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Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes

1,2, 1,2, 1,2, 1,2 and 1,2,3,*
1
Engineering Research Center for Optoelectronics of Guangdong Province, School of Physics and Optoelectronics, South China University of Technology, Guangzhou 510640, China
2
Engineering Laboratory for Wide Band gap Semiconductor Materials and Devices of Guangdong Province, School of Electronics and Information Engineering, South China University of Technology, Guangzhou 510640, China
3
Zhongshan Institute of Modern Industrial Technology, South China University of Technology, Zhongshan 528437, China
*
Author to whom correspondence should be addressed.
Nanomaterials 2019, 9(3), 403; https://doi.org/10.3390/nano9030403
Received: 8 February 2019 / Revised: 5 March 2019 / Accepted: 6 March 2019 / Published: 10 March 2019
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Abstract

We fabricated an indium tin oxide (ITO)/Ga2O3/Ag/Ga2O3 multilayer as a transparent conductive electrode for ultraviolet light-emitting diodes (UV LEDs). The electrical and optical properties of the multilayer were improved by optimizing the annealing temperature of the ITO contact layer and the whole ITO/Ga2O3/Ag/Ga2O3 multilayer, and the thickness of the ITO contact layer and Ag metal layer. After optimization, the sheet resistance and transmittance of the ITO/Ga2O3/Ag/Ga2O3 multilayer was 3.43 Ω/sq and 86.4% at 335 nm, respectively. The ITO/Ga2O3/Ag/Ga2O3 multilayer also exhibited a good ohmic contact characteristic with a specific contact resistance of 1.45×10−3 Ω·cm2. These results show that the proposed ITO/Ga2O3/Ag/Ga2O3 multilayer is a promising alternative as a p-type electrode for UV LEDs. View Full-Text
Keywords: Ga2O3; transparent conductive electrode; UV LEDs; transmittance; sheet resistance Ga2O3; transparent conductive electrode; UV LEDs; transmittance; sheet resistance
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Liang, S.; Zhou, Q.; Li, X.; Zhong, M.; Wang, H. Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes. Nanomaterials 2019, 9, 403.

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