Abstract
To receive a greater power and to demonstrate the soft bellows-shaped actuator’s wireless actuation, micro inductors were built for wireless power transfer and realized in a three-dimensional helical structure, which have previously been built in two-dimensional spiral structures. Although the three-dimensional helical inductor has the advantage of acquiring more magnetic flux linkage than the two-dimensional spiral inductor, the existing microfabrication technique produces a device on a two-dimensional plane, as it has a limit to building a complete three-dimensional structure. In this study, by using a three-dimensional printed soluble mold technique, a three-dimensional heater with helical coils, which have a larger heating area than a two-dimensional heater, was fabricated with three-dimensional receiving inductors for enhanced wireless power transfer. The three-dimensional heater connected to the three-dimensional helical inductor increased the temperature of the liquid and gas inside the bellows-shaped actuator while reaching 176.1% higher temperature than the heater connected to the two-dimensional spiral inductor. Thereby it enables a stroke of the actuator up to 522% longer than when it is connected to the spiral inductor. Therefore, three-dimensional micro coils can offer a significant approach to the development of wireless micro soft robots without incurring heavy and bulky parts such as batteries.