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Abstract

Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device †

by
Anton Köck
1,*,
Marco Deluca
1,
Florentyna Sosada-Ludwikowska
1,
Günther Maier
1,
Robert Wimmer Teubenbacher
1,
Martin Sagmeister
2,
Karl Rohracher
2,
Ewald Wachmann
2,
Jan Steffen Niehaus
3,
Sören Becker
3,
Öznur Tokmak
3,
Hendrik Schlicke
3,
Alexander Blümel
4,
Karl Popovic
4 and
Martin Tscherner
4
1
Materials Center Leoben Forschung GmbH, Roseggerstraße 12, 8700 Leoben, Austria
2
ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria
3
Center for Applied Nanotechnology CAN, Fraunhofer Institute for Applied Polymer Research IAP, Grindelallee 117, 20146 Hamburg, Germany
4
Joanneum Research, Institute for Surface Technologies and Photonics, Franz-PichlerStrasse 30, 8160 Weiz, Austria
*
Author to whom correspondence should be addressed.
†
Presented at the 8th GOSPEL Workshop. Gas Sensors Based on Semiconducting Metal Oxides: Basic Understanding & Application Fields, Ferrara, Italy, 20–21 June 2019.
Proceedings 2019, 14(1), 5; https://doi.org/10.3390/proceedings2019014005
Published: 19 June 2019
(This article belongs to the Proceedings of The 8th GOSPEL Workshop. Gas Sensors Based on Semiconducting Metal Oxides: Basic Understanding & Application Fields)
Browse Figures
Versions Notes
A worldwide unique CMOS based chemical sensor device comprising an array of 8 microhotplates (µhps) for a total of 16 chemical sensors has been fabricated (Figure 1). Ultrathin (50 nm) SnO2 films have been heterogeneously integrated on the device by spray pyrolysis technology, photolithography and etching. Subsequently the SnO2 films are functionalized with metallic nanoparticles (NPs) such as Au, Pt, AuPd, or NiPt in order to improve sensitivity and selectivity. Figure 2 shows the strongly improved response of a NiPt-functionalized SnO2 sensor towards carbon monoxide (10–200 ppm, 25–75% rh): at an operation temperature of only 150 °C the sensor exhibits a response of more than 90%. Presently different metal oxide films (SnO2, ZnO, CuO) additionally functionalized with NPs are processed on the µhp-array chip. This is the approach of choice for realization of a fully CMOS integrated multi-gas sensor device.

Acknowledgments

This work was performed within the EC FP7 project “MSP—Multi Sensor Platform for Smart Building Management” (GA No. 611887), and the Austrian FFG project “FunkyNano—Optimized Functionalization of Nanosensors for Gas Detection by Screening of Hybrid Nanoparticles” (Project No. 858637).
Proceedings 14 00005 g001
Figure 1. Chemical sensor device comprising an array of 8 µhps for a total of 16 sensors.
Figure 1. Chemical sensor device comprising an array of 8 µhps for a total of 16 sensors.
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Proceedings 14 00005 g002
Figure 2. Response of SnO2 thin film sensor, functionalized with NiPt-NPs towards CO.
Figure 2. Response of SnO2 thin film sensor, functionalized with NiPt-NPs towards CO.
Proceedings 14 00005 g002

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MDPI and ACS Style

Köck, A.; Deluca, M.; Sosada-Ludwikowska, F.; Maier, G.; Teubenbacher, R.W.; Sagmeister, M.; Rohracher, K.; Wachmann, E.; Niehaus, J.S.; Becker, S.; et al. Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device. Proceedings 2019, 14, 5. https://doi.org/10.3390/proceedings2019014005

AMA Style

Köck A, Deluca M, Sosada-Ludwikowska F, Maier G, Teubenbacher RW, Sagmeister M, Rohracher K, Wachmann E, Niehaus JS, Becker S, et al. Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device. Proceedings. 2019; 14(1):5. https://doi.org/10.3390/proceedings2019014005

Chicago/Turabian Style

Köck, Anton, Marco Deluca, Florentyna Sosada-Ludwikowska, Günther Maier, Robert Wimmer Teubenbacher, Martin Sagmeister, Karl Rohracher, Ewald Wachmann, Jan Steffen Niehaus, Sören Becker, and et al. 2019. "Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device" Proceedings 14, no. 1: 5. https://doi.org/10.3390/proceedings2019014005

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