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Journal: Crystals, 2023
Volume: 13
Number: 310

Article: Generation of Oxygen-Related Defects in Crystal Silicon Processed by the RPD
Authors: by Tomohiko Hara, Iori Oura, Takuma Matsuzuki and Yoshio Ohshita
Link: https://www.mdpi.com/2073-4352/13/2/310

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