Article Versions Notes

Li C, Shen M, Li X, Fu Y, Dong Y, Lyu B, Yuan J. Chemical–Mechanical Polishing of 4H-SiC Using Multi-Catalyst Synergistic Activation of Potassium Peroxymonosulfate. Processes. 2025; 13(4):1094. https://doi.org/10.3390/pr13041094

Li, Congzheng, Mengmeng Shen, Xuelai Li, Yuhan Fu, Yanfang Dong, Binghai Lyu, and Julong Yuan. 2025. "Chemical–Mechanical Polishing of 4H-SiC Using Multi-Catalyst Synergistic Activation of Potassium Peroxymonosulfate" Processes 13, no. 4: 1094. https://doi.org/10.3390/pr13041094

Li, C., Shen, M., Li, X., Fu, Y., Dong, Y., Lyu, B., & Yuan, J. (2025). Chemical–Mechanical Polishing of 4H-SiC Using Multi-Catalyst Synergistic Activation of Potassium Peroxymonosulfate. Processes, 13(4), 1094. https://doi.org/10.3390/pr13041094