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Journal: Proceedings, 2019
Volume: 14
Number: 5
Article:
Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device
Authors:
by
Anton Köck, Marco Deluca, Florentyna Sosada-Ludwikowska, Günther Maier, Robert Wimmer Teubenbacher, Martin Sagmeister, Karl Rohracher, Ewald Wachmann, Jan Steffen Niehaus, Sören Becker, Öznur Tokmak, Hendrik Schlicke, Alexander Blümel, Karl Popovic and Martin Tscherner
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https://www.mdpi.com/2504-3900/14/1/5
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