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Oxidation of Thin Titanium Films: Determination of the Chemical Composition of the Oxide and the Oxygen Diffusion Factor

N.N. Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences (FRCCP RAS) Kosygina str. 4, 119991 Moscow, Russia
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Crystals 2020, 10(2), 117; https://doi.org/10.3390/cryst10020117
Received: 22 January 2020 / Revised: 10 February 2020 / Accepted: 12 February 2020 / Published: 14 February 2020
(This article belongs to the Special Issue Functional Oxide Based Thin-Film Materials (Volume II))
The morphologies and local electronic structures of titanium coatings deposited on the surfaces of highly oriented pyrolytic graphite were determined. Chemical compositions of the oxides formed on the coating surfaces were established. A theoretical model was developed describing the changes in the TiOx oxides (1.75 < x < 2) band gap depending on the duration and temperature of the titanium film annealing procedure in oxygen. The effective activation energy of oxygen diffusion in TiOx (1.75 < x < 2) was determined, and the pre-exponential factor of the diffusion coefficient was estimated. View Full-Text
Keywords: titanium oxide; Magneli phase; band gap; diffusion; scanning tunneling microscopy; scanning tunneling spectroscopy titanium oxide; Magneli phase; band gap; diffusion; scanning tunneling microscopy; scanning tunneling spectroscopy
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Sarvadii, S.Y.; Gatin, A.K.; Kharitonov, V.A.; Dokhlikova, N.V.; Ozerin, S.A.; Grishin, M.V.; Shub, B.R. Oxidation of Thin Titanium Films: Determination of the Chemical Composition of the Oxide and the Oxygen Diffusion Factor. Crystals 2020, 10, 117.

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