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  • Article
  • Open Access

31 December 2010

7 Pages

Nonlinear Transient Analysis for Large-Scale Dynamics of Microelectromechanical Systems with the MOR-PIM Method

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1
Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education, 116023, P. R. China
2
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian, 116023, P. R. China
*
Author to whom correspondence should be addressed.

Abstract

Microelectromechanical Systems (MEMS) is difficult to take transient analysis due to the tight coupling between the multiple energy domains, typically nonlinear. An effective increment-dimensional precise integration method (PIM) combined with the model order reduction (MOR) technique based on Krylov subspace is present to solve large-scale nonlinear finite element dynamics systems. The numerical example of V-beam electro-thermal actuator is shown to demonstrate that the MOR-PIM method can achieve high precision and fast speed when solving the nonlinear dynamic equation with large-scale freedom.

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