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Open AccessArticle

Nanosphere Lithography for Structuring Polycrystalline Diamond Films

Department of Physics, Faculty of Civil Engineering, Czech Technical University in Prague, Thákurova 7, 166 29 Praha 6, Czech Republic
Institute of Physics, Czech Academy of Sciences, Cukrovarnická 10/112, 162 00 Praha 6, Czech Republic
Author to whom correspondence should be addressed.
Crystals 2020, 10(2), 118;
Received: 20 January 2020 / Revised: 9 February 2020 / Accepted: 11 February 2020 / Published: 14 February 2020
(This article belongs to the Special Issue Photonic Crystals)
This paper deals with the structuring of polycrystalline diamond thin films using the technique of nanosphere lithography. The presented multistep approaches relied on a spin-coated self-assembled monolayer of polystyrene spheres, which served as a lithographic mask for the further custom nanofabrication steps. Various arrays of diamond nanostructures—close-packed and non-close-packed monolayers over substrates with various levels of surface roughness, noble metal films over nanosphere arrays, ordered arrays of holes, and unordered pores—were created using reactive ion etching, chemical vapour deposition, metallization, and/or lift-off processes. The size and shape of the lithographic mask was altered using oxygen plasma etching. The periodicity of the final structure was defined by the initial diameter of the spheres. The surface morphology of the samples was characterized using scanning electron microscopy. The advantages and limitations of the fabrication technique are discussed. Finally, the potential applications (e.g., photonics, plasmonics) of the obtained nanostructures are reviewed. View Full-Text
Keywords: diamond thin films; nanosphere lithography; polystyrene spheres; reactive ion etching diamond thin films; nanosphere lithography; polystyrene spheres; reactive ion etching
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MDPI and ACS Style

Domonkos, M.; Demo, P.; Kromka, A. Nanosphere Lithography for Structuring Polycrystalline Diamond Films. Crystals 2020, 10, 118.

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