwave, and deep-level transient spectroscopy (DLTS) techniques to investigate transport charact...

  • Article
  • Open Access

27 February 2026

This work presents a highly compact triple-band multi-input-multi-output (MIMO) implantable antenna for wireless capsule endoscopy (WCE) and leadless cardiac pacemakers. The proposed antenna operates at industrial, scientific, and medical (ISM) bands...

  • Article
  • Open Access

A Silicon Resonant Pressure Microsensor Based on Frequency-Ratio Measurement for High-Temperature Applications

  • Zhaoyuan Tan,
  • Pengxiang Ye,
  • Xiaohan Liu,
  • Bo Xie,
  • Yulan Lu,
  • Deyong Chen and
  • Junbo Wang

27 February 2026

This paper presents a high-temperature silicon resonant pressure microsensor capable of stable operation up to 175 °C and 175 MPa, addressing the critical need for reliable pressure monitoring in deep well drilling and petroleum exploration. To o...

  • Article
  • Open Access

27 February 2026

This study systematically investigates the flow characteristics, mixing efficiency, and concentration gradient generation (CGG) capabilities of three types of vertical-stepped main-channel microfluidic concentration gradient generators—the upwa...

  • Article
  • Open Access
30 Views
23 Pages

26 February 2026

Accurate measurement of robotic pose is indispensable for large-scale precision manufacturing and robotic calibration, particularly because traditional robotic kinematic models often fall short owing to environmental disturbances and structural uncer...

  • Article
  • Open Access
40 Views
13 Pages

Denoising Method for NV-Center Fluorescence Signals Based on MPA-VMD Combined with Wavelet Thresholding

  • Yanxin He,
  • Xin Li,
  • Zhonghao Li,
  • Hao Guo,
  • Huan Fei Wen,
  • Jun Tang and
  • Jun Liu

26 February 2026

To address complex noise in nitrogen-vacancy center fluorescence signal acquisition, a hybrid denoising framework combining marine predators algorithm-optimized variational mode decomposition (VMD) and wavelet thresholding is proposed. MPA adaptively...

  • Article
  • Open Access
122 Views
22 Pages

Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement

  • Abdurrashid Hassan Shuaibu,
  • Almur A. S. Rabih,
  • Yves Blaquière and
  • Frederic Nabki

26 February 2026

This work reports a post-release sputter-metallization process for microelectromechanical systems (MEMS) switches with silicon-to-silicon (Si-to-Si) contacts fabricated by deep reactive ion etching. Platinum (Pt) was selectively deposited on the cont...

  • Article
  • Open Access
130 Views
18 Pages

A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment

  • Jiefeng Peng,
  • Liang Hu,
  • Rui Su,
  • Yingnan Shen,
  • Jing Wang,
  • Xin Fu and
  • Xiaodong Ruan

25 February 2026

High-precision thermal regulation in semiconductor process equipment is critical for product quality, yet it is challenged by actuator transport delays, limited actuator bandwidth due to hardware dynamics, and broadband inlet disturbances in temperat...

  • Article
  • Open Access
62 Views
21 Pages

Investigation of Flow Boiling Heat Transfer Performance of Grooved Metal Foam (Ni, Cu) Evaporators

  • Junteng Cao,
  • Huajie Li,
  • Xianbo Nian,
  • Chaoyi Zhang,
  • Yuankun Zhang and
  • Chunsheng Guo

25 February 2026

To meet the miniaturized cooling demands of high-heat-flux electronic devices, metal foams—featuring high specific surface area and multiscale porous structures—are considered promising candidates for enhancing flow boiling evaporation. H...

  • Article
  • Open Access
150 Views
17 Pages

25 February 2026

Self-sustained oscillatory systems enable autonomous motion through continuous interaction with ambient energy sources, positioning them as promising candidates for soft robotic actuation, energy conversion, and biomedical applications. However, thei...

  • Feature Paper
  • Article
  • Open Access
125 Views
14 Pages

Research on Low Numerical Aperture 808 nm Fiber-Coupled Semiconductor Laser

  • Fei Lin,
  • Qi Wu,
  • Wei Luo,
  • Yishui Lin,
  • Zhaoxuan Zheng,
  • Mingkun Yuan,
  • Qizhi Zhang,
  • Maodong Hu,
  • Dongxin Xu and
  • Yi Qu
  • + 1 author

25 February 2026

This article investigates fiber coupling techniques for low numerical aperture 808 nm semiconductor lasers. A coupling optical system combining fast-axis/slow-axis collimators (FAC/SAC) with a focusing lens was designed, achieving efficient coupling...

