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Journal: PlasmaVolume: 4Number: 16
Article: Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)
  • Authors:
  • Masaomi Sanekata1,*,
  • Hiroshi Nishida1 and
  • Tatsuya Watabe1
  • et al.
Link: https://www.mdpi.com/2571-6182/4/2/16

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