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Journal: Crystals, 2019
Volume: 9
Number: 671
Article:
Effects of He+ and H+ Co-Implantation with High Energy on Blisters and Craters of Si and SiO2-On-Si Wafers
Authors:
by
Rui Huang, Tian Lan, Chong Li, Jing Li and Zhiyong Wang
Link:
https://www.mdpi.com/2073-4352/9/12/671
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