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Journal: CoatingsVolume: 13Number: 960
Article: Atomic Layer Deposition of Chlorine Containing Titanium–Zinc Oxide Nanofilms Using the Supercycle Approach
- Authors:
- Denis Nazarov 1,2,*,
- Lada Kozlova 1 and
- Maxim Maximov 2
- et al.
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