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Micromachines 2014, 5(4), 1323-1341;

Design and Analysis of a High Force, Low Voltage and High Flow Rate Electro-Thermal Micropump

Department of Electrical Electronics Engineering, Science and Research Branch, Islamic Azad University, Tehran 14778-93855, Iran
Department of Electrical Electronics Engineering, Iran University of Science and Technology, Tehran 16846, Iran
Department of Electrical Electronics Engineering, Khaje Nasir Toosi University of Technology, Tehran 19991-43344, Iran
Department of Electrical Electronics Engineering, Urmia University, Urmia 57159, Iran
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 11 August 2014 / Revised: 22 September 2014 / Accepted: 1 October 2014 / Published: 4 December 2014
(This article belongs to the Special Issue Micropumps: Design, Fabrication and Applications)
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This paper presents the design and simulation of an improved electro-thermal micromachined pump for drug delivery applications. Thermal actuators, which are a type of Micro Electro Mechanical system (MEMS) device, are highly useful because of their ability to deliver with great force and displacement. Thus, our structure is based on a thermal actuator that exploits the Joule heating effect and has been improved using the springy length properties of MEMS chevron beams. The Joule heating effect results in a difference in temperature and therefore displacement in the beams (actuators). Simulation results show that a maximum force of 4.4 mN and a maximum flow rate of 16 μL/min can be obtained by applying an AC voltage as low as 8 V at different frequencies ranging from 1 to 32 Hz. The maximum temperature was a problem at the chevron beams and the center shaft. Thus, to locally increase the temperature of the chevron beams alone and not that of the pumping diaphragm: (1) The air gaps 2 μm underneath and above the device layer were optimized for heat transfer. (2) Release holes and providing fins were created at the center shaft and actuator, respectively, to decrease the temperature by approximately 10 °C. (3) We inserted and used a polymer tube to serve as an insulator and eliminate leakage problems in the fluidic channel. View Full-Text
Keywords: MEMS micropump; electro thermal actuator; joule heating; pumping force; flow rate MEMS micropump; electro thermal actuator; joule heating; pumping force; flow rate

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Yosefi, G.; Mirzakuchaki, S.; Raissi, F.; Afrang, S. Design and Analysis of a High Force, Low Voltage and High Flow Rate Electro-Thermal Micropump. Micromachines 2014, 5, 1323-1341.

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