  • Article
  • Open Access
77 Views
13 Pages

25 February 2026

A novel multimode resonator is designed in this paper. Incorporating two open-circuited stubs of distinct impedances loaded onto a uniform half-wavelength transmission line, the resonator enables the realization of a dual-band filter—with cente...

  • Review
  • Open Access
177 Views
45 Pages

Advances in 3D Bioprinting: Materials, Processes, and Emerging Applications

  • Subin Antony Jose,
  • Antonia Evtimow and
  • Pradeep L. Menezes

25 February 2026

Three-dimensional (3D) bioprinting has rapidly emerged as a transformative technology at the interface of biomedical engineering and regenerative medicine. By enabling the spatially controlled deposition of living cells, biomaterials, and bioactive m...

  • Article
  • Open Access
139 Views
13 Pages

25 February 2026

This paper proposes a high-efficiency adaptive-on-time buck DC-DC converter (HEAOT–Buck) capable of supporting a 100% duty cycle. The converter operates over an input voltage range of 3–18 V and provides an adjustable output voltage from...

  • Article
  • Open Access
170 Views
20 Pages

25 February 2026

This study investigates a low-frequency piezoelectric–electromagnetic–triboelectric hybrid vibration energy harvester designed to address the narrow operating bandwidth of conventional vibration energy harvesters. The integrated design co...

  • Article
  • Open Access
137 Views
21 Pages

Hyaluronan-Based Glioblastoma Tumor Constructs Maintain Patient Tumor Drug Responses and Genomic Parity

  • Hemamylammal Sivakumar,
  • Steven D. Forsythe,
  • Adrian W. Laxton,
  • Stephen B. Tatter,
  • Lance D. Miller,
  • Roy E. Strowd and
  • Aleksander Skardal

24 February 2026

Glioblastoma (GBM) is an extremely aggressive and incurable primary tumor of the brain. GBM is characterized by interpatient and intratumoral heterogeneity, making this cancer particularly resistant to therapy and likely to recur. Mapping the complex...

  • Article
  • Open Access
117 Views
19 Pages

Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive

  • Mumu Li,
  • Wenlong Jiao,
  • Kun Huang,
  • Botao Wang,
  • Zhihua Dai,
  • Yang Gao,
  • Huiliang Cao and
  • Huikai Xie

24 February 2026

This paper designs and fabricates an electrostatic-driven dual-axis MEMS micromirror capable of out-of-plane torsional motion about both the X and Y axes. Both torsional axes employ planar comb structures for their drive mechanisms, effectively reduc...

  • Article
  • Open Access
141 Views
16 Pages

24 February 2026

In response to the significant challenges posed by the rapid progress of multi-spectral detection technologies to traditional stealth techniques, this paper presents a flexible transparent metasurface structure that is compatible with radar and infra...

  • Article
  • Open Access
182 Views
25 Pages

Influence of Inlet Splitter Structure on Flow and Heat Transfer Performance in Microchannel Heat Exchangers

  • Wenchao Tian,
  • Yuanyuan Xi,
  • Shuaike Li,
  • Feiyang Li,
  • Yifan Wang,
  • Haojie Dang and
  • Si Chen

23 February 2026

Microchannel liquid cooling technology, characterized by high heat-transfer efficiency, represents an effective solution for thermal management in high heat-flux density electronic devices. Existing research has mainly focused on optimizing the struc...

  • Article
  • Open Access
169 Views
14 Pages

2D and 3D Interdigital Capacitors and Bias Tees Technologies on MnM Interposer for mmWave Applications

  • Gabriel Griep,
  • Robert G. Bovadilla,
  • Leonardo G. Gomes,
  • Luís Q. Cartagena,
  • Gustavo P. Rehder and
  • Ariana L. C. Serrano

23 February 2026

This paper presents two capacitors fabricated using the metallic nanowire membrane (MnM) interposer technology operating at mmWaves. Standard 2D interdigital capacitors (IDCs) are designed to operate up to 70 GHz, which presents a straightforward and...

