- Review
Low-Temperature Bonding for Silicon-Based Micro-Optical Systems
- Yiheng Qin,
- Matiar M.R. Howlader and
- M. Jamal Deen
Silicon-based integrated systems are actively pursued for sensing and imaging applications. A major challenge to realize highly sensitive systems is the integration of electronic, optical, mechanical and fluidic, all on a common platform. Further, th...

