Sanekata, M.; Nishida, H.; Watabe, T.; Nakagomi, Y.; Hirai, Y.; Nishimiya, N.; Tona, M.; Yamamoto, H.; Hirata, N.; Tsukamoto, K.;
et al. Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS). Plasma 2021, 4, 239-251.
https://doi.org/10.3390/plasma4020016
AMA Style
Sanekata M, Nishida H, Watabe T, Nakagomi Y, Hirai Y, Nishimiya N, Tona M, Yamamoto H, Hirata N, Tsukamoto K,
et al. Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS). Plasma. 2021; 4(2):239-251.
https://doi.org/10.3390/plasma4020016
Chicago/Turabian Style
Sanekata, Masaomi, Hiroshi Nishida, Tatsuya Watabe, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Hiroaki Yamamoto, Naoyuki Hirata, Keizo Tsukamoto,
and et al. 2021. "Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)" Plasma 4, no. 2: 239-251.
https://doi.org/10.3390/plasma4020016
APA Style
Sanekata, M., Nishida, H., Watabe, T., Nakagomi, Y., Hirai, Y., Nishimiya, N., Tona, M., Yamamoto, H., Hirata, N., Tsukamoto, K., Ohshimo, K., Misaizu, F., & Fuke, K.
(2021). Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS). Plasma, 4(2), 239-251.
https://doi.org/10.3390/plasma4020016