  • Article
  • Open Access
124 Views
19 Pages

23 February 2026

In response to the increasingly severe heat dissipation challenges in electronic devices, three types of manifold microchannel heat sinks (MMC) incorporating rhombic pin-fins were proposed. Under the constraint that the maximum temperature of the hea...

  • Article
  • Open Access
167 Views
20 Pages

22 February 2026

Magnetic nanoparticles, with their excellent biocompatibility and biodegradability, serve as ideal materials for constructing targeted drug delivery systems. Iron oxide (Fe3O4) nanoparticles, controllably prepared via methods such as solvothermal syn...

  • Article
  • Open Access
169 Views
10 Pages

A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure

  • Zihan Wang,
  • Chaowei Si,
  • Jihua Zhang,
  • Zhen Fang,
  • Jinxu Liu,
  • Shuqi Li and
  • Wanli Zhang

22 February 2026

This study presents a high-performance MEMS accelerometer employing a symmetrical differential ‘sandwich’ capacitive structure. An orthogonal rectangular compensation method was integrated with wet anisotropic etching to achieve high stru...

  • Article
  • Open Access
137 Views
16 Pages

Single-Imaging Parasite-Quantification Microfluidic Device for Detection and Analysis of Schistosoma Eggs in Urine

  • Heaven D. Chitemo,
  • Vyacheslav R. Misko,
  • Matthieu Briet,
  • Jeffer Bhuko,
  • Filip Legein,
  • Humphrey D. Mazigo and
  • Wim De Malsche

22 February 2026

The accurate diagnosis of schistosomiasis for effective disease surveillance, treatment, and follow-up is crucial to attain the World Health Organization’s 2030 goal to eliminate schistosomiasis as a public health problem. The current diagnosti...

  • Article
  • Open Access
207 Views
7 Pages

20 February 2026

We examine the transition from the Fowler–Nordheim (FN) field emission regime to the space-charge-limited (SCLC) regime in the case of a pointed nanometric emitter with radius of curvature R ≥ 5 nm, for which the traditional FN equations do...

  • Article
  • Open Access
222 Views
16 Pages

Terahertz Wave Absorber Relying on Strontium Titanate and Dirac Semimetal for Dual Adjustability

  • Zeng Qu,
  • Mengyuan Zhao,
  • Yuanhao Huang,
  • Yibin Gong,
  • Shishengdian Lu,
  • Xuanqi Zhang,
  • Jiayun Wang,
  • Yuanhui Wang,
  • Yinuo Cheng and
  • Binzhen Zhang

20 February 2026

Limited by the material response characteristics and structural design, the development of dynamically tunable terahertz absorbers with multi-functional properties remains a major challenge. In this study, a dual-tunable terahertz absorber based on t...

  • Article
  • Open Access
255 Views
18 Pages

Design, Modeling, and Fabrication of a High-Q AlN Annular Gyroscope with Sub-10°/h Bias Instability

  • Zhenxiang Qi,
  • Jie Gu,
  • Bingchen Zhu,
  • Zhaoyang Zhai,
  • Xiaorui Bie,
  • Wuhao Yang and
  • Xudong Zou

20 February 2026

This work presents a high-performance piezoelectric MEMS yaw gyroscope fabricated on a single-crystal silicon platform, which achieves a quality factor of 75 k—the highest reported to date among silicon-based piezoelectric gyroscopes. The devic...

  • Review
  • Open Access
199 Views
30 Pages

20 February 2026

Smart healthcare is rapidly emerging as a transformative paradigm, enabling simultaneous health monitoring, therapeutic intervention, and early prediction of disease onset. In this context, electrochemical monitoring systems have attracted growing in...

  • Article
  • Open Access
202 Views
13 Pages

Enhancement of TIRF Imaging of 3D-Cultured Spheroids via Hydrostatic Compression Using a Balloon Actuator

  • Maho Kaminaga,
  • Kaisei Nakano,
  • Yuichi Marui,
  • Sota Yamada,
  • Masaki Matsuzaki and
  • Hinata Kametaka

20 February 2026

Three-dimensional (3D) cultured cells can mimic the in vivo tumor microenvironment more accurately than conventional monolayer cultures. Therefore, they are essential in cancer research and drug discovery. However, high-sensitivity fluorescence imagi...

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Micromachines - ISSN 2072-666X