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Micromachines, Volume 14, Issue 7
July 2023 - 206 articles
Cover Story: Silicon–glass microfluidic devices offer chemical resistivity towards corrosive solvents, mechanical strength, long-term endurance, and mass-production compatibility. In this research, a generic manufacturing approach is presented that enables three-dimensional glass–silicon–glass microfluidic structures to be fabricated based on the implementation of vertical vias and a redistribution layer. This device architecture is exemplarily used to create droplet-generation microfluidic devices with an increasing number of flow-focusing junctions operated in parallel and being feed from one single source. Increasing the number of junctions boosts the production rate without compromising droplet monodispersity, despite the more complex 3D fluid routing. High-throughput screening applications in biomedicine and biochemistry may benefit from the high performance of 3D silicon microfluidics. View this paper
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Micromachines - ISSN 2072-666XCreative Common CC BY license